[Scan]
initial_time=2016-01-28T19:38:32
final_time=2016-01-28T19:38:55
ip_count=19
run=1026
dataset=6
scan=413
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.39442E-8
ql2_vset=
ql2_vmon=-7.99346E-1
ql2_imon=1.90355E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=1.06961E-9
ql4_vset=
ql4_vmon=-9.1414E0
ql4_imon=-1.55032E-10
mult1=-1.0222E-8
mult2=-2.73857E-9
rf_tmon=-4.67465E-3
rf_agc=3.28409E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=1.72211E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64524E0
bslens_imon=2.53938E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19645E1
lens5a_imon=1.97105E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05074E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=3.10091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05104E1
cs_ea1_imon=1.24087E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38786E0
lens1_imon=2.69732E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.97225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03898E1
cs_ea2_imon=1.39991E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.00901E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.22791E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11268E1
os_restr1_imon=4.29382E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15085E1
os_ea1_imon=2.41181E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=9.66128E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93369E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.19753E-8
tplens_vset=1.4E-1
tplens_vmon=1.61695E0
tplens_imon=-3.40225E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26392E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.592E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98394E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.95713E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2674E0
ionrepsh_imon=9.20216E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33695E1
lens5b_imon=2.18115E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46574E0
os_ea2_imon=-5.9366E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00641E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.50778E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.38454E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23001E2
cs_ionfoca_imon=6.30626E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.11234E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73429E1
iondef1_imon=1.08513E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66316E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.11733E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.54022E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13615E0
cs_ionaccel_imon=-1.09503E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47197E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.08061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-5.58035E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=6.75228E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.51721E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.4979E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3821E0
defgridb_imon=6.23807E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.42889E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07413E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62002E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30645E1
cs_fil1_imon=9.25367E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32806E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64066E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51569E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21901E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29919E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.20148E-7
chamber_cvt_pmon=2.51389E-3
foreline_cvt_pmon=2.51389E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91127E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=228
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17871E-1	-7.98726E-1	-9.1316E0	-9.14185E0	5.10216E-3	9.3627E-2	2.72638E1	-3.26514E1	-3.26402E1	2.66883E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17704E-1	-7.98893E-1	-9.13107E0	-9.14202E0	4.88758E-3	9.377E-2	2.74487E1	-3.26669E1	-3.26134E1	2.68569E1	1.20042E-7	2.51919E-3	2.51919E-3	6.3445E-3	3.02115E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.17776E-1	-7.98583E-1	-9.13117E0	-9.14178E0	4.86374E-3	9.35793E-2	2.72803E1	-3.26484E1	-3.26083E1	2.68036E1	1.20457E-7	2.51025E-3	2.51025E-3	6.29067E-3	3.01475E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17776E-1	-7.98702E-1	-9.13117E0	-9.14154E0	4.74453E-3	9.35793E-2	2.73446E1	-3.26691E1	-3.26242E1	2.67613E1	1.19841E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.17823E-1	-7.9875E-1	-9.13131E0	-9.14166E0	4.72069E-3	9.35078E-2	2.72943E1	-3.26585E1	-3.26336E1	2.67967E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.17657E-1	-7.98607E-1	-9.13098E0	-9.14176E0	4.69685E-3	9.39131E-2	2.7276E1	-3.26406E1	-3.26167E1	2.68224E1	1.20101E-7	2.52253E-3	2.52253E-3	6.30083E-3	3.00667E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17776E-1	-7.98631E-1	-9.131E0	-9.14199E0	4.76837E-3	9.36985E-2	2.73321E1	-3.26552E1	-3.26282E1	2.68882E1	1.19862E-7	2.52795E-3	2.52795E-3	6.31949E-3	3.00312E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.17561E-1	-7.98726E-1	-9.13112E0	-9.14204E0	4.74453E-3	9.35078E-2	2.7219E1	-3.26484E1	-3.26319E1	2.67868E1	1.20132E-7	2.52187E-3	2.52187E-3	6.29754E-3	2.99728E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.17561E-1	-7.98988E-1	-9.13117E0	-9.14195E0	4.673E-3	9.36985E-2	2.73541E1	-3.26352E1	-3.26652E1	2.67857E1	1.19902E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.17537E-1	-7.98821E-1	-9.13112E0	-9.14192E0	4.8399E-3	9.34362E-2	2.73015E1	-3.2653E1	-3.26332E1	2.67986E1	1.20084E-7	2.52139E-3	2.52139E-3	6.36349E-3	3.01742E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.17585E-1	-7.98535E-1	-9.13084E0	-9.14187E0	4.91142E-3	9.377E-2	2.72757E1	-3.26711E1	-3.26915E1	2.68196E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00302E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.1749E-1	-7.98893E-1	-9.13112E0	-9.14187E0	4.76837E-3	9.37223E-2	2.73387E1	-3.26741E1	-3.26188E1	2.67746E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.17418E-1	-7.98941E-1	-9.1306E0	-9.14185E0	4.64916E-3	9.377E-2	2.72859E1	-3.26633E1	-3.26356E1	2.68256E1	1.19913E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9978E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09611E0	-8.17585E-1	-7.98893E-1	-9.13105E0	-9.14183E0	4.86374E-3	9.34839E-2	2.72919E1	-3.26488E1	-3.2653E1	2.68767E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09611E0	-8.17728E-1	-7.98845E-1	-9.13093E0	-9.14145E0	4.64916E-3	9.39369E-2	2.73671E1	-3.26857E1	-3.26283E1	2.69177E1	1.2035E-7	2.52027E-3	2.52027E-3	6.31299E-3	3.01742E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17633E-1	-7.98655E-1	-9.13086E0	-9.14145E0	4.72069E-3	9.38416E-2	2.72841E1	-3.26759E1	-3.26242E1	2.66388E1	1.1993E-7	2.52301E-3	2.52301E-3	6.29703E-3	2.99014E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.17752E-1	-7.98821E-1	-9.13119E0	-9.14221E0	4.81606E-3	9.38654E-2	2.72847E1	-3.26621E1	-3.26236E1	2.68917E1	1.20191E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.1768E-1	-7.9875E-1	-9.13095E0	-9.14195E0	4.50611E-3	9.37939E-2	2.73526E1	-3.26863E1	-3.2633E1	2.68163E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17442E-1	-7.98988E-1	-9.13088E0	-9.14199E0	4.62532E-3	9.35316E-2	2.72715E1	-3.26699E1	-3.25984E1	2.6604E1	1.1954E-7	2.52448E-3	2.52448E-3	6.31269E-3	2.98592E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17609E-1	-7.99346E-1	-9.13095E0	-9.1414E0	4.52995E-3	9.36031E-2	2.73429E1	-3.26458E1	-3.26392E1	2.66316E1	1.20148E-7	2.51389E-3	2.51389E-3	6.29919E-3	3.00563E-1