[Scan]
initial_time=2016-01-28T19:49:44
final_time=2016-01-28T19:50:04
ip_count=19
run=1026
dataset=6
scan=436
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.37456E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.00702E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=4.36473E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.42145E-10
mult1=-9.40166E-9
mult2=-2.66295E-9
rf_tmon=-5.19499E-3
rf_agc=3.29427E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.41074E-3
ql5_imon=1.66423E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64372E0
bslens_imon=2.27653E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19767E1
lens5a_imon=1.98665E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.0496E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53605E1
cs_ef1b_imon=3.09102E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02381E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04897E1
cs_ea1_imon=1.23843E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39336E0
lens1_imon=2.65588E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64479E1
os_ef1alow_imon=2.96111E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04031E1
cs_ea2_imon=1.39316E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84321E1
cs_ef1a_imon=3.00928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.21145E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11099E1
os_restr1_imon=4.29665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14942E1
os_ea1_imon=2.4229E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63862E1
os_ef1bup_imon=3.07934E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24794E0
cs_ionrep_imon=9.60901E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93645E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02018E1
cs_anode1_imon=2.03864E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.18529E-8
tplens_vset=1.4E-1
tplens_vmon=1.61731E0
tplens_imon=-3.0406E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26334E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56637E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.98391E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.97514E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31532E0
ionrepsh_imon=9.33947E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33918E1
lens5b_imon=2.19479E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7459E1
cs_ef2b_imon=3.12167E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41598E0
os_ea2_imon=-8.23173E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00358E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71201E1
cs_ef2a_imon=3.17811E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05861E0
os_ef2alow_imon=-2.63158E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85531E-1
os_ef2bup_imon=-5.39023E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.37272E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22995E2
cs_ionfoca_imon=6.30228E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01807E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73498E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67998E1
iondef4_imon=1.0826E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.12925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.493E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11717E0
cs_ionaccel_imon=-1.09412E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56348E1
einzel_imon=7.75109E-6
window_vset=0.0E0
window_vmon=1.82354E-1
window_imon=-1.15251E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82614E2
mask1_imon=2.39108E-4
mask2_vset=0.0E0
mask2_vmon=-1.86514E1
mask2_imon=-7.14627E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.80209E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.50431E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.17816E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50035E0
defgridb_imon=6.16489E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.40936E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07467E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62164E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30564E1
cs_fil1_imon=9.24345E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32587E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62255E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98739E-2
os_fil2_imon=-2.65065E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.7606E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.45804E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34196E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.79424E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.72036E-1
res40_imon=-2.55373E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=506
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09449E0	-8.16393E-1	-7.98965E-1	-9.13138E0	-9.14209E0	4.86374E-3	9.3627E-2	2.73174E1	-3.26549E1	-3.25769E1	2.67884E1	1.19906E-7	2.52615E-3	2.52615E-3	6.32909E-3	3.01092E-1
2.0E0	4.9E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.16417E-1	-7.98965E-1	-9.13146E0	-9.1418E0	4.673E-3	9.37462E-2	2.73435E1	-3.26597E1	-3.26248E1	2.67944E1	1.19835E-7	2.51826E-3	2.51826E-3	6.34864E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16345E-1	-7.99131E-1	-9.13126E0	-9.14183E0	5.126E-3	9.377E-2	2.72924E1	-3.26498E1	-3.26561E1	2.68464E1	1.20017E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00824E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.16488E-1	-7.9906E-1	-9.13112E0	-9.14197E0	4.8399E-3	9.36985E-2	2.73021E1	-3.26639E1	-3.26188E1	2.67704E1	1.19891E-7	2.52448E-3	2.52448E-3	6.32328E-3	3.00852E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09387E0	-8.16655E-1	-7.98893E-1	-9.13134E0	-9.14156E0	4.95911E-3	9.34839E-2	2.73028E1	-3.26417E1	-3.26301E1	2.67943E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16464E-1	-7.98917E-1	-9.1311E0	-9.14173E0	4.81606E-3	9.33647E-2	2.73243E1	-3.26344E1	-3.26242E1	2.67956E1	1.20092E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.00097E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09449E0	-8.16369E-1	-7.98798E-1	-9.13129E0	-9.14171E0	4.79221E-3	9.35793E-2	2.7266E1	-3.26795E1	-3.26603E1	2.68064E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16488E-1	-7.98583E-1	-9.13148E0	-9.14166E0	4.88758E-3	9.34601E-2	2.73333E1	-3.26675E1	-3.2593E1	2.68058E1	1.19861E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16584E-1	-7.98726E-1	-9.13131E0	-9.14147E0	4.76837E-3	9.34839E-2	2.73051E1	-3.26915E1	-3.26343E1	2.68292E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09572E0	-8.1687E-1	-7.98941E-1	-9.13122E0	-9.14197E0	4.72069E-3	9.3317E-2	2.73135E1	-3.2638E1	-3.2653E1	2.67974E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.16441E-1	-7.98678E-1	-9.13134E0	-9.14156E0	4.91142E-3	9.34124E-2	2.72444E1	-3.26993E1	-3.26338E1	2.67758E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.16703E-1	-7.98583E-1	-9.13155E0	-9.14185E0	4.57764E-3	9.3317E-2	2.73339E1	-3.262E1	-3.26332E1	2.68046E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09487E0	-8.16679E-1	-7.98845E-1	-9.13143E0	-9.14197E0	4.62532E-3	9.3174E-2	2.72684E1	-3.26506E1	-3.259E1	2.684E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.0174E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16631E-1	-7.98535E-1	-9.13107E0	-9.14176E0	4.57764E-3	9.34601E-2	2.72925E1	-3.26314E1	-3.26657E1	2.67962E1					
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09634E0	-8.16536E-1	-7.98488E-1	-9.13093E0	-9.14199E0	4.79221E-3	9.33647E-2	2.72751E1	-3.26615E1	-3.26138E1	2.68142E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16917E-1	-7.9844E-1	-9.131E0	-9.14147E0	4.86374E-3	9.34362E-2	2.73257E1	-3.26862E1	-3.26183E1	2.6854E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9952E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16965E-1	-7.98488E-1	-9.13098E0	-9.14154E0	4.81606E-3	9.34601E-2	2.73145E1	-3.26419E1	-3.2603E1	2.68004E1	1.20122E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.16655E-1	-7.98535E-1	-9.13103E0	-9.1418E0	4.88758E-3	9.34362E-2	2.72925E1	-3.26308E1	-3.26476E1	2.68208E1	1.20311E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16679E-1	-7.98631E-1	-9.13124E0	-9.14176E0	4.62532E-3	9.35793E-2	2.72839E1	-3.26644E1	-3.26354E1	2.68178E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.1656E-1	-7.98655E-1	-9.13115E0	-9.14187E0	4.41074E-3	9.37462E-2	2.73498E1	-3.26609E1	-3.26334E1	2.67998E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.0148E-1