[Scan]
initial_time=2016-01-28T19:46:59
final_time=2016-01-28T19:47:20
ip_count=19
run=1026
dataset=6
scan=430
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.1706E-1
ql1_imon=1.38665E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=2.05977E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.90856E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.23906E-10
mult1=-9.65304E-9
mult2=-2.74089E-9
rf_tmon=-5.80136E-3
rf_agc=3.25245E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.68552E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.67422E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.97766E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05019E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53505E1
cs_ef1b_imon=3.09269E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04451E1
cs_ea1_imon=1.22589E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45102E0
lens1_imon=2.58219E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64018E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.38764E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84446E1
cs_ef1a_imon=2.9992E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.23154E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=2.44345E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63682E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24561E0
cs_ionrep_imon=9.60438E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93445E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.04629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.2149E-8
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26602E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26372E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98431E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=4.06498E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24856E0
ionrepsh_imon=9.12302E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.11249E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48924E0
os_ea2_imon=-8.68732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71206E1
cs_ef2a_imon=3.17192E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04761E0
os_ef2alow_imon=-2.71012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07657E-1
os_ef2bup_imon=-5.43472E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10834E1
os_restr2_imon=3.38113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02186E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73145E1
iondef1_imon=1.07087E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.07565E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.13114E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.55121E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-1.03157E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.4733E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.57316E-6
window_vset=0.0E0
window_vmon=1.85829E-1
window_imon=-1.02809E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39039E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.42342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.38163E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.29857E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.05954E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=5.91277E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33257E1
os_fil1_imon=9.41598E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07468E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62754E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30624E1
cs_fil1_imon=9.24997E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34533E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63964E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.05331E-2
os_fil2_imon=-2.71552E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.81389E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10372E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21703E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59785E-1
res40_imon=-2.53635E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.17251E-1	-7.98416E-1	-9.13129E0	-9.14187E0	4.8399E-3	9.37939E-2	2.73576E1	-3.26655E1	-3.26337E1	2.6795E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
2.0E0	6.3E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17037E-1	-7.9875E-1	-9.13107E0	-9.14159E0	4.95911E-3	9.3627E-2	2.7285E1	-3.26838E1	-3.26313E1	2.68454E1	1.19933E-7	2.52243E-3	2.52243E-3	6.3074E-3	3.01414E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09356E0	-8.17251E-1	-7.98607E-1	-9.13105E0	-9.14166E0	4.98295E-3	9.33886E-2	2.7268E1	-3.26544E1	-3.25999E1	2.68041E1					
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09325E0	-8.17513E-1	-7.98774E-1	-9.13112E0	-9.14161E0	5.17368E-3	9.32932E-2	2.72957E1	-3.26579E1	-3.26136E1	2.68522E1	1.20042E-7	2.52236E-3	2.52236E-3	6.32858E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09302E0	-8.16941E-1	-7.98655E-1	-9.13136E0	-9.14161E0	5.07832E-3	9.32455E-2	2.72534E1	-3.2653E1	-3.26609E1	2.68683E1	1.19841E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.98842E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16965E-1	-7.98607E-1	-9.13136E0	-9.14161E0	4.673E-3	9.35078E-2	2.73405E1	-3.26697E1	-3.26602E1	2.69361E1	1.20084E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09356E0	-8.1687E-1	-7.98512E-1	-9.13115E0	-9.14161E0	4.8399E-3	9.35078E-2	2.72626E1	-3.26266E1	-3.25859E1	2.68499E1	1.20363E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.16631E-1	-7.98297E-1	-9.13122E0	-9.14164E0	5.00679E-3	9.36747E-2	2.73122E1	-3.26644E1	-3.26301E1	2.69421E1	1.20055E-7	2.52815E-3	2.52815E-3	6.33977E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16798E-1	-7.98559E-1	-9.13107E0	-9.14154E0	4.93526E-3	9.37223E-2	2.734E1	-3.26793E1	-3.26278E1	2.70136E1	1.19749E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.16607E-1	-7.98821E-1	-9.13115E0	-9.14137E0	4.95911E-3	9.35078E-2	2.72727E1	-3.26543E1	-3.26697E1	2.70154E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16727E-1	-7.98488E-1	-9.13115E0	-9.1414E0	5.19753E-3	9.36031E-2	2.73104E1	-3.2682E1	-3.26508E1	2.68487E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16441E-1	-7.98464E-1	-9.13124E0	-9.1414E0	5.07832E-3	9.34362E-2	2.73511E1	-3.26832E1	-3.26602E1	2.66908E1	1.19991E-7	2.51919E-3	2.51919E-3	6.3445E-3	3.01104E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16536E-1	-7.98535E-1	-9.13126E0	-9.14142E0	4.93526E-3	9.33886E-2	2.72787E1	-3.265E1	-3.26218E1	2.70105E1	1.20055E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.01738E-1
1.7E1	5.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16536E-1	-7.98535E-1	-9.13119E0	-9.14159E0	5.14984E-3	9.35793E-2	2.73092E1	-3.26779E1	-3.26242E1	2.68623E1	1.19861E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.1656E-1	-7.98583E-1	-9.13081E0	-9.14164E0	4.93526E-3	9.32932E-2	2.72645E1	-3.26932E1	-3.26023E1	2.67335E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16536E-1	-7.98702E-1	-9.13093E0	-9.14154E0	5.05447E-3	9.34839E-2	2.73177E1	-3.26807E1	-3.26254E1	2.6652E1	1.1979E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16798E-1	-7.9875E-1	-9.13105E0	-9.1419E0	4.74453E-3	9.38892E-2	2.72526E1	-3.26697E1	-3.26225E1	2.67317E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.17037E-1	-7.98273E-1	-9.13129E0	-9.14154E0	4.8399E-3	9.35555E-2	2.72302E1	-3.25936E1	-3.25865E1	2.68502E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17037E-1	-7.9844E-1	-9.13126E0	-9.14161E0	4.93526E-3	9.37462E-2	2.7347E1	-3.26856E1	-3.26419E1	2.68823E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1706E-1	-7.98392E-1	-9.13115E0	-9.14195E0	4.76837E-3	9.33886E-2	2.73145E1	-3.26372E1	-3.26602E1	2.67734E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01995E-1