[Scan]
initial_time=2016-01-28T20:04:59
final_time=2016-01-28T20:05:19
ip_count=19
run=1026
dataset=6
scan=470
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09541E0
qbias_imon=-1.08798E-4
ql1_vset=
ql1_vmon=-8.16083E-1
ql1_imon=1.37673E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.95905E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=3.5702E-10
ql4_vset=
ql4_vmon=-9.14152E0
ql4_imon=-9.17315E-11
mult1=-9.2511E-9
mult2=-2.71346E-9
rf_tmon=-4.45638E-3
rf_agc=3.36984E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.70234E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68416E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04555E1
cs_ea1_imon=1.24874E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41041E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03612E1
cs_ea2_imon=1.42358E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.01153E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.256E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.28229E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.41891E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24068E0
cs_ionrep_imon=9.72242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.05468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.22244E-8
tplens_vset=1.4E-1
tplens_vmon=1.62401E0
tplens_imon=-1.33518E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.96339E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3248E0
ionrepsh_imon=9.43763E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.18567E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51947E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70957E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.39175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.1109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72968E1
iondef1_imon=1.09229E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67445E1
iondef4_imon=1.07656E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.30099E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.72818E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11452E0
cs_ionaccel_imon=-9.00411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56333E1
einzel_imon=7.62297E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.48375E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.00211E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.4018E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07648E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6323E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30614E1
cs_fil1_imon=9.2395E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2692E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63218E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.94473E-2
os_fil2_imon=-2.75006E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.65689E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21959E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82718E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16488E-1	-7.98488E-1	-9.1316E0	-9.14166E0	4.79221E-3	9.38892E-2	2.73134E1	-3.26384E1	-3.26467E1	2.68719E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.02133E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.1656E-1	-7.98559E-1	-9.13136E0	-9.1418E0	4.74453E-3	9.36508E-2	2.72653E1	-3.26811E1	-3.25991E1	2.68394E1	1.19861E-7	2.52209E-3	2.52209E-3	6.3514E-3	3.03449E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16631E-1	-7.98488E-1	-9.13126E0	-9.14185E0	4.72069E-3	9.40561E-2	2.72783E1	-3.26585E1	-3.2638E1	2.68708E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.03712E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16679E-1	-7.98607E-1	-9.13131E0	-9.14161E0	4.64916E-3	9.377E-2	2.72925E1	-3.26651E1	-3.26591E1	2.68913E1	1.20028E-7	2.51783E-3	2.51783E-3	6.323E-3	3.02479E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16464E-1	-7.98392E-1	-9.13138E0	-9.14226E0	5.07832E-3	9.37939E-2	2.73195E1	-3.26398E1	-3.26338E1	2.66938E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16417E-1	-7.98392E-1	-9.1315E0	-9.14183E0	4.98295E-3	9.40084E-2	2.7349E1	-3.26723E1	-3.26242E1	2.67271E1	1.20191E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16441E-1	-7.98297E-1	-9.13177E0	-9.14178E0	5.05447E-3	9.39846E-2	2.73141E1	-3.2653E1	-3.26206E1	2.68731E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.16536E-1	-7.98202E-1	-9.13122E0	-9.14202E0	5.00679E-3	9.38177E-2	2.73104E1	-3.26602E1	-3.26166E1	2.68977E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09526E0	-8.16393E-1	-7.98035E-1	-9.13129E0	-9.14195E0	5.00679E-3	9.36985E-2	2.73818E1	-3.26508E1	-3.26219E1	2.66712E1	1.20158E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.16321E-1	-7.98154E-1	-9.13155E0	-9.14161E0	5.22137E-3	9.3627E-2	2.72553E1	-3.26758E1	-3.26614E1	2.68522E1	1.20004E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.98156E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16321E-1	-7.98368E-1	-9.13131E0	-9.14159E0	5.05447E-3	9.34839E-2	2.72508E1	-3.26154E1	-3.26101E1	2.67016E1	1.20092E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01356E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.1625E-1	-7.98106E-1	-9.13107E0	-9.14159E0	5.29289E-3	9.35316E-2	2.73092E1	-3.2685E1	-3.26331E1	2.6801E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16536E-1	-7.98583E-1	-9.13119E0	-9.14149E0	5.29289E-3	9.36508E-2	2.72856E1	-3.2652E1	-3.2649E1	2.67862E1	1.1979E-7	2.51919E-3	2.51919E-3	6.29157E-3	3.01104E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.1625E-1	-7.9844E-1	-9.13117E0	-9.14137E0	5.10216E-3	9.36508E-2	2.73131E1	-3.26634E1	-3.26554E1	2.68119E1	1.20004E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.9943E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16274E-1	-7.98559E-1	-9.13153E0	-9.14192E0	4.98295E-3	9.36031E-2	2.72823E1	-3.26651E1	-3.26476E1	2.68259E1	1.19925E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.98026E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.16226E-1	-7.98345E-1	-9.13129E0	-9.14154E0	5.24521E-3	9.35793E-2	2.72803E1	-3.26549E1	-3.26826E1	2.70098E1	1.20122E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01347E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.16298E-1	-7.98798E-1	-9.13131E0	-9.14133E0	4.88758E-3	9.34601E-2	2.73265E1	-3.26615E1	-3.25874E1	2.70003E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.1625E-1	-7.98869E-1	-9.13146E0	-9.14156E0	5.05447E-3	9.35078E-2	2.72915E1	-3.26042E1	-3.26514E1	2.70028E1	1.19872E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.02277E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16059E-1	-7.98726E-1	-9.13119E0	-9.14161E0	5.126E-3	9.36031E-2	2.72839E1	-3.2659E1	-3.26042E1	2.68869E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09541E0	-8.16083E-1	-7.98678E-1	-9.13146E0	-9.14152E0	4.95911E-3	9.35793E-2	2.72968E1	-3.26549E1	-3.26567E1	2.67445E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9841E-1