[Scan]
initial_time=2016-01-28T19:44:34
final_time=2016-01-28T19:44:56
ip_count=19
run=1026
dataset=6
scan=425
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16917E-1
ql1_imon=1.38331E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.96679E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.70798E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.19019E-10
mult1=-9.52366E-9
mult2=-2.80045E-9
rf_tmon=-5.21539E-3
rf_agc=3.2913E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.72638E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62669E0
bslens_imon=2.35921E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20078E1
lens5a_imon=1.97235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12417E2
lens4a_imon=2.05206E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.10242E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.0204E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04717E1
cs_ea1_imon=1.23687E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45161E0
lens1_imon=2.81579E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64585E1
os_ef1alow_imon=2.96271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03277E1
cs_ea2_imon=1.39118E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.00372E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.21933E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11152E1
os_restr1_imon=4.292E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16108E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63606E1
os_ef1bup_imon=3.076E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20019E0
cs_ionrep_imon=9.51235E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93431E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01931E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.19036E-8
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26146E1
iondef3_imon=1.49524E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26837E1
iondef2_imon=1.57842E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.95495E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27805E0
ionrepsh_imon=9.50174E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.16844E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.13995E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49868E0
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.1886E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08989E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51473E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=3.39434E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.29397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.09981E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72823E1
iondef1_imon=1.08326E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68514E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.12664E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.52639E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-9.86392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47139E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56139E1
einzel_imon=7.5106E-6
window_vset=0.0E0
window_vmon=1.96834E-1
window_imon=-1.16363E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.11064E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.77096E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.36936E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.25775E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31992E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.34462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07318E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62438E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30563E1
cs_fil1_imon=9.23451E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33375E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63776E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.74448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20876E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.32166E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26943E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2185E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.93379E-1
res40_imon=-2.47728E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16941E-1	-7.98702E-1	-9.13086E0	-9.14202E0	4.43459E-3	9.3627E-2	2.72691E1	-3.26496E1	-3.25847E1	2.67662E1	1.20042E-7	2.52025E-3	2.52025E-3	6.29684E-3	3.01356E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.17156E-1	-7.98702E-1	-9.131E0	-9.14204E0	4.62532E-3	9.36747E-2	2.73195E1	-3.26579E1	-3.2626E1	2.67517E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.1706E-1	-7.98655E-1	-9.1311E0	-9.14183E0	4.60148E-3	9.3627E-2	2.72628E1	-3.26631E1	-3.26191E1	2.68302E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.03185E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.17275E-1	-7.98774E-1	-9.13122E0	-9.14164E0	4.45843E-3	9.36508E-2	2.72817E1	-3.26567E1	-3.26086E1	2.681E1	1.20042E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.17204E-1	-7.98965E-1	-9.13126E0	-9.14168E0	4.62532E-3	9.35078E-2	2.72745E1	-3.26374E1	-3.26146E1	2.67433E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09394E0	-8.16917E-1	-7.98678E-1	-9.13119E0	-9.14185E0	4.55379E-3	9.33647E-2	2.73246E1	-3.26608E1	-3.26449E1	2.6847E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1706E-1	-7.98821E-1	-9.13107E0	-9.14178E0	4.76837E-3	9.35316E-2	2.72979E1	-3.26543E1	-3.26176E1	2.67988E1	1.20004E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17108E-1	-7.98893E-1	-9.13112E0	-9.14178E0	4.64916E-3	9.36508E-2	2.73528E1	-3.26572E1	-3.25948E1	2.68689E1	1.20297E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.0041E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.16989E-1	-7.98893E-1	-9.13122E0	-9.14166E0	4.55379E-3	9.36985E-2	2.72288E1	-3.26681E1	-3.26368E1	2.66923E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.17275E-1	-7.98893E-1	-9.13119E0	-9.14168E0	4.86374E-3	9.36985E-2	2.73526E1	-3.26777E1	-3.26386E1	2.70022E1	1.19925E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.01742E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.1718E-1	-7.98965E-1	-9.13131E0	-9.14166E0	4.88758E-3	9.35555E-2	2.72811E1	-3.26981E1	-3.26488E1	2.69524E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.1706E-1	-7.98702E-1	-9.1311E0	-9.14161E0	5.22137E-3	9.35078E-2	2.73574E1	-3.26693E1	-3.25978E1	2.68184E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.17084E-1	-7.98607E-1	-9.13126E0	-9.1418E0	4.79221E-3	9.35793E-2	2.72486E1	-3.27167E1	-3.25809E1	2.68647E1	1.19749E-7	2.51096E-3	2.51096E-3	6.32356E-3	2.99175E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.17013E-1	-7.9875E-1	-9.13146E0	-9.1418E0	5.14984E-3	9.32693E-2	2.73405E1	-3.2647E1	-3.26104E1	2.66592E1	1.2005E-7	2.52119E-3	2.52119E-3	6.3157E-3	2.98648E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.16703E-1	-7.98774E-1	-9.13131E0	-9.14187E0	5.00679E-3	9.3627E-2	2.73169E1	-3.26773E1	-3.26119E1	2.66508E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16727E-1	-7.98702E-1	-9.13124E0	-9.1418E0	5.24521E-3	9.35793E-2	2.7272E1	-3.26548E1	-3.26627E1	2.66412E1	1.198E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.16894E-1	-7.98583E-1	-9.13112E0	-9.14183E0	4.95911E-3	9.3627E-2	2.72013E1	-3.26697E1	-3.26354E1	2.69338E1	1.19978E-7	2.51581E-3	2.51581E-3	6.30182E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16822E-1	-7.98702E-1	-9.13165E0	-9.14207E0	4.98295E-3	9.38892E-2	2.73303E1	-3.26783E1	-3.26657E1	2.70499E1	1.19953E-7	2.52492E-3	2.52492E-3	6.29128E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.1687E-1	-7.98535E-1	-9.13131E0	-9.14187E0	4.64916E-3	9.35078E-2	2.72845E1	-3.26826E1	-3.25877E1	2.67694E1	1.19653E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16917E-1	-7.98583E-1	-9.13112E0	-9.14176E0	4.93526E-3	9.35793E-2	2.72823E1	-3.26837E1	-3.26146E1	2.68514E1	1.19697E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00966E-1