[Scan]
initial_time=2016-01-28T19:39:04
final_time=2016-01-28T19:39:27
ip_count=19
run=1026
dataset=6
scan=414
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08762E-4
ql1_vset=
ql1_vmon=-8.17299E-1
ql1_imon=1.39754E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=1.95776E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=9.88185E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.35362E-10
mult1=-9.49936E-9
mult2=-2.66446E-9
rf_tmon=-5.88395E-3
rf_agc=3.22532E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.65163E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67157E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20031E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53767E1
cs_ef1b_imon=3.10303E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04589E2
lens23_imon=1.02051E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.23976E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37746E0
lens1_imon=2.57611E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64515E1
os_ef1alow_imon=2.98551E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03941E1
cs_ea2_imon=1.40799E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8455E1
cs_ef1a_imon=3.00236E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.22257E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11373E1
os_restr1_imon=4.30365E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15098E1
os_ea1_imon=2.41511E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6371E1
os_ef1bup_imon=3.06935E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24843E0
cs_ionrep_imon=9.63557E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93273E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01753E1
cs_anode1_imon=2.05473E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.20086E-8
tplens_vset=1.4E-1
tplens_vmon=1.6549E0
tplens_imon=-1.52903E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25859E1
iondef3_imon=1.4943E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.5718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98136E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.97052E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29189E0
ionrepsh_imon=9.46294E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33621E1
lens5b_imon=2.18996E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74595E1
cs_ef2b_imon=3.11875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47125E0
os_ea2_imon=-5.89987E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00604E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12754E0
os_ef2alow_imon=-2.61923E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81414E-1
os_ef2bup_imon=-5.45984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10618E1
os_restr2_imon=3.40019E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.29083E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01509E1
cs_anode2_imon=2.09965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.11268E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66887E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.16943E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.56234E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12141E0
cs_ionaccel_imon=-9.01382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47155E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56112E1
einzel_imon=7.83006E-6
window_vset=0.0E0
window_vmon=1.91399E-1
window_imon=-1.12219E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86893E1
mask2_imon=-6.39401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.66318E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.47314E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.29221E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24727E0
defgridb_imon=6.18664E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33282E1
os_fil1_imon=9.41678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07036E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62641E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30648E1
cs_fil1_imon=9.25697E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2789E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63969E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0686E-2
os_fil2_imon=-2.60636E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.88005E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34089E-1
cs_fil2_imon=-2.74983E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44186E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21814E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21137E-1
res40_imon=-2.66414E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.17728E-1	-7.98965E-1	-9.13126E0	-9.14152E0	4.673E-3	9.3627E-2	2.72929E1	-3.27007E1	-3.26011E1	2.6802E1	1.20122E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00041E-1
2.0E0	3.5E1	1.0E0	3.16E2	1.6E2	-2.09565E0	-8.17466E-1	-7.99084E-1	-9.13141E0	-9.1418E0	4.8399E-3	9.34362E-2	2.72895E1	-3.26772E1	-3.26335E1	2.68393E1	1.20042E-7	2.52131E-3	2.52131E-3	6.33388E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.17704E-1	-7.9906E-1	-9.13131E0	-9.1419E0	4.72069E-3	9.33647E-2	2.72767E1	-3.26573E1	-3.26306E1	2.68128E1	1.19775E-7	2.51611E-3	2.51611E-3	6.3245E-3	3.01881E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.1737E-1	-7.9937E-1	-9.13115E0	-9.14173E0	4.81606E-3	9.36031E-2	2.73546E1	-3.26673E1	-3.25995E1	2.67491E1	1.1974E-7	2.51709E-3	2.51709E-3	6.33388E-3	2.98842E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09657E0	-8.1718E-1	-7.99131E-1	-9.13105E0	-9.14171E0	4.79221E-3	9.37462E-2	2.72856E1	-3.26307E1	-3.26154E1	2.67884E1	1.19851E-7	2.5131E-3	2.5131E-3	6.28592E-3	2.98156E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17466E-1	-7.99322E-1	-9.13093E0	-9.1419E0	4.8399E-3	9.36031E-2	2.72859E1	-3.26603E1	-3.26272E1	2.68551E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17537E-1	-7.99179E-1	-9.13136E0	-9.14187E0	4.50611E-3	9.40084E-2	2.72901E1	-3.26705E1	-3.2632E1	2.66548E1	1.19851E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.01738E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.17513E-1	-7.98917E-1	-9.13129E0	-9.14168E0	4.36306E-3	9.39846E-2	2.72676E1	-3.26652E1	-3.25986E1	2.66368E1	1.19713E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.1737E-1	-7.98941E-1	-9.13112E0	-9.14192E0	4.50611E-3	9.38177E-2	2.73127E1	-3.26406E1	-3.26241E1	2.6888E1	1.19765E-7	2.51323E-3	2.51323E-3	6.3074E-3	3.01489E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17299E-1	-7.98965E-1	-9.13134E0	-9.14192E0	4.64916E-3	9.36747E-2	2.73562E1	-3.26404E1	-3.2644E1	2.70316E1	1.20116E-7	2.52338E-3	2.52338E-3	6.31321E-3	3.00363E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.17466E-1	-7.98917E-1	-9.13112E0	-9.14164E0	4.673E-3	9.37223E-2	2.73147E1	-3.26597E1	-3.2632E1	2.70479E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.17442E-1	-7.98893E-1	-9.13153E0	-9.14178E0	4.673E-3	9.35078E-2	2.72827E1	-3.2695E1	-3.26119E1	2.69391E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.17513E-1	-7.98917E-1	-9.13131E0	-9.14192E0	5.05447E-3	9.35555E-2	2.72861E1	-3.264E1	-3.26654E1	2.68632E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.17394E-1	-7.99084E-1	-9.13122E0	-9.14197E0	4.8399E-3	9.34362E-2	2.73488E1	-3.26502E1	-3.26413E1	2.68761E1	1.198E-7	2.52348E-3	2.52348E-3	6.31189E-3	3.00539E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17537E-1	-7.98965E-1	-9.13141E0	-9.14207E0	4.86374E-3	9.34839E-2	2.72898E1	-3.26517E1	-3.26138E1	2.67397E1	1.19965E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17394E-1	-7.99203E-1	-9.13112E0	-9.14207E0	4.86374E-3	9.38177E-2	2.73375E1	-3.26843E1	-3.26002E1	2.6643E1	1.19872E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.03081E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.17227E-1	-7.9906E-1	-9.13115E0	-9.14202E0	4.8399E-3	9.36985E-2	2.73393E1	-3.26915E1	-3.26006E1	2.66034E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17275E-1	-7.98607E-1	-9.13093E0	-9.14168E0	4.95911E-3	9.38892E-2	2.72907E1	-3.26879E1	-3.2653E1	2.67016E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.1718E-1	-7.98917E-1	-9.13131E0	-9.1419E0	4.72069E-3	9.37939E-2	2.73257E1	-3.26779E1	-3.26278E1	2.68647E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17299E-1	-7.99012E-1	-9.13146E0	-9.14183E0	4.91142E-3	9.36747E-2	2.73063E1	-3.26767E1	-3.25859E1	2.66887E1	1.19705E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9874E-1