[Scan]
initial_time=2016-01-28T19:58:45
final_time=2016-01-28T19:59:05
ip_count=19
run=1026
dataset=6
scan=456
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.36817E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.00806E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.60489E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-8.18849E-11
mult1=-9.90959E-9
mult2=-2.75286E-9
rf_tmon=-5.57399E-3
rf_agc=3.21813E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.70851E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66398E0
bslens_imon=2.36726E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19631E1
lens5a_imon=1.99217E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53717E1
cs_ef1b_imon=3.10677E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0481E1
cs_ea1_imon=1.20663E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37574E0
lens1_imon=2.76423E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64583E1
os_ef1alow_imon=2.9668E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0411E1
cs_ea2_imon=1.39862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84351E1
cs_ef1a_imon=3.00086E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.24432E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11367E1
os_restr1_imon=4.29317E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14765E1
os_ea1_imon=2.45784E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.0787E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24446E0
cs_ionrep_imon=9.49743E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93515E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0179E1
cs_anode1_imon=2.02891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.2221E-8
tplens_vset=1.4E-1
tplens_vmon=1.62362E0
tplens_imon=-4.00073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26112E1
iondef3_imon=1.51733E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26818E1
iondef2_imon=1.55474E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98609E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.9336E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26673E0
ionrepsh_imon=9.24551E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.339E1
lens5b_imon=2.23531E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74751E1
cs_ef2b_imon=3.12549E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43659E0
os_ea2_imon=-8.16127E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00535E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06953E0
os_ef2alow_imon=-2.69782E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95761E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11042E1
os_restr2_imon=3.39158E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.29966E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01846E1
cs_anode2_imon=2.09029E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72903E1
iondef1_imon=1.08677E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68204E1
iondef4_imon=1.08952E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.31661E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.61322E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11205E0
cs_ionaccel_imon=-1.11097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.4708E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56268E1
einzel_imon=7.62047E-6
window_vset=0.0E0
window_vmon=1.85161E-1
window_imon=-1.10348E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39065E-4
mask2_vset=0.0E0
mask2_vmon=-1.86562E1
mask2_imon=-6.24431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=6.2148E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.62704E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50175E3
multb_neg_imon=7.10035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.22306E0
defgridb_imon=6.63086E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33271E1
os_fil1_imon=9.3214E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07304E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62318E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30563E1
cs_fil1_imon=9.24113E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24272E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62561E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94853E-2
os_fil2_imon=-2.74983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82236E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.36492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36778E-1
cs_fil2_imon=-2.45666E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25473E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21758E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40061E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47959E-1
res40_imon=-2.52192E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16345E-1	-7.98368E-1	-9.13131E0	-9.14178E0	4.74453E-3	9.3627E-2	2.72461E1	-3.26874E1	-3.25971E1	2.68298E1	1.20005E-7	2.5118E-3	2.5118E-3	6.31902E-3	3.00916E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.1625E-1	-7.98512E-1	-9.13138E0	-9.14185E0	4.88758E-3	9.37939E-2	2.72402E1	-3.2686E1	-3.25979E1	2.68581E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09549E0	-8.1625E-1	-7.98869E-1	-9.13107E0	-9.14187E0	4.95911E-3	9.39131E-2	2.73069E1	-3.26697E1	-3.26054E1	2.68166E1	1.20191E-7	2.51915E-3	2.51915E-3	6.34661E-3	3.00144E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16059E-1	-7.98321E-1	-9.13136E0	-9.14176E0	5.05447E-3	9.38416E-2	2.73163E1	-3.27003E1	-3.26461E1	2.68065E1	1.19991E-7	2.52236E-3	2.52236E-3	6.33919E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.16083E-1	-7.98321E-1	-9.13177E0	-9.14178E0	4.86374E-3	9.36031E-2	2.73195E1	-3.26741E1	-3.26182E1	2.67319E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.15892E-1	-7.98392E-1	-9.13143E0	-9.14176E0	4.69685E-3	9.377E-2	2.72889E1	-3.26603E1	-3.26314E1	2.69049E1	1.20055E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.15892E-1	-7.98559E-1	-9.13153E0	-9.14195E0	5.126E-3	9.36031E-2	2.7259E1	-3.26664E1	-3.26448E1	2.67242E1	1.19913E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16011E-1	-7.98512E-1	-9.13136E0	-9.14187E0	4.86374E-3	9.38654E-2	2.73238E1	-3.26516E1	-3.26254E1	2.68001E1	1.19841E-7	2.52025E-3	2.52025E-3	6.33388E-3	3.00348E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16083E-1	-7.9844E-1	-9.13138E0	-9.14176E0	4.81606E-3	9.37939E-2	2.72727E1	-3.26685E1	-3.26278E1	2.67752E1	1.20154E-7	2.51611E-3	2.51611E-3	6.3245E-3	3.01337E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16274E-1	-7.98345E-1	-9.13124E0	-9.14178E0	4.93526E-3	9.37223E-2	2.72973E1	-3.26651E1	-3.26434E1	2.68106E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16202E-1	-7.98321E-1	-9.13134E0	-9.14199E0	5.14984E-3	9.377E-2	2.72877E1	-3.2644E1	-3.26362E1	2.67695E1	1.20311E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16655E-1	-7.98345E-1	-9.1315E0	-9.14192E0	4.98295E-3	9.35316E-2	2.73147E1	-3.26705E1	-3.26452E1	2.67885E1	1.19978E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16488E-1	-7.98535E-1	-9.13155E0	-9.14187E0	4.88758E-3	9.38416E-2	2.73123E1	-3.26855E1	-3.26014E1	2.68028E1	1.20158E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.01223E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.16679E-1	-7.9844E-1	-9.1316E0	-9.14171E0	4.79221E-3	9.34839E-2	2.72898E1	-3.26301E1	-3.26461E1	2.6801E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02659E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.16655E-1	-7.98273E-1	-9.13155E0	-9.14166E0	4.52995E-3	9.35555E-2	2.72805E1	-3.27137E1	-3.26705E1	2.68016E1	1.20278E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16727E-1	-7.98273E-1	-9.13119E0	-9.14178E0	4.55379E-3	9.35316E-2	2.73021E1	-3.26494E1	-3.2638E1	2.68358E1	1.20106E-7	2.51525E-3	2.51525E-3	6.28056E-3	2.9943E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.16536E-1	-7.98392E-1	-9.1315E0	-9.1419E0	4.81606E-3	9.39369E-2	2.73129E1	-3.26536E1	-3.26506E1	2.68298E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.98554E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.16226E-1	-7.98392E-1	-9.131E0	-9.14199E0	4.79221E-3	9.3627E-2	2.73399E1	-3.26675E1	-3.26296E1	2.67415E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.16321E-1	-7.98535E-1	-9.13153E0	-9.14202E0	4.76837E-3	9.3627E-2	2.73145E1	-3.26531E1	-3.26242E1	2.68841E1	1.19601E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16274E-1	-7.98416E-1	-9.13143E0	-9.14176E0	4.72069E-3	9.34124E-2	2.72903E1	-3.26818E1	-3.26112E1	2.68204E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.98665E-1