[Scan]
initial_time=2016-01-28T19:54:43
final_time=2016-01-28T19:55:03
ip_count=19
run=1026
dataset=6
scan=447
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37705E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.91969E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.60072E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-9.99451E-11
mult1=-1.00534E-8
mult2=-2.68867E-9
rf_tmon=-3.3288E-3
rf_agc=3.3622E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.68114E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69317E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19622E1
lens5a_imon=1.99172E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.01872E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=1.24297E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42303E0
lens1_imon=2.39716E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03798E1
cs_ea2_imon=1.41493E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=2.99604E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.23526E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1542E1
os_ea1_imon=2.41639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.07532E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23948E0
cs_ionrep_imon=9.58544E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.04891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.20486E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26939E1
iondef3_imon=1.50866E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.99414E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.40158E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33892E1
lens5b_imon=2.19865E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45938E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00507E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.19353E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.69879E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73213E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.07512E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.18E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.55547E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.12386E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86326E1
mask2_imon=-7.41837E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.69644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.45273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.04537E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.40042E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06933E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62628E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30552E1
cs_fil1_imon=9.25439E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30884E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.79211E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.29622E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35996E-1
cs_fil2_imon=-2.39567E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0341E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2192E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19048E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.1656E-1	-7.98631E-1	-9.1311E0	-9.1413E0	5.10216E-3	9.36985E-2	2.73381E1	-3.26614E1	-3.26691E1	2.67734E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16417E-1	-7.98583E-1	-9.13131E0	-9.14142E0	4.86374E-3	9.35316E-2	2.7291E1	-3.26787E1	-3.26217E1	2.68045E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16345E-1	-7.98583E-1	-9.13134E0	-9.14168E0	4.93526E-3	9.35078E-2	2.73228E1	-3.2659E1	-3.2672E1	2.68354E1	1.20191E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99083E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16345E-1	-7.98249E-1	-9.13124E0	-9.14164E0	4.95911E-3	9.35793E-2	2.73033E1	-3.26585E1	-3.26095E1	2.67824E1	1.19851E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16488E-1	-7.98225E-1	-9.13138E0	-9.14176E0	4.79221E-3	9.34839E-2	2.73027E1	-3.26633E1	-3.26392E1	2.68418E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16703E-1	-7.98464E-1	-9.13143E0	-9.14154E0	4.60148E-3	9.37223E-2	2.72673E1	-3.26472E1	-3.26148E1	2.6807E1	1.20114E-7	2.5143E-3	2.5143E-3	6.32371E-3	3.01934E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.16464E-1	-7.98249E-1	-9.13146E0	-9.14152E0	4.81606E-3	9.35555E-2	2.73147E1	-3.26765E1	-3.25948E1	2.67926E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16274E-1	-7.98297E-1	-9.13129E0	-9.14173E0	4.81606E-3	9.34839E-2	2.73291E1	-3.26669E1	-3.26002E1	2.68142E1	1.20311E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.16298E-1	-7.98464E-1	-9.13091E0	-9.14171E0	4.74453E-3	9.3627E-2	2.73015E1	-3.26524E1	-3.26278E1	2.68112E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16298E-1	-7.98798E-1	-9.1316E0	-9.14154E0	4.76837E-3	9.32217E-2	2.73128E1	-3.26868E1	-3.26567E1	2.68418E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16464E-1	-7.98702E-1	-9.13138E0	-9.14183E0	4.81606E-3	9.3627E-2	2.72702E1	-3.26494E1	-3.26152E1	2.68436E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16488E-1	-7.98774E-1	-9.13153E0	-9.14156E0	4.88758E-3	9.34839E-2	2.72644E1	-3.26974E1	-3.2652E1	2.68238E1	1.19953E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.00453E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.16226E-1	-7.98559E-1	-9.13148E0	-9.14159E0	4.62532E-3	9.34839E-2	2.73139E1	-3.2649E1	-3.25912E1	2.6798E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16417E-1	-7.98488E-1	-9.13146E0	-9.14171E0	4.57764E-3	9.35078E-2	2.72953E1	-3.26634E1	-3.26389E1	2.68052E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.16178E-1	-7.98273E-1	-9.13172E0	-9.14171E0	4.48227E-3	9.33409E-2	2.72892E1	-3.26815E1	-3.26219E1	2.6831E1	1.20031E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99613E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16274E-1	-7.9813E-1	-9.13153E0	-9.14178E0	4.50611E-3	9.34601E-2	2.72925E1	-3.26987E1	-3.25984E1	2.67758E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31817E-3	2.9841E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16178E-1	-7.98392E-1	-9.13143E0	-9.1418E0	4.62532E-3	9.377E-2	2.72762E1	-3.26638E1	-3.26667E1	2.68036E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16059E-1	-7.98321E-1	-9.1315E0	-9.1418E0	4.62532E-3	9.36747E-2	2.72889E1	-3.26747E1	-3.25611E1	2.68587E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16274E-1	-7.98464E-1	-9.13134E0	-9.14197E0	4.57764E-3	9.37462E-2	2.72903E1	-3.26384E1	-3.26561E1	2.6818E1	1.2054E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16488E-1	-7.98702E-1	-9.13126E0	-9.1419E0	4.62532E-3	9.35793E-2	2.73213E1	-3.26543E1	-3.26939E1	2.68286E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1