[Scan]
initial_time=2016-01-28T19:48:22
final_time=2016-01-28T19:48:42
ip_count=19
run=1026
dataset=6
scan=433
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.16607E-1
ql1_imon=1.37603E-8
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=1.99947E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=5.09524E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.16456E-10
mult1=-9.69609E-9
mult2=-2.6121E-9
rf_tmon=-5.73369E-3
rf_agc=3.2557E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.70444E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67919E0
bslens_imon=2.40168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53823E1
cs_ef1b_imon=3.10033E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02025E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04964E1
cs_ea1_imon=1.2489E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44335E0
lens1_imon=2.51494E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.97036E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.42552E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84516E1
cs_ef1a_imon=2.99955E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.20897E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11187E1
os_restr1_imon=4.30277E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15052E1
os_ea1_imon=2.4254E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.07566E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25033E0
cs_ionrep_imon=9.61854E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93201E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01705E1
cs_anode1_imon=2.04629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.17966E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-1.78547E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26162E1
iondef3_imon=1.50161E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.58656E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.94732E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34353E0
ionrepsh_imon=9.33538E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3377E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74716E1
cs_ef2b_imon=3.11284E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48806E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70962E1
cs_ef2a_imon=3.19764E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79855E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.3721E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.08938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72959E1
iondef1_imon=1.08538E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6782E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=6.15076E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.47357E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11798E0
cs_ionaccel_imon=-1.14278E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47202E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56202E1
einzel_imon=7.60096E-6
window_vset=0.0E0
window_vmon=1.73666E-1
window_imon=-1.08717E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-6.56243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.44888E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.56757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.34624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.07913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.39785E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07445E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61977E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30629E1
cs_fil1_imon=9.24679E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25497E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62673E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.75607E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97028E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.51122E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10726E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21822E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00432E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06701E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.16607E-1	-7.98821E-1	-9.13124E0	-9.14195E0	4.22001E-3	9.37223E-2	2.73735E1	-3.26549E1	-3.26337E1	2.68857E1	1.20235E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.95876E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16441E-1	-7.98726E-1	-9.13148E0	-9.14166E0	4.48227E-3	9.38892E-2	2.72959E1	-3.26591E1	-3.26615E1	2.67564E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16536E-1	-7.98965E-1	-9.13119E0	-9.1419E0	4.86374E-3	9.34839E-2	2.73341E1	-3.26561E1	-3.26498E1	2.67642E1	1.19856E-7	2.51484E-3	2.51484E-3	6.32371E-3	2.98702E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.16846E-1	-7.98607E-1	-9.13124E0	-9.14209E0	4.88758E-3	9.34839E-2	2.73021E1	-3.26661E1	-3.26266E1	2.69038E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16774E-1	-7.98821E-1	-9.13129E0	-9.14197E0	5.36442E-3	9.36508E-2	2.72954E1	-3.26738E1	-3.26072E1	2.67566E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16941E-1	-7.98631E-1	-9.13124E0	-9.14211E0	4.69685E-3	9.38177E-2	2.73269E1	-3.26366E1	-3.26198E1	2.67926E1	1.19991E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01862E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16727E-1	-7.98678E-1	-9.13107E0	-9.14204E0	5.07832E-3	9.38892E-2	2.73015E1	-3.26356E1	-3.2647E1	2.68334E1	1.201E-7	2.52066E-3	2.52066E-3	6.3131E-3	3.00522E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16822E-1	-7.98583E-1	-9.13117E0	-9.14223E0	4.64916E-3	9.33647E-2	2.73119E1	-3.26317E1	-3.2618E1	2.68244E1	1.19953E-7	2.51417E-3	2.51417E-3	6.28592E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.16846E-1	-7.9875E-1	-9.13141E0	-9.14202E0	4.74453E-3	9.37223E-2	2.72925E1	-3.26506E1	-3.25809E1	2.68845E1	1.20078E-7	2.5199E-3	2.5199E-3	6.3282E-3	3.00989E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16774E-1	-7.9875E-1	-9.13148E0	-9.14183E0	4.55379E-3	9.36985E-2	2.73183E1	-3.26855E1	-3.2635E1	2.67668E1	1.19757E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.16751E-1	-7.98845E-1	-9.13129E0	-9.14171E0	4.64916E-3	9.37223E-2	2.72691E1	-3.26526E1	-3.25995E1	2.68899E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.1706E-1	-7.98845E-1	-9.13124E0	-9.14211E0	4.69685E-3	9.377E-2	2.72919E1	-3.26663E1	-3.25984E1	2.67653E1	1.20278E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.01871E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09642E0	-8.16751E-1	-7.9875E-1	-9.13119E0	-9.1418E0	4.31538E-3	9.3627E-2	2.72986E1	-3.26703E1	-3.26231E1	2.67529E1	1.19851E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.16631E-1	-7.98535E-1	-9.13115E0	-9.1419E0	4.62532E-3	9.38654E-2	2.73291E1	-3.26482E1	-3.262E1	2.69512E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16703E-1	-7.98655E-1	-9.13141E0	-9.1419E0	4.76837E-3	9.40084E-2	2.72614E1	-3.26531E1	-3.2652E1	2.68262E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99941E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.16488E-1	-7.98512E-1	-9.13103E0	-9.14171E0	4.79221E-3	9.36747E-2	2.73073E1	-3.26601E1	-3.26506E1	2.66656E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0071E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16607E-1	-7.98774E-1	-9.13117E0	-9.1419E0	4.93526E-3	9.39131E-2	2.72847E1	-3.26428E1	-3.26762E1	2.68715E1	1.20161E-7	2.51752E-3	2.51752E-3	6.32784E-3	3.00878E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.16607E-1	-7.98726E-1	-9.13112E0	-9.14187E0	5.07832E-3	9.37462E-2	2.73147E1	-3.27702E1	-3.27011E1	2.68406E1	1.19923E-7	2.50975E-3	2.50975E-3	6.31218E-3	3.02523E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16655E-1	-7.98655E-1	-9.13124E0	-9.1418E0	4.8399E-3	9.36985E-2	2.73428E1	-3.2659E1	-3.26384E1	2.67589E1	1.2033E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16607E-1	-7.98392E-1	-9.13112E0	-9.14183E0	5.03063E-3	9.36747E-2	2.72959E1	-3.26756E1	-3.26162E1	2.6782E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00432E-1