[Scan]
initial_time=2016-01-28T19:51:06
final_time=2016-01-28T19:51:27
ip_count=19
run=1026
dataset=6
scan=439
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0871E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.37355E-8
ql2_vset=
ql2_vmon=-7.98249E-1
ql2_imon=2.03359E-9
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=4.32944E-10
ql4_vset=
ql4_vmon=-9.14226E0
ql4_imon=-1.31917E-10
mult1=-9.25445E-9
mult2=-2.7382E-9
rf_tmon=-4.77259E-3
rf_agc=3.27958E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.70462E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63672E0
bslens_imon=2.44062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.9812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12434E2
lens4a_imon=2.05104E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.10451E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=1.24536E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3997E0
lens1_imon=2.65298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.40251E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69481E-1
olens2_imon=1.22423E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.42575E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.45926E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.04279E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.19285E-8
tplens_vset=1.4E-1
tplens_vmon=1.62315E0
tplens_imon=-2.28099E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26027E1
iondef3_imon=1.47648E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26634E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.98754E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=9.28937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33575E1
lens5b_imon=2.16313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.44141E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29893E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68132E1
iondef4_imon=1.08233E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.14542E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.50491E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.64459E-6
window_vset=0.0E0
window_vmon=1.83105E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39199E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.87715E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=6.94274E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37307E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.38756E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07281E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62311E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30604E1
cs_fil1_imon=9.25397E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30403E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6211E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01532E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22774E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35608E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22031E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21651E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.35266E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09356E0	-8.16846E-1	-7.98845E-1	-9.13117E0	-9.14197E0	5.17368E-3	9.35793E-2	2.73086E1	-3.26531E1	-3.26726E1	2.68088E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09325E0	-8.17037E-1	-7.98512E-1	-9.13126E0	-9.14183E0	4.86374E-3	9.34839E-2	2.72426E1	-3.2638E1	-3.26362E1	2.68082E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.17132E-1	-7.98297E-1	-9.13124E0	-9.14185E0	4.8399E-3	9.38654E-2	2.73405E1	-3.2685E1	-3.26431E1	2.67949E1	1.19861E-7	2.51116E-3	2.51116E-3	6.34037E-3	2.9952E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0941E0	-8.17037E-1	-7.98392E-1	-9.13115E0	-9.14149E0	4.91142E-3	9.37939E-2	2.72793E1	-3.26753E1	-3.26302E1	2.68346E1	1.19697E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16679E-1	-7.98559E-1	-9.13112E0	-9.14152E0	4.8399E-3	9.377E-2	2.73045E1	-3.26518E1	-3.26188E1	2.68016E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.16798E-1	-7.98178E-1	-9.13112E0	-9.1418E0	4.88758E-3	9.37462E-2	2.73128E1	-3.26537E1	-3.26242E1	2.67908E1	1.2033E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16631E-1	-7.98416E-1	-9.13095E0	-9.14192E0	4.72069E-3	9.35316E-2	2.73081E1	-3.26386E1	-3.26344E1	2.67868E1	1.19809E-7	2.51771E-3	2.51771E-3	6.27461E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09433E0	-8.16226E-1	-7.98416E-1	-9.13122E0	-9.14209E0	4.74453E-3	9.35793E-2	2.72787E1	-3.26374E1	-3.26657E1	2.68319E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16512E-1	-7.98774E-1	-9.13129E0	-9.14185E0	4.673E-3	9.36508E-2	2.73553E1	-3.2637E1	-3.25936E1	2.67848E1	1.20122E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.98481E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.16917E-1	-7.98535E-1	-9.13134E0	-9.14183E0	4.98295E-3	9.35316E-2	2.73092E1	-3.26655E1	-3.26478E1	2.67962E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.16584E-1	-7.98488E-1	-9.13115E0	-9.14164E0	4.48227E-3	9.36747E-2	2.72432E1	-3.26464E1	-3.2632E1	2.68088E1	1.20226E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16822E-1	-7.98559E-1	-9.13143E0	-9.14178E0	4.76837E-3	9.36031E-2	2.73236E1	-3.26131E1	-3.26277E1	2.68009E1	1.19549E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02922E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16584E-1	-7.9875E-1	-9.13143E0	-9.14185E0	4.62532E-3	9.37223E-2	2.73182E1	-3.26391E1	-3.26179E1	2.68076E1	1.19967E-7	2.52874E-3	2.52874E-3	6.3074E-3	3.02342E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.16464E-1	-7.98893E-1	-9.13122E0	-9.14178E0	4.91142E-3	9.39846E-2	2.73021E1	-3.26795E1	-3.26104E1	2.67872E1	1.19667E-7	2.51725E-3	2.51725E-3	6.3245E-3	3.00794E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16226E-1	-7.98273E-1	-9.13124E0	-9.14202E0	4.8399E-3	9.36747E-2	2.72769E1	-3.26585E1	-3.26771E1	2.6834E1	1.20122E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16059E-1	-7.98512E-1	-9.13129E0	-9.14199E0	4.74453E-3	9.34601E-2	2.73147E1	-3.26549E1	-3.26398E1	2.67705E1	1.19757E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00302E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.16202E-1	-7.9844E-1	-9.13124E0	-9.14218E0	4.43459E-3	9.31501E-2	2.73322E1	-3.26933E1	-3.26006E1	2.68016E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16488E-1	-7.98035E-1	-9.13134E0	-9.1419E0	4.41074E-3	9.33886E-2	2.72979E1	-3.26458E1	-3.26158E1	2.68034E1	1.19902E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16226E-1	-7.98202E-1	-9.13136E0	-9.1419E0	4.91142E-3	9.38177E-2	2.73098E1	-3.2688E1	-3.26201E1	2.68117E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16107E-1	-7.98249E-1	-9.13117E0	-9.14226E0	4.64916E-3	9.38416E-2	2.73069E1	-3.26634E1	-3.26027E1	2.68132E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01347E-1