[Scan]
initial_time=2016-01-28T20:02:46
final_time=2016-01-28T20:03:06
ip_count=19
run=1026
dataset=6
scan=465
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09642E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16464E-1
ql1_imon=1.3713E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.04064E-9
ql3_vset=
ql3_vmon=-9.13181E0
ql3_imon=3.50857E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-9.36627E-11
mult1=-9.84875E-9
mult2=-2.8763E-9
rf_tmon=-5.15531E-3
rf_agc=3.26967E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.6978E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65075E0
bslens_imon=2.34839E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20147E1
lens5a_imon=1.97803E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04847E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5383E1
cs_ef1b_imon=3.10116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02169E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.21295E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38725E0
lens1_imon=2.53204E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64533E1
os_ef1alow_imon=2.97054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03831E1
cs_ea2_imon=1.40762E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84132E1
cs_ef1a_imon=2.99637E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.26028E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11229E1
os_restr1_imon=4.2898E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15165E1
os_ea1_imon=2.4063E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63872E1
os_ef1bup_imon=3.0832E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25822E0
cs_ionrep_imon=9.52538E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93317E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01622E1
cs_anode1_imon=2.04126E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.23983E-8
tplens_vset=1.4E-1
tplens_vmon=1.61695E0
tplens_imon=-3.2186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25912E1
iondef3_imon=1.50128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26615E1
iondef2_imon=1.57658E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98309E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.98898E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27781E0
ionrepsh_imon=9.37846E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33768E1
lens5b_imon=2.16829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74682E1
cs_ef2b_imon=3.12998E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51104E0
os_ea2_imon=-6.41408E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00413E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18724E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04832E0
os_ef2alow_imon=-2.74647E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00751E-1
os_ef2bup_imon=-5.46733E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10861E1
os_restr2_imon=3.38522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.32022E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01865E1
cs_anode2_imon=2.09291E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.1046E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69025E1
iondef4_imon=1.08204E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.23592E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.68488E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14012E0
cs_ionaccel_imon=-1.1671E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56424E1
einzel_imon=7.62422E-6
window_vset=0.0E0
window_vmon=1.68319E-1
window_imon=-1.17833E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86506E1
mask2_imon=-8.19045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.42811E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.45477E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=6.16093E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.39164E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.09076E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30652E1
cs_fil1_imon=9.26739E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2396E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63781E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93719E-2
os_fil2_imon=-2.78726E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.78493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.02057E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35568E-1
cs_fil2_imon=-2.62508E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12998E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21972E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9714E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83087E-1
res40_imon=-2.72402E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.17037E-1	-7.98464E-1	-9.13112E0	-9.14152E0	5.05447E-3	9.38177E-2	2.73086E1	-3.26567E1	-3.2649E1	2.66987E1	1.20114E-7	2.51593E-3	2.51593E-3	6.31283E-3	3.01155E-1
2.0E0	2.4E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16774E-1	-7.98297E-1	-9.1315E0	-9.14187E0	5.29289E-3	9.36508E-2	2.72978E1	-3.26254E1	-3.26523E1	2.68232E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.16989E-1	-7.98488E-1	-9.13153E0	-9.14145E0	5.17368E-3	9.36985E-2	2.73305E1	-3.26661E1	-3.26366E1	2.69408E1	1.20371E-7	2.51838E-3	2.51838E-3	6.34164E-3	3.00794E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16536E-1	-7.98631E-1	-9.13141E0	-9.14178E0	5.17368E-3	9.36747E-2	2.73145E1	-3.26455E1	-3.26378E1	2.66785E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16417E-1	-7.98488E-1	-9.13138E0	-9.14204E0	4.8399E-3	9.377E-2	2.73099E1	-3.26206E1	-3.26627E1	2.68334E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.1625E-1	-7.98655E-1	-9.1315E0	-9.14187E0	4.91142E-3	9.36508E-2	2.72626E1	-3.26997E1	-3.26231E1	2.68366E1	1.2033E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09634E0	-8.16083E-1	-7.98631E-1	-9.13153E0	-9.14164E0	5.126E-3	9.38177E-2	2.72907E1	-3.2647E1	-3.26158E1	2.68382E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09611E0	-8.16345E-1	-7.98297E-1	-9.13143E0	-9.14223E0	4.88758E-3	9.3627E-2	2.73004E1	-3.26756E1	-3.26207E1	2.66749E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.16488E-1	-7.98345E-1	-9.13162E0	-9.14183E0	4.79221E-3	9.39131E-2	2.72984E1	-3.26731E1	-3.25801E1	2.68142E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16798E-1	-7.98154E-1	-9.13191E0	-9.1418E0	4.64916E-3	9.39369E-2	2.72829E1	-3.26518E1	-3.26458E1	2.68346E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.98819E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16846E-1	-7.98202E-1	-9.13167E0	-9.1419E0	4.69685E-3	9.39846E-2	2.7275E1	-3.25776E1	-3.26089E1	2.68569E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.1656E-1	-7.97987E-1	-9.13153E0	-9.14202E0	4.79221E-3	9.39131E-2	2.73303E1	-3.26795E1	-3.26392E1	2.6652E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16417E-1	-7.98345E-1	-9.13136E0	-9.14209E0	4.69685E-3	9.36985E-2	2.72727E1	-3.26759E1	-3.26008E1	2.68683E1	1.19902E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.1656E-1	-7.98178E-1	-9.13141E0	-9.14202E0	5.00679E-3	9.36985E-2	2.72907E1	-3.26518E1	-3.26086E1	2.67878E1	1.19925E-7	2.51025E-3	2.51025E-3	6.30182E-3	3.00942E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.16321E-1	-7.98059E-1	-9.13134E0	-9.14216E0	5.05447E-3	9.38892E-2	2.73315E1	-3.26891E1	-3.26182E1	2.68707E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16226E-1	-7.98273E-1	-9.13157E0	-9.14178E0	4.93526E-3	9.37223E-2	2.73128E1	-3.26585E1	-3.26331E1	2.67538E1	1.20383E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.00302E-1
2.0E1	1.0E1	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16441E-1	-7.9844E-1	-9.13172E0	-9.14171E0	4.93526E-3	9.38654E-2	2.72396E1	-3.26903E1	-3.26116E1	2.67734E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16488E-1	-7.98321E-1	-9.13138E0	-9.1419E0	4.673E-3	9.377E-2	2.72909E1	-3.26767E1	-3.26413E1	2.68016E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01347E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16488E-1	-7.98678E-1	-9.13155E0	-9.14195E0	4.79221E-3	9.38654E-2	2.72925E1	-3.26699E1	-3.26368E1	2.68268E1	1.19749E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09642E0	-8.16464E-1	-7.98559E-1	-9.13181E0	-9.14192E0	4.62532E-3	9.34601E-2	2.73357E1	-3.26615E1	-3.25912E1	2.69025E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9714E-1