[Scan]
initial_time=2016-01-28T19:46:02
final_time=2016-01-28T19:46:24
ip_count=19
run=1026
dataset=6
scan=428
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.17037E-1
ql1_imon=1.38113E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=1.99395E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=5.7112E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.0246E-10
mult1=-9.21564E-9
mult2=-2.62135E-9
rf_tmon=-5.37663E-3
rf_agc=3.25894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.64759E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61927E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19971E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12432E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53917E1
cs_ef1b_imon=3.11316E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=1.22747E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44826E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.99279E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03384E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84694E1
cs_ef1a_imon=2.9863E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.2233E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10961E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.44523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=9.63591E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01875E1
cs_anode1_imon=2.04747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.19764E-8
tplens_vset=1.4E-1
tplens_vmon=1.59817E0
tplens_imon=-1.98407E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.96068E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24128E0
ionrepsh_imon=9.29344E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3406E1
lens5b_imon=2.18819E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46479E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.66275E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.3849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01977E1
cs_anode2_imon=2.10261E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68292E1
iondef4_imon=1.06647E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.16032E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.54674E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10611E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.72894E-1
window_imon=-1.07701E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39434E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.53422E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50171E3
multb_neg_imon=7.10523E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.576E0
defgridb_imon=6.22562E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.41741E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07203E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62306E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30509E1
cs_fil1_imon=9.25037E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31364E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63669E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28007E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79094E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20212E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.03451E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16679E-1	-7.98535E-1	-9.13146E0	-9.14183E0	4.88758E-3	9.31025E-2	2.73132E1	-3.26642E1	-3.26417E1	2.67926E1	1.19872E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.98819E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.16917E-1	-7.98464E-1	-9.1316E0	-9.1419E0	4.86374E-3	9.35316E-2	2.73069E1	-3.26487E1	-3.26199E1	2.68899E1	1.1974E-7	2.52236E-3	2.52236E-3	6.31798E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16798E-1	-7.9844E-1	-9.13124E0	-9.14235E0	4.93526E-3	9.35793E-2	2.73017E1	-3.26282E1	-3.26322E1	2.69039E1	1.19819E-7	2.52027E-3	2.52027E-3	6.30182E-3	2.98554E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16989E-1	-7.98655E-1	-9.13167E0	-9.14207E0	4.74453E-3	9.34124E-2	2.72873E1	-3.26389E1	-3.26652E1	2.6797E1	1.20051E-7	2.51823E-3	2.51823E-3	6.31242E-3	2.99816E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16822E-1	-7.98655E-1	-9.1316E0	-9.14166E0	4.79221E-3	9.33886E-2	2.73116E1	-3.26785E1	-3.26685E1	2.6622E1	1.201E-7	2.51611E-3	2.51611E-3	6.34164E-3	2.99981E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.16798E-1	-7.9875E-1	-9.13177E0	-9.14164E0	4.95911E-3	9.35555E-2	2.72727E1	-3.26603E1	-3.26444E1	2.68004E1	1.19902E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.03027E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09426E0	-8.16751E-1	-7.99012E-1	-9.13124E0	-9.14171E0	5.03063E-3	9.32932E-2	2.73375E1	-3.26609E1	-3.26392E1	2.6965E1	1.20084E-7	2.51359E-3	2.51359E-3	6.32978E-3	3.02813E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16989E-1	-7.98845E-1	-9.13124E0	-9.14142E0	5.00679E-3	9.34839E-2	2.72654E1	-3.26549E1	-3.26032E1	2.69283E1	1.19749E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17275E-1	-7.99084E-1	-9.13129E0	-9.14147E0	4.88758E-3	9.3627E-2	2.72909E1	-3.26307E1	-3.26166E1	2.6798E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17037E-1	-7.98631E-1	-9.1311E0	-9.14161E0	4.673E-3	9.38892E-2	2.73189E1	-3.2653E1	-3.2638E1	2.67704E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16989E-1	-7.98965E-1	-9.13107E0	-9.14171E0	4.88758E-3	9.36508E-2	2.72721E1	-3.2676E1	-3.26101E1	2.68422E1	1.20122E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.1687E-1	-7.98821E-1	-9.13112E0	-9.14178E0	4.98295E-3	9.33886E-2	2.73488E1	-3.26903E1	-3.26166E1	2.68615E1	1.19878E-7	2.51736E-3	2.51736E-3	6.31696E-3	3.02066E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16631E-1	-7.98368E-1	-9.13117E0	-9.14154E0	4.88758E-3	9.33886E-2	2.73057E1	-3.26726E1	-3.26413E1	2.68581E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.1687E-1	-7.98273E-1	-9.13107E0	-9.14192E0	5.00679E-3	9.33886E-2	2.73022E1	-3.26857E1	-3.26422E1	2.66692E1	1.198E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.04322E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16584E-1	-7.9875E-1	-9.13093E0	-9.14171E0	5.126E-3	9.37939E-2	2.7285E1	-3.26543E1	-3.26054E1	2.66362E1	1.20023E-7	2.51405E-3	2.51405E-3	6.31541E-3	2.98628E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16631E-1	-7.98821E-1	-9.13098E0	-9.14171E0	4.95911E-3	9.34124E-2	2.73189E1	-3.26795E1	-3.26218E1	2.6837E1					
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16655E-1	-7.98702E-1	-9.13093E0	-9.14211E0	4.88758E-3	9.377E-2	2.72979E1	-3.26639E1	-3.26236E1	2.68064E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16751E-1	-7.98917E-1	-9.13134E0	-9.1419E0	4.72069E-3	9.34601E-2	2.73841E1	-3.27629E1	-3.2606E1	2.66172E1	1.20122E-7	2.50789E-3	2.50789E-3	6.30192E-3	2.9874E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.1706E-1	-7.98583E-1	-9.1311E0	-9.14197E0	4.86374E-3	9.36747E-2	2.73045E1	-3.2659E1	-3.26301E1	2.68383E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.17037E-1	-7.9844E-1	-9.13105E0	-9.14199E0	4.76837E-3	9.37223E-2	2.73045E1	-3.26579E1	-3.26236E1	2.68292E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1