[Scan]
initial_time=2016-01-28T19:55:10
final_time=2016-01-28T19:55:30
ip_count=19
run=1026
dataset=6
scan=448
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08758E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37543E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.96116E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.76797E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.10269E-10
mult1=-8.87281E-9
mult2=-2.80361E-9
rf_tmon=-3.80159E-3
rf_agc=3.35215E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.69802E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63595E0
bslens_imon=2.56414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2007E1
lens5a_imon=1.99596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.05123E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53444E1
cs_ef1b_imon=3.09403E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02292E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.24688E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42123E0
lens1_imon=2.56414E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64667E1
os_ef1alow_imon=2.96286E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04157E1
cs_ea2_imon=1.40223E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84465E1
cs_ef1a_imon=2.99828E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.23441E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29325E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.42462E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.08158E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26702E0
cs_ionrep_imon=9.54492E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93432E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01873E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=3.22429E-8
tplens_vset=1.4E-1
tplens_vmon=1.62586E0
tplens_imon=-2.78005E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57237E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98256E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.9626E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3092E0
ionrepsh_imon=9.3191E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.17155E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74839E1
cs_ef2b_imon=3.12167E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50387E0
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00272E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7092E1
cs_ef2a_imon=3.18511E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04548E0
os_ef2alow_imon=-2.77073E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.97856E-1
os_ef2bup_imon=-5.48365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10818E1
os_restr2_imon=3.39024E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.30123E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01789E1
cs_anode2_imon=2.10851E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.08414E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68112E1
iondef4_imon=1.08328E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.24399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.59252E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13209E0
cs_ionaccel_imon=-1.12429E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47265E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56022E1
einzel_imon=7.6061E-6
window_vset=0.0E0
window_vmon=1.65325E-1
window_imon=-1.04644E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82623E2
mask1_imon=2.38963E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-7.19492E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.2128E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.22778E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.22448E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43922E0
defgridb_imon=6.32901E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.3328E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0803E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62713E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=9.23932E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29262E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62091E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.01025E-2
os_fil2_imon=-2.70417E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92765E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94742E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36783E-1
cs_fil2_imon=-2.29548E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21583E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79594E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.16298E-1	-7.98583E-1	-9.1315E0	-9.14176E0	4.673E-3	9.38416E-2	2.73075E1	-3.26825E1	-3.25677E1	2.67902E1	1.20076E-7	2.52147E-3	2.52147E-3	6.31332E-3	2.98512E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16321E-1	-7.98583E-1	-9.13153E0	-9.14176E0	4.8399E-3	9.3627E-2	2.72811E1	-3.26506E1	-3.26164E1	2.68845E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.97647E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16655E-1	-7.98512E-1	-9.13146E0	-9.14187E0	4.88758E-3	9.35078E-2	2.72402E1	-3.26838E1	-3.26172E1	2.6726E1	1.19978E-7	2.51248E-3	2.51248E-3	6.29067E-3	3.00676E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16607E-1	-7.98488E-1	-9.13167E0	-9.14176E0	4.86374E-3	9.36747E-2	2.72827E1	-3.26862E1	-3.26502E1	2.69157E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16727E-1	-7.98678E-1	-9.1316E0	-9.14145E0	4.673E-3	9.37939E-2	2.73163E1	-3.26667E1	-3.26166E1	2.67769E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16607E-1	-7.98631E-1	-9.13141E0	-9.14154E0	4.74453E-3	9.39608E-2	2.73333E1	-3.26573E1	-3.26645E1	2.68007E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16727E-1	-7.98464E-1	-9.13119E0	-9.14166E0	4.72069E-3	9.37462E-2	2.72913E1	-3.26645E1	-3.26362E1	2.68128E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16584E-1	-7.98416E-1	-9.13134E0	-9.14187E0	4.55379E-3	9.377E-2	2.72968E1	-3.26585E1	-3.26036E1	2.6813E1	1.20069E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09441E0	-8.16512E-1	-7.9813E-1	-9.13115E0	-9.14168E0	4.52995E-3	9.37223E-2	2.72949E1	-3.26206E1	-3.26098E1	2.68214E1	1.20209E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1656E-1	-7.98297E-1	-9.13115E0	-9.14168E0	4.673E-3	9.36747E-2	2.73129E1	-3.26633E1	-3.26344E1	2.68028E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32386E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09526E0	-8.16607E-1	-7.98249E-1	-9.13119E0	-9.14164E0	5.03063E-3	9.36031E-2	2.72986E1	-3.26903E1	-3.2639E1	2.6804E1	1.20017E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16798E-1	-7.98368E-1	-9.13134E0	-9.14168E0	4.52995E-3	9.35316E-2	2.72856E1	-3.26826E1	-3.26726E1	2.68696E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.16393E-1	-7.98535E-1	-9.13136E0	-9.14195E0	4.50611E-3	9.38177E-2	2.72955E1	-3.26494E1	-3.26002E1	2.68352E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.01995E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.16464E-1	-7.98559E-1	-9.13131E0	-9.14176E0	4.52995E-3	9.34601E-2	2.72686E1	-3.2644E1	-3.26706E1	2.6869E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16298E-1	-7.98154E-1	-9.13141E0	-9.14171E0	4.88758E-3	9.36508E-2	2.7287E1	-3.26216E1	-3.2616E1	2.67078E1	1.1993E-7	2.51679E-3	2.51679E-3	6.3282E-3	3.00741E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.16488E-1	-7.98512E-1	-9.13126E0	-9.14183E0	4.8399E-3	9.37939E-2	2.72943E1	-3.26464E1	-3.26254E1	2.69001E1	1.19829E-7	2.51725E-3	2.51725E-3	6.33592E-3	3.00522E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09526E0	-8.16417E-1	-7.98488E-1	-9.13105E0	-9.14204E0	4.64916E-3	9.38416E-2	2.73261E1	-3.26717E1	-3.26579E1	2.678E1	1.19925E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99613E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16488E-1	-7.98273E-1	-9.13112E0	-9.14195E0	4.74453E-3	9.33647E-2	2.72927E1	-3.26638E1	-3.26278E1	2.67677E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16274E-1	-7.98392E-1	-9.13122E0	-9.14221E0	4.79221E-3	9.3627E-2	2.73364E1	-3.26661E1	-3.25965E1	2.68076E1	1.19959E-7	2.51755E-3	2.51755E-3	6.30197E-3	3.01155E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16441E-1	-7.98321E-1	-9.13126E0	-9.14192E0	4.88758E-3	9.33886E-2	2.7285E1	-3.26585E1	-3.2629E1	2.68112E1