[Scan]
initial_time=2016-01-28T19:52:29
final_time=2016-01-28T19:52:48
ip_count=19
run=1026
dataset=6
scan=442
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08763E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.36489E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.00642E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=4.17066E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-1.15204E-10
mult1=-9.31897E-9
mult2=-2.78648E-9
rf_tmon=-5.13728E-3
rf_agc=3.24203E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.17233E-3
ql5_imon=1.71134E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64085E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20343E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53522E1
cs_ef1b_imon=3.09095E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.23226E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38259E0
lens1_imon=2.49017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64128E1
os_ef1alow_imon=2.95924E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03637E1
cs_ea2_imon=1.40286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84047E1
cs_ef1a_imon=2.99468E-5
olens2_vset=9.7E-1
olens2_vmon=9.69625E-1
olens2_imon=1.21851E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1139E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15247E1
os_ea1_imon=2.42151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63687E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21965E0
cs_ionrep_imon=9.77073E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=2.04385E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.18543E-8
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-4.26306E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.49206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.55718E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98303E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.96504E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=9.35308E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33451E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00333E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.17852E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04471E0
os_ef2alow_imon=-2.70664E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72904E-1
os_ef2bup_imon=-5.41386E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10689E1
os_restr2_imon=3.36202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.28548E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02006E1
cs_anode2_imon=2.08799E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.18719E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.54417E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13883E0
cs_ionaccel_imon=-1.13235E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47257E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56457E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=1.76562E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.38987E-4
mask2_vset=0.0E0
mask2_vmon=-1.8628E1
mask2_imon=-6.24965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.51967E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.85072E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.04727E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.43133E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07428E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62245E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30671E1
cs_fil1_imon=9.25501E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32216E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62891E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.7329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8081E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23533E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36519E-1
cs_fil2_imon=-2.50122E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.68246E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21844E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.33924E-1
res40_imon=-2.4738E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=220
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16679E-1	-7.98225E-1	-9.13148E0	-9.14159E0	4.74453E-3	9.35316E-2	2.72786E1	-3.26567E1	-3.26461E1	2.68202E1	1.19861E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01085E-1
2.0E0	4.1E1	1.0E0	3.16E2	1.6E2	-2.09619E0	-8.16774E-1	-7.98297E-1	-9.13141E0	-9.14204E0	4.95911E-3	9.34839E-2	2.72596E1	-3.26903E1	-3.26117E1	2.67945E1	1.19902E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16393E-1	-7.98512E-1	-9.13134E0	-9.1419E0	4.79221E-3	9.35793E-2	2.72993E1	-3.26671E1	-3.26283E1	2.6785E1	1.19937E-7	2.51725E-3	2.51725E-3	6.3131E-3	3.01065E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16393E-1	-7.98392E-1	-9.13179E0	-9.14168E0	5.03063E-3	9.34124E-2	2.73598E1	-3.26554E1	-3.26512E1	2.68358E1	1.19841E-7	2.51393E-3	2.51393E-3	6.32328E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.16607E-1	-7.98559E-1	-9.1316E0	-9.14154E0	4.62532E-3	9.35316E-2	2.72951E1	-3.26756E1	-3.2639E1	2.68112E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16417E-1	-7.98416E-1	-9.13181E0	-9.14149E0	4.64916E-3	9.35793E-2	2.73153E1	-3.26591E1	-3.26176E1	2.67833E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.16274E-1	-7.98178E-1	-9.13174E0	-9.14171E0	4.33922E-3	9.36508E-2	2.72892E1	-3.26632E1	-3.26455E1	2.68232E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.16298E-1	-7.98345E-1	-9.13186E0	-9.14166E0	4.55379E-3	9.3627E-2	2.73075E1	-3.26627E1	-3.26236E1	2.68418E1	1.19939E-7	2.51662E-3	2.51662E-3	6.33211E-3	3.00954E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16488E-1	-7.98273E-1	-9.13174E0	-9.14209E0	4.41074E-3	9.38416E-2	2.72739E1	-3.26729E1	-3.26032E1	2.67764E1					
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09309E0	-8.1625E-1	-7.98416E-1	-9.13165E0	-9.14183E0	4.33922E-3	9.37939E-2	2.73273E1	-3.26879E1	-3.2644E1	2.68232E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01609E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16321E-1	-7.98726E-1	-9.13167E0	-9.1418E0	4.52995E-3	9.36747E-2	2.73333E1	-3.26999E1	-3.26176E1	2.67836E1	1.19902E-7	2.52815E-3	2.52815E-3	6.31278E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16345E-1	-7.98559E-1	-9.13148E0	-9.14161E0	4.52995E-3	9.34124E-2	2.72709E1	-3.26741E1	-3.26404E1	2.6813E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16345E-1	-7.98702E-1	-9.13148E0	-9.14166E0	4.76837E-3	9.34839E-2	2.72709E1	-3.26687E1	-3.26374E1	2.67818E1	1.20024E-7	2.52285E-3	2.52285E-3	6.31847E-3	3.01146E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16202E-1	-7.98774E-1	-9.13129E0	-9.14187E0	4.69685E-3	9.36747E-2	2.73141E1	-3.26741E1	-3.26164E1	2.68016E1					
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09418E0	-8.16464E-1	-7.98774E-1	-9.13129E0	-9.14185E0	4.76837E-3	9.35078E-2	2.72997E1	-3.2653E1	-3.26446E1	2.6813E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09309E0	-8.16607E-1	-7.98869E-1	-9.13126E0	-9.14178E0	4.57764E-3	9.35793E-2	2.72835E1	-3.26494E1	-3.26446E1	2.68082E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0924E0	-8.16584E-1	-7.98702E-1	-9.13136E0	-9.1419E0	4.48227E-3	9.35555E-2	2.72973E1	-3.26603E1	-3.26398E1	2.68142E1	1.20435E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09309E0	-8.16393E-1	-7.98726E-1	-9.13119E0	-9.14187E0	4.52995E-3	9.38654E-2	2.73564E1	-3.26708E1	-3.26154E1	2.68088E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16488E-1	-7.98583E-1	-9.13141E0	-9.14185E0	4.52995E-3	9.37223E-2	2.7311E1	-3.26561E1	-3.26526E1	2.68123E1	1.19913E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16464E-1	-7.98535E-1	-9.13124E0	-9.14164E0	4.17233E-3	9.34839E-2	2.73357E1	-3.26536E1	-3.26074E1	2.68118E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1