[Scan]
initial_time=2016-01-28T19:56:58
final_time=2016-01-28T19:57:18
ip_count=19
run=1026
dataset=6
scan=452
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08831E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.3811E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=1.99211E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.31652E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-8.71778E-11
mult1=-9.48754E-9
mult2=-2.54295E-9
rf_tmon=-4.22165E-3
rf_agc=3.30039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.73635E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65911E0
bslens_imon=2.46621E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20275E1
lens5a_imon=1.97579E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04823E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53692E1
cs_ef1b_imon=3.09367E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04894E1
cs_ea1_imon=1.23119E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41124E0
lens1_imon=2.57103E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64808E1
os_ef1alow_imon=2.96905E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03896E1
cs_ea2_imon=1.41126E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=2.99113E-5
olens2_vset=9.7E-1
olens2_vmon=9.69601E-1
olens2_imon=1.24043E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.2913E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1515E1
os_ea1_imon=2.4239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63835E1
os_ef1bup_imon=3.07796E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21841E0
cs_ionrep_imon=9.62773E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01765E1
cs_anode1_imon=2.04201E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.21681E-8
tplens_vset=1.4E-1
tplens_vmon=1.64081E0
tplens_imon=-4.31343E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26523E1
iondef3_imon=1.47602E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26823E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.94552E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29453E0
ionrepsh_imon=9.44054E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33546E1
lens5b_imon=2.17046E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74801E1
cs_ef2b_imon=3.12586E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49855E0
os_ea2_imon=-6.89651E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00323E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71314E1
cs_ef2a_imon=3.17526E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0689E0
os_ef2alow_imon=-2.64917E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.5584E-1
os_ef2bup_imon=-5.40745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10942E1
os_restr2_imon=3.38485E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.29516E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02164E1
cs_anode2_imon=2.10339E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73235E1
iondef1_imon=1.08407E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68599E1
iondef4_imon=1.08391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.23318E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.58961E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12203E0
cs_ionaccel_imon=-1.2195E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47193E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56368E1
einzel_imon=7.65041E-6
window_vset=0.0E0
window_vmon=1.85785E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-7.06768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.78587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.88366E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46495E0
defgridb_imon=6.10499E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3326E1
os_fil1_imon=9.45732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06961E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30647E1
cs_fil1_imon=9.24194E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30323E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6286E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0499E-2
os_fil2_imon=-2.58765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95958E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34089E-1
cs_fil2_imon=-2.3631E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15493E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21876E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50454E-1
res40_imon=-2.63045E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09533E0	-8.16441E-1	-7.9875E-1	-9.13143E0	-9.14237E0	4.93526E-3	9.34839E-2	2.72962E1	-3.26773E1	-3.26272E1	2.67995E1	1.20191E-7	2.51804E-3	2.51804E-3	6.32418E-3	2.99083E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09426E0	-8.16393E-1	-7.9875E-1	-9.13129E0	-9.14218E0	4.81606E-3	9.34601E-2	2.73094E1	-3.26627E1	-3.26474E1	2.682E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16369E-1	-7.98392E-1	-9.13131E0	-9.14202E0	4.50611E-3	9.36508E-2	2.73334E1	-3.26714E1	-3.26307E1	2.68111E1	1.19819E-7	2.52362E-3	2.52362E-3	6.27954E-3	2.99613E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16321E-1	-7.98726E-1	-9.13146E0	-9.1419E0	4.55379E-3	9.37223E-2	2.72756E1	-3.26844E1	-3.26148E1	2.67896E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.15964E-1	-7.98154E-1	-9.13153E0	-9.14204E0	4.79221E-3	9.36985E-2	2.72925E1	-3.2647E1	-3.2623E1	2.67728E1	1.19809E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16131E-1	-7.98297E-1	-9.13179E0	-9.1419E0	5.00679E-3	9.35316E-2	2.73033E1	-3.26777E1	-3.26176E1	2.6783E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.16178E-1	-7.98368E-1	-9.13155E0	-9.14166E0	5.17368E-3	9.37939E-2	2.72901E1	-3.26633E1	-3.26128E1	2.68358E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16274E-1	-7.98583E-1	-9.13153E0	-9.14185E0	4.72069E-3	9.34601E-2	2.72913E1	-3.26485E1	-3.26256E1	2.68257E1	1.20244E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16011E-1	-7.98774E-1	-9.13136E0	-9.14209E0	5.00679E-3	9.36031E-2	2.72762E1	-3.2639E1	-3.26319E1	2.68106E1	1.20028E-7	2.51498E-3	2.51498E-3	6.323E-3	3.00123E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16274E-1	-7.98655E-1	-9.13129E0	-9.14185E0	4.76837E-3	9.34601E-2	2.73303E1	-3.26645E1	-3.2614E1	2.68424E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16059E-1	-7.98583E-1	-9.13093E0	-9.14199E0	4.64916E-3	9.35078E-2	2.73063E1	-3.26773E1	-3.26478E1	2.68034E1	1.19913E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.16107E-1	-7.98392E-1	-9.13124E0	-9.14168E0	4.76837E-3	9.38177E-2	2.73302E1	-3.26425E1	-3.26676E1	2.68208E1	1.19851E-7	2.52169E-3	2.52169E-3	6.28592E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16274E-1	-7.98798E-1	-9.13134E0	-9.14164E0	4.57764E-3	9.37223E-2	2.72815E1	-3.26726E1	-3.26502E1	2.67984E1	1.20278E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16059E-1	-7.98774E-1	-9.13131E0	-9.14187E0	4.69685E-3	9.37939E-2	2.72967E1	-3.26693E1	-3.2608E1	2.67926E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.1687E-1	-7.98655E-1	-9.13131E0	-9.14171E0	4.93526E-3	9.37939E-2	2.73616E1	-3.26362E1	-3.24968E1	2.68238E1	1.20017E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.99E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16512E-1	-7.98464E-1	-9.13141E0	-9.14173E0	4.8399E-3	9.34124E-2	2.73147E1	-3.26681E1	-3.26164E1	2.68212E1	1.20383E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02922E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16536E-1	-7.98655E-1	-9.13157E0	-9.14185E0	4.57764E-3	9.37462E-2	2.73057E1	-3.26627E1	-3.2648E1	2.68113E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.16536E-1	-7.98392E-1	-9.13138E0	-9.14185E0	4.88758E-3	9.36747E-2	2.73493E1	-3.26767E1	-3.26183E1	2.68358E1	1.20043E-7	2.51826E-3	2.51826E-3	6.3074E-3	3.00171E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16488E-1	-7.98321E-1	-9.13155E0	-9.14173E0	4.8399E-3	9.34362E-2	2.72903E1	-3.26419E1	-3.26514E1	2.67885E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16703E-1	-7.98416E-1	-9.13153E0	-9.14211E0	4.76837E-3	9.35555E-2	2.73235E1	-3.26823E1	-3.26523E1	2.68599E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1