[Scan]
initial_time=2016-01-28T20:05:53
final_time=2016-01-28T20:06:12
ip_count=19
run=1026
dataset=6
scan=472
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08793E-4
ql1_vset=
ql1_vmon=-8.15892E-1
ql1_imon=1.36344E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.95303E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.19242E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-9.50336E-11
mult1=-9.28657E-9
mult2=-2.73698E-9
rf_tmon=-5.48281E-3
rf_agc=3.22886E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.66985E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64999E0
bslens_imon=2.48559E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1991E1
lens5a_imon=1.99255E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05127E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53094E1
cs_ef1b_imon=3.09209E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02339E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05173E1
cs_ea1_imon=1.24365E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42154E0
lens1_imon=2.59246E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6479E1
os_ef1alow_imon=2.95858E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03837E1
cs_ea2_imon=1.42153E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84336E1
cs_ef1a_imon=3.01813E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.25822E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.27067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15376E1
os_ea1_imon=2.42731E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63849E1
os_ef1bup_imon=3.11544E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24828E0
cs_ionrep_imon=9.80279E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.9339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.02482E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.23765E-8
tplens_vset=1.4E-1
tplens_vmon=1.6567E0
tplens_imon=-2.81745E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26343E1
iondef3_imon=1.50321E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.57611E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98273E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=3.97769E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2909E0
ionrepsh_imon=9.60813E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.16432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74644E1
cs_ef2b_imon=3.09637E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49002E0
os_ea2_imon=-7.70323E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70875E1
cs_ef2a_imon=3.2073E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.12397E0
os_ef2alow_imon=-2.59947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9591E-1
os_ef2bup_imon=-5.507E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10844E1
os_restr2_imon=3.36805E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23119E2
cs_ionfoca_imon=6.28936E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0162E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.06807E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66688E1
iondef4_imon=1.07277E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.26403E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.62371E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10614E0
cs_ionaccel_imon=-9.25783E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02051E2
cs_ionfocb_imon=1.47043E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5634E1
einzel_imon=7.68395E-6
window_vset=0.0E0
window_vmon=1.95166E-1
window_imon=-9.3746E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39076E-4
mask2_vset=0.0E0
mask2_vmon=-1.8587E1
mask2_imon=-8.36261E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92535E3
multa_neg_imon=8.31416E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.64613E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.51259E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34725E0
defgridb_imon=6.11556E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.43419E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06758E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63217E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.305E1
cs_fil1_imon=9.2591E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29781E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63784E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.93487E-2
os_fil2_imon=-2.65227E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1547E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75894E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.60038E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.7006E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21792E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.80145E-1
res40_imon=-2.36982E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16202E-1	-7.98464E-1	-9.13138E0	-9.14195E0	4.64916E-3	9.38177E-2	2.72803E1	-3.26419E1	-3.26644E1	2.66924E1	1.1995E-7	2.51527E-3	2.51527E-3	6.31321E-3	3.00087E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1625E-1	-7.9844E-1	-9.13126E0	-9.14197E0	4.86374E-3	9.35793E-2	2.72931E1	-3.26735E1	-3.26338E1	2.68214E1	1.19809E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.16441E-1	-7.9844E-1	-9.13141E0	-9.14185E0	4.62532E-3	9.36985E-2	2.72921E1	-3.26756E1	-3.2626E1	2.68052E1	1.20055E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99686E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.16464E-1	-7.98678E-1	-9.13117E0	-9.14183E0	4.62532E-3	9.33409E-2	2.72997E1	-3.26693E1	-3.26344E1	2.66472E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.16584E-1	-7.98273E-1	-9.13136E0	-9.14197E0	4.8399E-3	9.36031E-2	2.73045E1	-3.26431E1	-3.26419E1	2.68435E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0968E0	-8.16321E-1	-7.98249E-1	-9.13141E0	-9.14197E0	4.86374E-3	9.35793E-2	2.73181E1	-3.26579E1	-3.26006E1	2.67373E1	1.19697E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.16131E-1	-7.98321E-1	-9.13126E0	-9.14185E0	4.8399E-3	9.33409E-2	2.73099E1	-3.2647E1	-3.26164E1	2.68719E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09665E0	-8.1625E-1	-7.98464E-1	-9.13131E0	-9.14178E0	4.86374E-3	9.34124E-2	2.72687E1	-3.26761E1	-3.26545E1	2.6798E1	1.20062E-7	2.51214E-3	2.51214E-3	6.36468E-3	2.99861E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.16226E-1	-7.98655E-1	-9.13136E0	-9.14195E0	4.8399E-3	9.35793E-2	2.72752E1	-3.26406E1	-3.26171E1	2.68718E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.16321E-1	-7.98321E-1	-9.13136E0	-9.14176E0	4.72069E-3	9.33886E-2	2.73134E1	-3.26649E1	-3.26526E1	2.67399E1	1.19925E-7	2.51248E-3	2.51248E-3	6.32978E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09619E0	-8.1656E-1	-7.98321E-1	-9.13146E0	-9.14187E0	4.93526E-3	9.35793E-2	2.72318E1	-3.26146E1	-3.26909E1	2.68472E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.98156E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16083E-1	-7.98345E-1	-9.1315E0	-9.14168E0	4.72069E-3	9.35555E-2	2.72856E1	-3.2659E1	-3.26443E1	2.67451E1	1.19907E-7	2.51918E-3	2.51918E-3	6.31555E-3	2.98831E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09696E0	-8.16011E-1	-7.98416E-1	-9.13134E0	-9.14159E0	4.72069E-3	9.36031E-2	2.73159E1	-3.26747E1	-3.26158E1	2.678E1					
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09665E0	-8.16131E-1	-7.98154E-1	-9.13157E0	-9.1418E0	4.64916E-3	9.34839E-2	2.73411E1	-3.26723E1	-3.2632E1	2.6843E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09696E0	-8.16321E-1	-7.98678E-1	-9.13141E0	-9.14187E0	4.52995E-3	9.35555E-2	2.72721E1	-3.26812E1	-3.25987E1	2.66341E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00824E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16107E-1	-7.98345E-1	-9.1315E0	-9.14207E0	4.91142E-3	9.33409E-2	2.73193E1	-3.26619E1	-3.26528E1	2.69061E1	1.19732E-7	2.51886E-3	2.51886E-3	6.3126E-3	3.01237E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16202E-1	-7.98154E-1	-9.13126E0	-9.14197E0	4.52995E-3	9.35555E-2	2.72972E1	-3.2677E1	-3.26525E1	2.70393E1	1.19979E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.0223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.16298E-1	-7.98249E-1	-9.13103E0	-9.14202E0	4.81606E-3	9.33886E-2	2.73204E1	-3.26478E1	-3.26083E1	2.67067E1	1.1992E-7	2.51107E-3	2.51107E-3	6.3074E-3	3.006E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16035E-1	-7.98464E-1	-9.13141E0	-9.14187E0	4.98295E-3	9.32693E-2	2.72757E1	-3.26452E1	-3.26615E1	2.67503E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.15892E-1	-7.98583E-1	-9.13141E0	-9.14168E0	5.00679E-3	9.34839E-2	2.73257E1	-3.26844E1	-3.26343E1	2.66688E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00563E-1