[Scan]
initial_time=2016-01-28T19:47:54
final_time=2016-01-28T19:48:15
ip_count=19
run=1026
dataset=6
scan=432
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.38206E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.01135E-9
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=4.55785E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.56593E-10
mult1=-9.52366E-9
mult2=-2.69865E-9
rf_tmon=-4.58452E-3
rf_agc=3.31413E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.71912E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.96577E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.09581E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=1.2729E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39479E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64168E1
os_ef1alow_imon=2.9707E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84359E1
cs_ef1a_imon=2.99121E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.20398E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29999E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15522E1
os_ea1_imon=2.43369E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63514E1
os_ef1bup_imon=3.08504E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.53497E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.04455E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.18117E-8
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-2.38062E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26518E1
iondef3_imon=1.47658E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.57247E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.98726E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22086E0
ionrepsh_imon=9.10958E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33796E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74721E1
cs_ef2b_imon=3.12466E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47861E0
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71136E1
cs_ef2a_imon=3.18339E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07773E0
os_ef2alow_imon=-2.62324E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.67691E-1
os_ef2bup_imon=-5.39649E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.36966E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29784E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.10293E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73027E1
iondef1_imon=1.07787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.07982E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.09964E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.42083E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13477E0
cs_ionaccel_imon=-1.08022E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47341E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.54883E-6
window_vset=0.0E0
window_vmon=1.61503E-1
window_imon=-1.1393E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86385E1
mask2_imon=-7.36173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.39002E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.80962E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.29269E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23013E0
defgridb_imon=6.24364E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.40277E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07318E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61962E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30591E1
cs_fil1_imon=9.24482E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34765E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.79082E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.43543E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33023E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.63988E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21588E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.28711E-1
res40_imon=-2.41125E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16655E-1	-7.98368E-1	-9.13126E0	-9.14159E0	4.74453E-3	9.33409E-2	2.72797E1	-3.26667E1	-3.2577E1	2.68581E1	1.20158E-7	2.52061E-3	2.52061E-3	6.35059E-3	3.00197E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16679E-1	-7.98798E-1	-9.13141E0	-9.14171E0	5.17368E-3	9.34839E-2	2.73007E1	-3.26738E1	-3.26378E1	2.68766E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16631E-1	-7.98583E-1	-9.13112E0	-9.1419E0	5.00679E-3	9.33409E-2	2.73138E1	-3.26753E1	-3.26104E1	2.6891E1	1.19858E-7	2.51937E-3	2.51937E-3	6.3114E-3	2.99323E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.16631E-1	-7.98583E-1	-9.13122E0	-9.14183E0	4.86374E-3	9.35555E-2	2.73129E1	-3.26573E1	-3.2641E1	2.6792E1	1.20209E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0948E0	-8.1656E-1	-7.98965E-1	-9.13129E0	-9.14202E0	4.8399E-3	9.34601E-2	2.73086E1	-3.2655E1	-3.26335E1	2.69177E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03804E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.16727E-1	-7.98583E-1	-9.13124E0	-9.14187E0	4.79221E-3	9.33647E-2	2.72877E1	-3.2647E1	-3.25834E1	2.67884E1	1.19902E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16512E-1	-7.98607E-1	-9.13119E0	-9.14161E0	4.98295E-3	9.34124E-2	2.7233E1	-3.26681E1	-3.26176E1	2.68887E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32896E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16488E-1	-7.98821E-1	-9.13067E0	-9.14168E0	4.86374E-3	9.35316E-2	2.7321E1	-3.26744E1	-3.26107E1	2.67631E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09665E0	-8.16464E-1	-7.98512E-1	-9.13074E0	-9.1419E0	4.45843E-3	9.35316E-2	2.72935E1	-3.26548E1	-3.25899E1	2.6783E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-8.16584E-1	-7.98726E-1	-9.13117E0	-9.14178E0	4.673E-3	9.3627E-2	2.73092E1	-3.26408E1	-3.26496E1	2.68064E1	1.20069E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09696E0	-8.16584E-1	-7.98607E-1	-9.13141E0	-9.14183E0	4.62532E-3	9.38177E-2	2.72438E1	-3.26398E1	-3.26615E1	2.68719E1	1.20004E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.02253E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09781E0	-8.16584E-1	-7.98798E-1	-9.13134E0	-9.14199E0	4.69685E-3	9.34601E-2	2.73104E1	-3.26573E1	-3.26384E1	2.67086E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16607E-1	-7.98726E-1	-9.13138E0	-9.14211E0	5.00679E-3	9.32693E-2	2.72913E1	-3.26416E1	-3.26398E1	2.68094E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16441E-1	-7.98655E-1	-9.13119E0	-9.1419E0	4.95911E-3	9.35793E-2	2.73135E1	-3.26488E1	-3.2632E1	2.68983E1	1.19925E-7	2.52921E-3	2.52921E-3	6.32418E-3	2.99613E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16631E-1	-7.98726E-1	-9.13107E0	-9.14185E0	4.88758E-3	9.34601E-2	2.72384E1	-3.26567E1	-3.2647E1	2.67055E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01223E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0968E0	-8.16512E-1	-7.98655E-1	-9.13119E0	-9.14168E0	4.95911E-3	9.34601E-2	2.73617E1	-3.26756E1	-3.26655E1	2.69019E1	1.20174E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02922E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16536E-1	-7.98798E-1	-9.13117E0	-9.1418E0	4.45843E-3	9.3627E-2	2.72841E1	-3.26729E1	-3.2605E1	2.67532E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16512E-1	-7.98965E-1	-9.13105E0	-9.14185E0	4.50611E-3	9.3627E-2	2.74066E1	-3.2744E1	-3.25664E1	2.6828E1	1.19913E-7	2.52099E-3	2.52099E-3	6.29645E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16274E-1	-7.98702E-1	-9.13134E0	-9.14187E0	4.88758E-3	9.3627E-2	2.72638E1	-3.26413E1	-3.26278E1	2.68134E1	1.20106E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16536E-1	-7.98655E-1	-9.13084E0	-9.14173E0	4.62532E-3	9.32932E-2	2.73027E1	-3.26723E1	-3.26518E1	2.68094E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.0148E-1