[Scan]
initial_time=2016-01-28T19:55:37
final_time=2016-01-28T19:55:57
ip_count=19
run=1026
dataset=6
scan=449
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37296E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=1.9835E-9
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=3.77989E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-1.12736E-10
mult1=-9.27081E-9
mult2=-2.74855E-9
rf_tmon=-4.59654E-3
rf_agc=3.2895E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.45843E-3
ql5_imon=1.69615E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66703E0
bslens_imon=2.57439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19747E1
lens5a_imon=1.98005E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04961E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53303E1
cs_ef1b_imon=3.1001E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02069E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=1.23674E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38646E0
lens1_imon=2.44329E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64791E1
os_ef1alow_imon=2.96184E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0373E1
cs_ea2_imon=1.40558E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.00847E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.238E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11434E1
os_restr1_imon=4.28279E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15293E1
os_ea1_imon=2.42222E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63453E1
os_ef1bup_imon=3.09848E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21105E0
cs_ionrep_imon=9.53872E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01964E1
cs_anode1_imon=2.03013E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=3.2083E-8
tplens_vset=1.4E-1
tplens_vmon=1.65004E0
tplens_imon=-3.65486E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.49298E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.56092E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02884E2
lens6_imon=2.98417E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.94675E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31103E0
ionrepsh_imon=9.45529E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33533E1
lens5b_imon=2.16756E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74461E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50172E0
os_ea2_imon=-7.15093E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00496E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71487E1
cs_ef2a_imon=3.17592E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05591E0
os_ef2alow_imon=-2.53751E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79179E-1
os_ef2bup_imon=-5.31482E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10772E1
os_restr2_imon=3.37094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.30286E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0193E1
cs_anode2_imon=2.09257E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.07981E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67776E1
iondef4_imon=1.08949E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.19901E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.5537E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14028E0
cs_ionaccel_imon=-1.11845E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02056E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56398E1
einzel_imon=7.57431E-6
window_vset=0.0E0
window_vmon=1.8776E-1
window_imon=-1.08196E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.38967E-4
mask2_vset=0.0E0
mask2_vmon=-1.86337E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.36957E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.66638E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.15901E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26978E0
defgridb_imon=6.11416E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33284E1
os_fil1_imon=9.42799E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07194E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62572E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30592E1
cs_fil1_imon=9.26716E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35006E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62928E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.83287E-2
os_fil2_imon=-2.6074E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.74439E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.04984E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.33711E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.33493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21761E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.12976E-1
res40_imon=-2.36317E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16584E-1	-7.98512E-1	-9.13134E0	-9.14178E0	4.98295E-3	9.37223E-2	2.73075E1	-3.26478E1	-3.26089E1	2.67798E1	1.1992E-7	2.51709E-3	2.51709E-3	6.30136E-3	2.99738E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16369E-1	-7.98774E-1	-9.13117E0	-9.14185E0	4.91142E-3	9.37223E-2	2.7321E1	-3.26762E1	-3.26462E1	2.68138E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16488E-1	-7.98607E-1	-9.13107E0	-9.1418E0	4.74453E-3	9.35793E-2	2.73069E1	-3.26585E1	-3.26396E1	2.68233E1	1.20208E-7	2.51838E-3	2.51838E-3	6.34164E-3	3.00251E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0948E0	-8.1625E-1	-7.98559E-1	-9.13148E0	-9.14156E0	4.673E-3	9.36985E-2	2.72871E1	-3.26645E1	-3.25906E1	2.67553E1	1.20142E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09665E0	-8.16464E-1	-7.98631E-1	-9.13134E0	-9.14159E0	4.8399E-3	9.37223E-2	2.73116E1	-3.2672E1	-3.26626E1	2.68142E1	1.20383E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09642E0	-8.16417E-1	-7.98368E-1	-9.13126E0	-9.14152E0	4.88758E-3	9.36747E-2	2.73097E1	-3.26868E1	-3.26486E1	2.68262E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.1687E-1	-7.98678E-1	-9.13143E0	-9.14176E0	4.81606E-3	9.36508E-2	2.72817E1	-3.26663E1	-3.25966E1	2.68118E1	1.19991E-7	2.52236E-3	2.52236E-3	6.32328E-3	3.01104E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16655E-1	-7.98726E-1	-9.13146E0	-9.14209E0	4.81606E-3	9.37223E-2	2.72696E1	-3.26224E1	-3.25984E1	2.68124E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16345E-1	-7.9875E-1	-9.13119E0	-9.14178E0	4.673E-3	9.37939E-2	2.72841E1	-3.26554E1	-3.26482E1	2.6786E1	1.20278E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16393E-1	-7.9844E-1	-9.13138E0	-9.14199E0	4.3869E-3	9.36031E-2	2.73411E1	-3.26681E1	-3.26326E1	2.68256E1	1.20487E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16417E-1	-7.98392E-1	-9.13136E0	-9.14176E0	4.48227E-3	9.38654E-2	2.73117E1	-3.26543E1	-3.26116E1	2.681E1	1.20017E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09418E0	-8.16154E-1	-7.98845E-1	-9.13131E0	-9.1418E0	4.60148E-3	9.3627E-2	2.73177E1	-3.26458E1	-3.26266E1	2.67974E1	1.19809E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16321E-1	-7.98607E-1	-9.1311E0	-9.14192E0	4.74453E-3	9.34601E-2	2.73105E1	-3.26753E1	-3.26512E1	2.68046E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16298E-1	-7.9844E-1	-9.13122E0	-9.14185E0	4.74453E-3	9.39608E-2	2.73333E1	-3.26669E1	-3.26026E1	2.68022E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16226E-1	-7.98607E-1	-9.13107E0	-9.1414E0	4.673E-3	9.35555E-2	2.73045E1	-3.26609E1	-3.26645E1	2.6795E1	1.19965E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16154E-1	-7.98321E-1	-9.13069E0	-9.14166E0	5.05447E-3	9.37223E-2	2.73189E1	-3.26807E1	-3.26308E1	2.67734E1	1.19913E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00563E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.16417E-1	-7.98202E-1	-9.13112E0	-9.1419E0	5.05447E-3	9.35793E-2	2.73207E1	-3.26657E1	-3.26212E1	2.67956E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16298E-1	-7.98249E-1	-9.13098E0	-9.14226E0	4.76837E-3	9.36985E-2	2.73346E1	-3.26809E1	-3.25806E1	2.68041E1	1.19953E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0071E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16345E-1	-7.98345E-1	-9.13119E0	-9.14223E0	4.72069E-3	9.377E-2	2.73051E1	-3.26685E1	-3.26366E1	2.68172E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16345E-1	-7.98464E-1	-9.13124E0	-9.14187E0	4.45843E-3	9.37462E-2	2.73045E1	-3.26681E1	-3.26482E1	2.67776E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.98665E-1