[Scan]
initial_time=2016-01-28T19:43:36
final_time=2016-01-28T19:43:57
ip_count=19
run=1026
dataset=6
scan=423
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08818E-4
ql1_vset=
ql1_vmon=-8.16512E-1
ql1_imon=1.38162E-8
ql2_vset=
ql2_vmon=-7.98941E-1
ql2_imon=2.00452E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=6.38509E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.35541E-10
mult1=-9.36486E-9
mult2=-2.7382E-9
rf_tmon=-4.76035E-3
rf_agc=3.26489E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.66596E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6671E0
bslens_imon=2.57971E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19778E1
lens5a_imon=2.00297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04983E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5406E1
cs_ef1b_imon=3.13646E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05248E1
cs_ea1_imon=1.26129E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39008E0
lens1_imon=2.64201E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64206E1
os_ef1alow_imon=2.99556E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04424E1
cs_ea2_imon=1.40223E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84984E1
cs_ef1a_imon=3.01541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.22387E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.27145E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15118E1
os_ea1_imon=2.42034E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08275E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24301E0
cs_ionrep_imon=9.45148E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93288E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01886E1
cs_anode1_imon=2.03494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.1903E-8
tplens_vset=1.4E-1
tplens_vmon=1.61872E0
tplens_imon=-2.50751E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.5054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26768E1
iondef2_imon=1.56769E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98408E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.94196E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29882E0
ionrepsh_imon=9.34636E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3373E1
lens5b_imon=2.17467E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74423E1
cs_ef2b_imon=3.11933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46299E0
os_ea2_imon=-7.33527E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00416E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71245E1
cs_ef2a_imon=3.17499E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06559E0
os_ef2alow_imon=-2.63839E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51149E-1
os_ef2bup_imon=-5.26179E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10916E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.30629E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01958E1
cs_anode2_imon=2.09372E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72843E1
iondef1_imon=1.09582E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67091E1
iondef4_imon=1.08406E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.12093E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.53439E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13728E0
cs_ionaccel_imon=-1.10094E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47117E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55938E1
einzel_imon=7.67616E-6
window_vset=0.0E0
window_vmon=1.93869E-1
window_imon=-1.30723E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.39337E-4
mask2_vset=0.0E0
mask2_vmon=-1.87025E1
mask2_imon=-5.56016E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.33349E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.13434E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.06485E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3905E0
defgridb_imon=6.00976E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.36705E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07556E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62465E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30613E1
cs_fil1_imon=9.25307E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36982E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64447E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.10776E-2
os_fil2_imon=-2.76255E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81088E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15345E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32169E-1
cs_fil2_imon=-2.30845E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7006E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21883E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45212E-1
res40_imon=-2.64617E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.17156E-1	-7.98917E-1	-9.13122E0	-9.14166E0	4.26769E-3	9.36985E-2	2.73125E1	-3.26499E1	-3.26471E1	2.6913E1	1.19963E-7	2.51557E-3	2.51557E-3	6.30149E-3	3.00479E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1706E-1	-7.98917E-1	-9.1316E0	-9.14207E0	4.41074E-3	9.3627E-2	2.72971E1	-3.26364E1	-3.26738E1	2.6837E1	1.20177E-7	2.51369E-3	2.51369E-3	6.28667E-3	3.00494E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.1687E-1	-7.98941E-1	-9.13126E0	-9.14228E0	4.48227E-3	9.35316E-2	2.73265E1	-3.26474E1	-3.25872E1	2.67149E1	1.20031E-7	2.52027E-3	2.52027E-3	6.34661E-3	2.99083E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.1687E-1	-7.98941E-1	-9.13131E0	-9.14221E0	4.64916E-3	9.35316E-2	2.72458E1	-3.26566E1	-3.26216E1	2.66217E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16894E-1	-7.98821E-1	-9.13115E0	-9.14214E0	4.43459E-3	9.35555E-2	2.73141E1	-3.26543E1	-3.25996E1	2.66238E1	1.20045E-7	2.52066E-3	2.52066E-3	6.31879E-3	3.00522E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.16798E-1	-7.98726E-1	-9.13126E0	-9.14221E0	4.31538E-3	9.39369E-2	2.73186E1	-3.26689E1	-3.26283E1	2.67256E1	1.20226E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16751E-1	-7.98535E-1	-9.13115E0	-9.14192E0	4.50611E-3	9.36031E-2	2.72727E1	-3.26644E1	-3.26502E1	2.66448E1	1.19757E-7	2.51709E-3	2.51709E-3	6.30036E-3	3.02115E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16441E-1	-7.98869E-1	-9.131E0	-9.14195E0	4.41074E-3	9.33886E-2	2.72925E1	-3.26603E1	-3.26356E1	2.661E1	1.20166E-7	2.5143E-3	2.5143E-3	6.31283E-3	3.00378E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.16417E-1	-7.98774E-1	-9.13131E0	-9.14176E0	4.74453E-3	9.35078E-2	2.73063E1	-3.26514E1	-3.26561E1	2.68285E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16631E-1	-7.98774E-1	-9.13117E0	-9.14221E0	4.45843E-3	9.35078E-2	2.7269E1	-3.26444E1	-3.26083E1	2.68364E1	1.19679E-7	2.51716E-3	2.51716E-3	6.33486E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16488E-1	-7.98774E-1	-9.13134E0	-9.14214E0	4.55379E-3	9.377E-2	2.73183E1	-3.26831E1	-3.26116E1	2.67493E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16631E-1	-7.9875E-1	-9.13136E0	-9.1418E0	4.64916E-3	9.35555E-2	2.7346E1	-3.26585E1	-3.26278E1	2.67902E1	1.20122E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16536E-1	-7.98917E-1	-9.13098E0	-9.14171E0	4.52995E-3	9.34362E-2	2.72799E1	-3.265E1	-3.26266E1	2.69277E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09387E0	-8.16584E-1	-7.98726E-1	-9.13084E0	-9.14171E0	4.57764E-3	9.37223E-2	2.72809E1	-3.26567E1	-3.26425E1	2.6974E1	1.2033E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16703E-1	-7.98821E-1	-9.13098E0	-9.14202E0	4.52995E-3	9.35793E-2	2.72889E1	-3.26777E1	-3.2638E1	2.68034E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16894E-1	-7.98464E-1	-9.13091E0	-9.14185E0	4.57764E-3	9.33409E-2	2.72588E1	-3.26981E1	-3.25876E1	2.67367E1	1.20017E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9952E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.16798E-1	-7.98488E-1	-9.13084E0	-9.14164E0	4.69685E-3	9.35555E-2	2.73327E1	-3.26248E1	-3.26068E1	2.67938E1	1.20004E-7	2.53031E-3	2.53031E-3	6.29665E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.16989E-1	-7.98488E-1	-9.13074E0	-9.14171E0	4.45843E-3	9.34362E-2	2.73411E1	-3.26561E1	-3.26054E1	2.67792E1	1.20084E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.99879E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16584E-1	-7.98655E-1	-9.13086E0	-9.14195E0	4.72069E-3	9.36508E-2	2.72939E1	-3.2652E1	-3.26178E1	2.69836E1	1.20004E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16512E-1	-7.98941E-1	-9.13105E0	-9.14176E0	4.62532E-3	9.35555E-2	2.72843E1	-3.26768E1	-3.2596E1	2.67091E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01223E-1