[Scan]
initial_time=2016-01-28T19:43:06
final_time=2016-01-28T19:43:28
ip_count=19
run=1026
dataset=6
scan=422
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.38701E-8
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=1.93415E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=6.67703E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.32072E-10
mult1=-9.9604E-9
mult2=-2.77421E-9
rf_tmon=-3.20579E-3
rf_agc=3.49195E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.71837E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20061E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05111E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.12506E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=1.21594E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41101E0
lens1_imon=2.67114E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64891E1
os_ef1alow_imon=2.95099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03576E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.02595E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.22038E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.45099E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63503E1
os_ef1bup_imon=3.09875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21545E0
cs_ionrep_imon=9.52055E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91902E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01839E1
cs_anode1_imon=2.03089E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.18813E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-2.84926E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.9822E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.938E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=9.38716E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34102E1
lens5b_imon=2.17413E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74826E1
cs_ef2b_imon=3.14992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46539E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70945E1
cs_ef2a_imon=3.17407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0942E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14843E-1
os_ef2bup_imon=-5.5243E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10583E1
os_restr2_imon=3.3604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01287E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72426E1
iondef1_imon=1.07967E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69764E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.10924E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.50949E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-1.13467E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55997E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.38656E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82582E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.87203E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.93437E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.34819E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52487E0
defgridb_imon=6.26888E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.4093E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07125E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61956E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=9.25578E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3659E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63478E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.57851E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21785E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.40982E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.1718E-1	-7.98678E-1	-9.13134E0	-9.14159E0	5.10216E-3	9.33886E-2	2.7367E1	-3.26708E1	-3.2613E1	2.68394E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9978E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17108E-1	-7.98774E-1	-9.13112E0	-9.14156E0	5.00679E-3	9.34362E-2	2.72138E1	-3.26609E1	-3.26146E1	2.67986E1	1.20055E-7	2.50882E-3	2.50882E-3	6.32356E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.1706E-1	-7.98535E-1	-9.13119E0	-9.14152E0	5.05447E-3	9.3317E-2	2.73625E1	-3.26857E1	-3.26405E1	2.68974E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02396E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.17299E-1	-7.98655E-1	-9.13131E0	-9.14159E0	4.8399E-3	9.3627E-2	2.73273E1	-3.26428E1	-3.2605E1	2.67577E1	1.19841E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17132E-1	-7.98559E-1	-9.13112E0	-9.14137E0	4.72069E-3	9.35078E-2	2.72873E1	-3.26701E1	-3.26542E1	2.6771E1	1.19653E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.1718E-1	-7.98655E-1	-9.13126E0	-9.14137E0	4.8399E-3	9.35793E-2	2.72626E1	-3.2685E1	-3.2626E1	2.6849E1	1.19872E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.17251E-1	-7.98798E-1	-9.13122E0	-9.14114E0	4.79221E-3	9.34124E-2	2.73134E1	-3.26372E1	-3.26425E1	2.69055E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17156E-1	-7.98798E-1	-9.13119E0	-9.14173E0	4.673E-3	9.35793E-2	2.73033E1	-3.26809E1	-3.26455E1	2.69247E1	1.20055E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17132E-1	-7.9906E-1	-9.13095E0	-9.14178E0	4.86374E-3	9.35555E-2	2.72953E1	-3.26413E1	-3.26523E1	2.69512E1	1.19851E-7	2.52384E-3	2.52384E-3	6.33436E-3	2.99175E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.17132E-1	-7.99012E-1	-9.13117E0	-9.1418E0	4.52995E-3	9.32217E-2	2.72636E1	-3.26627E1	-3.26506E1	2.66712E1	1.19965E-7	2.5188E-3	2.5188E-3	6.28006E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17347E-1	-7.9875E-1	-9.13122E0	-9.14183E0	4.55379E-3	9.34839E-2	2.73429E1	-3.26783E1	-3.2617E1	2.664E1	1.19978E-7	2.5147E-3	2.5147E-3	6.29067E-3	3.01742E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.17347E-1	-7.98678E-1	-9.13119E0	-9.14147E0	4.8399E-3	9.35793E-2	2.72962E1	-3.26632E1	-3.26154E1	2.67728E1	1.20487E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.17132E-1	-7.98368E-1	-9.13124E0	-9.14171E0	4.52995E-3	9.36031E-2	2.73189E1	-3.26344E1	-3.26224E1	2.6968E1	1.20004E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00197E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.17084E-1	-7.98559E-1	-9.13105E0	-9.14195E0	4.50611E-3	9.37462E-2	2.731E1	-3.26836E1	-3.26358E1	2.68208E1	1.20024E-7	2.51181E-3	2.51181E-3	6.31294E-3	3.01146E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.17323E-1	-7.98655E-1	-9.1311E0	-9.14214E0	4.50611E-3	9.35793E-2	2.73306E1	-3.26388E1	-3.26289E1	2.68377E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.1737E-1	-7.98559E-1	-9.13095E0	-9.14178E0	4.673E-3	9.34839E-2	2.73009E1	-3.26747E1	-3.26356E1	2.68136E1	1.20192E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01104E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17108E-1	-7.98559E-1	-9.13122E0	-9.14152E0	4.673E-3	9.34124E-2	2.72921E1	-3.26508E1	-3.26325E1	2.68545E1	1.20122E-7	2.51552E-3	2.51552E-3	6.36244E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1718E-1	-7.98726E-1	-9.13112E0	-9.14176E0	4.81606E-3	9.35078E-2	2.72648E1	-3.26356E1	-3.26146E1	2.68232E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9892E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.1718E-1	-7.98893E-1	-9.13136E0	-9.14195E0	4.74453E-3	9.35316E-2	2.73641E1	-3.26467E1	-3.26142E1	2.69484E1	1.20278E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17132E-1	-7.99084E-1	-9.13124E0	-9.1418E0	4.76837E-3	9.33647E-2	2.72426E1	-3.26478E1	-3.26325E1	2.69764E1	1.19749E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00966E-1