[Scan]
initial_time=2016-01-28T19:50:39
final_time=2016-01-28T19:50:59
ip_count=19
run=1026
dataset=6
scan=438
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08768E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.38278E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.97142E-9
ql3_vset=
ql3_vmon=-9.13095E0
ql3_imon=4.35865E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.40047E-10
mult1=-9.94144E-9
mult2=-2.78294E-9
rf_tmon=-5.21947E-3
rf_agc=3.24101E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.70999E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.47647E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20019E1
lens5a_imon=1.97045E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04877E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.11064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=1.22928E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41522E0
lens1_imon=2.55938E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64494E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.39042E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.01838E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21607E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.29526E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.44667E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.09118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.932E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.04062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.19152E-8
tplens_vset=1.4E-1
tplens_vmon=1.57414E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26181E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26682E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.99345E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24188E0
ionrepsh_imon=9.29344E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74802E1
cs_ef2b_imon=3.11388E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47981E0
os_ea2_imon=-6.27397E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7112E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.72041E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.37301E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.29748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.10477E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72922E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67866E1
iondef4_imon=1.08485E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.15283E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.49728E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12774E0
cs_ionaccel_imon=-1.07701E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47096E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39138E-4
mask2_vset=0.0E0
mask2_vmon=-1.8653E1
mask2_imon=-5.50827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.58469E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.22922E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.00789E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41059E0
defgridb_imon=6.14271E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33267E1
os_fil1_imon=9.3905E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06915E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62117E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30556E1
cs_fil1_imon=9.24334E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35869E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62474E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.89422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19697E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36773E-1
cs_fil2_imon=-2.76808E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73087E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21989E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24764E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.16226E-1	-7.98607E-1	-9.13153E0	-9.14176E0	4.69685E-3	9.36985E-2	2.72886E1	-3.26679E1	-3.26272E1	2.67752E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00563E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16321E-1	-7.98607E-1	-9.13141E0	-9.14166E0	4.86374E-3	9.38416E-2	2.7291E1	-3.26529E1	-3.26768E1	2.68178E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09371E0	-8.16512E-1	-7.98392E-1	-9.13167E0	-9.14137E0	4.69685E-3	9.35316E-2	2.72986E1	-3.2639E1	-3.26307E1	2.68182E1	1.19978E-7	2.5225E-3	2.5225E-3	6.28511E-3	2.98554E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16822E-1	-7.98249E-1	-9.13143E0	-9.14178E0	4.74453E-3	9.35316E-2	2.72947E1	-3.26793E1	-3.25972E1	2.68051E1	1.198E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16727E-1	-7.98512E-1	-9.13141E0	-9.1418E0	4.8399E-3	9.37462E-2	2.73116E1	-3.26425E1	-3.26272E1	2.68215E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09379E0	-8.16727E-1	-7.98607E-1	-9.13126E0	-9.14171E0	4.48227E-3	9.35316E-2	2.73033E1	-3.26567E1	-3.25936E1	2.68004E1	1.20004E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16536E-1	-7.98512E-1	-9.13129E0	-9.14187E0	4.86374E-3	9.37939E-2	2.72973E1	-3.26476E1	-3.26446E1	2.67902E1	1.19601E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16917E-1	-7.98512E-1	-9.13117E0	-9.14209E0	4.8399E-3	9.36747E-2	2.73129E1	-3.26651E1	-3.26482E1	2.67878E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16751E-1	-7.98416E-1	-9.13131E0	-9.14192E0	4.62532E-3	9.3627E-2	2.73051E1	-3.2632E1	-3.26476E1	2.6819E1	1.19749E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.1687E-1	-7.98178E-1	-9.1316E0	-9.1419E0	4.72069E-3	9.41515E-2	2.73189E1	-3.26645E1	-3.26176E1	2.68136E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16846E-1	-7.98345E-1	-9.13122E0	-9.14187E0	4.74453E-3	9.37939E-2	2.72768E1	-3.26266E1	-3.26154E1	2.67746E1	1.19872E-7	2.51248E-3	2.51248E-3	6.30182E-3	2.99348E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.17108E-1	-7.98488E-1	-9.13143E0	-9.1419E0	4.57764E-3	9.41038E-2	2.72927E1	-3.26773E1	-3.26537E1	2.6804E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.1687E-1	-7.98559E-1	-9.13095E0	-9.14195E0	4.79221E-3	9.38177E-2	2.73201E1	-3.26561E1	-3.26332E1	2.68334E1	1.19851E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16488E-1	-7.98488E-1	-9.1311E0	-9.14192E0	4.64916E-3	9.377E-2	2.72895E1	-3.26266E1	-3.26591E1	2.6801E1	1.20122E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16488E-1	-7.98512E-1	-9.13136E0	-9.14183E0	4.57764E-3	9.40323E-2	2.73321E1	-3.26837E1	-3.26254E1	2.68388E1	1.20069E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16536E-1	-7.98798E-1	-9.13129E0	-9.14192E0	4.673E-3	9.36031E-2	2.72751E1	-3.26404E1	-3.26344E1	2.67253E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16512E-1	-7.98631E-1	-9.13112E0	-9.14207E0	4.57764E-3	9.36985E-2	2.73871E1	-3.26531E1	-3.26402E1	2.68148E1	1.19872E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01475E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09441E0	-8.16393E-1	-7.98202E-1	-9.13126E0	-9.1419E0	4.8399E-3	9.36985E-2	2.73309E1	-3.26711E1	-3.26825E1	2.68034E1	1.19749E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16369E-1	-7.9844E-1	-9.13122E0	-9.14185E0	4.69685E-3	9.38892E-2	2.7265E1	-3.26661E1	-3.26301E1	2.67914E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16417E-1	-7.98464E-1	-9.13095E0	-9.14192E0	4.69685E-3	9.36031E-2	2.72922E1	-3.26682E1	-3.26181E1	2.67866E1	1.20106E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00197E-1