[Scan]
initial_time=2016-01-28T19:45:33
final_time=2016-01-28T19:45:54
ip_count=19
run=1026
dataset=6
scan=427
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.16822E-1
ql1_imon=1.38437E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.9882E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=5.68163E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.5347E-10
mult1=-9.07378E-9
mult2=-2.84476E-9
rf_tmon=-4.63335E-3
rf_agc=3.31734E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.67798E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64631E0
bslens_imon=2.6423E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.99821E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.04988E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.10127E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05078E1
cs_ea1_imon=1.23432E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.71079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65227E1
os_ef1alow_imon=2.98234E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03408E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.21756E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.29058E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14603E1
os_ea1_imon=2.42396E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08866E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2515E0
cs_ionrep_imon=9.708E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93312E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02043E1
cs_anode1_imon=2.05576E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.19098E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-4.61569E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26579E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26673E1
iondef2_imon=1.56706E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98504E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.95155E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=9.16366E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33898E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06071E2
lens4b_imon=2.00334E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18777E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.6195E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.3777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02308E1
cs_anode2_imon=2.07919E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68581E1
iondef4_imon=1.07224E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.1276E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.52327E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-9.22035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=2.06531E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86632E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.63516E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38051E0
defgridb_imon=6.26527E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33232E1
os_fil1_imon=9.39513E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62242E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30517E1
cs_fil1_imon=9.25079E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3665E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64181E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27302E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35245E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63206E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16798E-1	-7.98488E-1	-9.13141E0	-9.14168E0	4.88758E-3	9.3627E-2	2.72839E1	-3.2675E1	-3.26148E1	2.68893E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16846E-1	-7.98273E-1	-9.1316E0	-9.14214E0	4.86374E-3	9.38177E-2	2.73273E1	-3.26591E1	-3.26224E1	2.66993E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16512E-1	-7.98321E-1	-9.13134E0	-9.14216E0	4.8399E-3	9.34124E-2	2.72761E1	-3.2622E1	-3.26915E1	2.67217E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00453E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16488E-1	-7.98559E-1	-9.13134E0	-9.1419E0	4.86374E-3	9.35793E-2	2.73508E1	-3.2647E1	-3.26591E1	2.6825E1	1.19953E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16631E-1	-7.98559E-1	-9.1316E0	-9.14202E0	5.05447E-3	9.34362E-2	2.73039E1	-3.26695E1	-3.26324E1	2.68532E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16917E-1	-7.98726E-1	-9.1315E0	-9.14216E0	4.48227E-3	9.34124E-2	2.72971E1	-3.26621E1	-3.25874E1	2.69337E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16965E-1	-7.98655E-1	-9.13153E0	-9.14183E0	4.72069E-3	9.35555E-2	2.73003E1	-3.26326E1	-3.26549E1	2.69079E1	1.19872E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.00144E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16917E-1	-7.98655E-1	-9.13129E0	-9.14171E0	5.03063E-3	9.377E-2	2.73004E1	-3.26732E1	-3.26183E1	2.67404E1	1.20226E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.1687E-1	-7.9875E-1	-9.13146E0	-9.14178E0	4.98295E-3	9.38416E-2	2.7242E1	-3.26572E1	-3.26303E1	2.68668E1	1.19941E-7	2.51709E-3	2.51709E-3	6.30212E-3	2.98092E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1687E-1	-7.98321E-1	-9.13141E0	-9.14173E0	4.88758E-3	9.34839E-2	2.73411E1	-3.26378E1	-3.26484E1	2.6646E1	1.19925E-7	2.5225E-3	2.5225E-3	6.31299E-3	3.00144E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16822E-1	-7.98392E-1	-9.13117E0	-9.14164E0	4.72069E-3	9.3627E-2	2.73057E1	-3.26542E1	-3.2615E1	2.69001E1	1.20226E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16917E-1	-7.98535E-1	-9.13115E0	-9.14192E0	4.76837E-3	9.34839E-2	2.7334E1	-3.26703E1	-3.26703E1	2.67145E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.1706E-1	-7.98631E-1	-9.13124E0	-9.14202E0	5.4121E-3	9.34839E-2	2.73069E1	-3.26669E1	-3.2635E1	2.67283E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01871E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09433E0	-8.16917E-1	-7.98965E-1	-9.13134E0	-9.14183E0	5.14984E-3	9.34839E-2	2.73476E1	-3.26649E1	-3.26178E1	2.68611E1	1.20106E-7	2.51739E-3	2.51739E-3	6.35059E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17084E-1	-7.98845E-1	-9.13136E0	-9.14185E0	5.26905E-3	9.35316E-2	2.7262E1	-3.26319E1	-3.26366E1	2.68953E1	1.19749E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16941E-1	-7.98655E-1	-9.13117E0	-9.14159E0	5.03063E-3	9.36031E-2	2.73328E1	-3.26744E1	-3.26036E1	2.66408E1	1.19965E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.03449E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.1706E-1	-7.99012E-1	-9.13115E0	-9.14173E0	5.05447E-3	9.32932E-2	2.72913E1	-3.26801E1	-3.26639E1	2.68599E1	1.1979E-7	2.51287E-3	2.51287E-3	6.29684E-3	3.02368E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.17227E-1	-7.9875E-1	-9.13124E0	-9.14166E0	5.14984E-3	9.33647E-2	2.71836E1	-3.26012E1	-3.27121E1	2.67225E1	1.19959E-7	2.51647E-3	2.51647E-3	6.31555E-3	3.01284E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.17227E-1	-7.98607E-1	-9.13112E0	-9.14187E0	4.55379E-3	9.35078E-2	2.72892E1	-3.26514E1	-3.26254E1	2.69127E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16822E-1	-7.98678E-1	-9.1311E0	-9.1418E0	4.95911E-3	9.37462E-2	2.7285E1	-3.26673E1	-3.26579E1	2.68581E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99686E-1