[Scan]
initial_time=2016-01-28T19:56:04
final_time=2016-01-28T19:56:24
ip_count=19
run=1026
dataset=6
scan=450
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08844E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37429E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=1.94373E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=4.02355E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-9.64761E-11
mult1=-8.84961E-9
mult2=-2.54906E-9
rf_tmon=-4.65016E-3
rf_agc=3.31631E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.69309E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63259E0
bslens_imon=2.42646E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=1.99147E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53826E1
cs_ef1b_imon=3.11569E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04888E1
cs_ea1_imon=1.23333E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42565E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.95927E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.38304E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84448E1
cs_ef1a_imon=2.99459E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.23546E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.29166E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15518E1
os_ea1_imon=2.41549E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=9.51943E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01911E1
cs_anode1_imon=2.05035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.21582E-8
tplens_vset=1.4E-1
tplens_vmon=1.62551E0
tplens_imon=-4.97094E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.48675E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.56851E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=3.96457E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30047E0
ionrepsh_imon=9.18673E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33728E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48275E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.31527E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.08413E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1606E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.56863E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-1.18152E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02103E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.66887E-1
window_imon=-1.24279E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.15157E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.63835E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38489E0
defgridb_imon=6.05789E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33254E1
os_fil1_imon=9.43009E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06873E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62812E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.306E1
cs_fil1_imon=9.25007E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3665E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62678E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00265E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.90623E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.1242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21793E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.00738E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.16393E-1	-7.98249E-1	-9.13143E0	-9.14204E0	4.79221E-3	9.38654E-2	2.72685E1	-3.26378E1	-3.26266E1	2.6849E1					
2.0E0	3.8E1	1.0E0	3.16E2	1.6E2	-2.0941E0	-8.16345E-1	-7.98249E-1	-9.1315E0	-9.14183E0	4.98295E-3	9.38416E-2	2.72633E1	-3.26397E1	-3.26329E1	2.67668E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16321E-1	-7.98368E-1	-9.1315E0	-9.14171E0	4.60148E-3	9.38654E-2	2.7312E1	-3.27106E1	-3.26364E1	2.68018E1	1.20084E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00942E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.16345E-1	-7.98607E-1	-9.13126E0	-9.14192E0	4.72069E-3	9.36985E-2	2.73193E1	-3.26413E1	-3.26526E1	2.68382E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16393E-1	-7.9844E-1	-9.13122E0	-9.14185E0	4.91142E-3	9.34124E-2	2.72937E1	-3.26957E1	-3.25737E1	2.6783E1	1.19646E-7	2.52061E-3	2.52061E-3	6.33436E-3	3.00197E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.16107E-1	-7.98011E-1	-9.131E0	-9.14183E0	4.98295E-3	9.38416E-2	2.72895E1	-3.26741E1	-3.26032E1	2.68328E1	1.19705E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98222E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16178E-1	-7.98011E-1	-9.13117E0	-9.14159E0	4.8399E-3	9.37223E-2	2.73034E1	-3.26886E1	-3.26101E1	2.68518E1	1.20226E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.98222E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16536E-1	-7.98249E-1	-9.13112E0	-9.14164E0	4.52995E-3	9.34601E-2	2.72924E1	-3.26546E1	-3.26063E1	2.6829E1	1.1993E-7	2.51783E-3	2.51783E-3	6.3126E-3	2.97296E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16298E-1	-7.98512E-1	-9.13131E0	-9.14164E0	4.88758E-3	9.36031E-2	2.73285E1	-3.26392E1	-3.26344E1	2.67451E1	1.20281E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.00087E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16321E-1	-7.98512E-1	-9.13117E0	-9.14185E0	4.72069E-3	9.39131E-2	2.72633E1	-3.26706E1	-3.26634E1	2.6846E1	1.19809E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.02133E-1
1.4E1	4.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16178E-1	-7.9813E-1	-9.13126E0	-9.14183E0	4.64916E-3	9.37939E-2	2.73392E1	-3.26657E1	-3.26338E1	2.67942E1	1.19804E-7	2.51891E-3	2.51891E-3	6.34202E-3	3.01373E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09449E0	-8.16321E-1	-7.98082E-1	-9.13129E0	-9.14159E0	4.91142E-3	9.36031E-2	2.72525E1	-3.26762E1	-3.26401E1	2.67963E1	1.1988E-7	2.51783E-3	2.51783E-3	6.29703E-3	3.00247E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16417E-1	-7.97939E-1	-9.13136E0	-9.14171E0	4.95911E-3	9.33409E-2	2.73748E1	-3.26633E1	-3.26374E1	2.6786E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.97963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.1625E-1	-7.98106E-1	-9.1316E0	-9.14171E0	4.86374E-3	9.37939E-2	2.72898E1	-3.26484E1	-3.26207E1	2.68232E1	1.19757E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.98222E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.1625E-1	-7.98202E-1	-9.13126E0	-9.14185E0	4.93526E-3	9.35555E-2	2.72574E1	-3.26242E1	-3.26689E1	2.67902E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.1656E-1	-7.98368E-1	-9.13129E0	-9.14166E0	4.62532E-3	9.34601E-2	2.73381E1	-3.26455E1	-3.25989E1	2.67746E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16464E-1	-7.98273E-1	-9.13136E0	-9.14156E0	4.76837E-3	9.35078E-2	2.72656E1	-3.26732E1	-3.2652E1	2.67962E1	1.19705E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1656E-1	-7.9813E-1	-9.13155E0	-9.1419E0	4.95911E-3	9.34362E-2	2.73629E1	-3.26744E1	-3.25741E1	2.67816E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.16417E-1	-7.98345E-1	-9.13141E0	-9.14152E0	4.81606E-3	9.34839E-2	2.72883E1	-3.26654E1	-3.26405E1	2.68007E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16536E-1	-7.98225E-1	-9.1311E0	-9.14192E0	5.00679E-3	9.33886E-2	2.73541E1	-3.26591E1	-3.26554E1	2.67926E1	1.20042E-7	2.51814E-3	2.51814E-3	6.31798E-3	2.99845E-1