[Scan]
initial_time=2016-01-28T20:07:13
final_time=2016-01-28T20:07:32
ip_count=19
run=1026
dataset=6
scan=475
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09611E0
qbias_imon=-1.08809E-4
ql1_vset=
ql1_vmon=-8.16059E-1
ql1_imon=1.36634E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.00847E-9
ql3_vset=
ql3_vmon=-9.13169E0
ql3_imon=3.53837E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-8.62479E-11
mult1=-9.60364E-9
mult2=-2.71811E-9
rf_tmon=-4.52401E-3
rf_agc=3.25961E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.69313E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.64951E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54349E1
cs_ef1b_imon=3.12145E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04629E2
lens23_imon=1.02215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=1.24622E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41221E0
lens1_imon=2.48368E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.92936E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8404E1
cs_ef1a_imon=2.99459E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.24886E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=4.32121E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=2.43441E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6426E1
os_ef1bup_imon=3.06739E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91836E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01166E1
cs_anode1_imon=2.02477E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.22782E-8
tplens_vset=1.4E-1
tplens_vmon=1.60058E0
tplens_imon=-2.92136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26306E1
iondef3_imon=1.48667E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.5804E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.97598E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28875E0
ionrepsh_imon=9.40158E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33381E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74844E1
cs_ef2b_imon=3.14704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50024E0
os_ea2_imon=-8.14854E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71498E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03474E0
os_ef2alow_imon=-3.01234E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.41873E-1
os_ef2bup_imon=-5.51709E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.38166E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.07991E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72924E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67039E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.23351E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.65906E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-1.48065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0202E2
cs_ionfocb_imon=1.47287E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56543E1
einzel_imon=8.0122E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82559E2
mask1_imon=2.38817E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-2.30074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.0836E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.00068E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33265E1
os_fil1_imon=9.43627E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07125E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63302E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30624E1
cs_fil1_imon=9.23277E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26739E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64054E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.06081E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.67681E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.7729E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-2.25151E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14222E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21989E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.17866E-1
res40_imon=-3.01594E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16202E-1	-7.98464E-1	-9.13126E0	-9.14171E0	4.93526E-3	9.36031E-2	2.73242E1	-3.26683E1	-3.26341E1	2.68447E1	1.198E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.01738E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16298E-1	-7.98488E-1	-9.13126E0	-9.1419E0	4.8399E-3	9.35555E-2	2.72932E1	-3.26647E1	-3.26603E1	2.67352E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9943E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16226E-1	-7.98726E-1	-9.13136E0	-9.14199E0	5.24521E-3	9.35078E-2	2.73089E1	-3.26425E1	-3.26205E1	2.66516E1	1.19883E-7	2.52407E-3	2.52407E-3	6.33592E-3	2.9917E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16011E-1	-7.98583E-1	-9.13146E0	-9.14204E0	4.95911E-3	9.377E-2	2.72982E1	-3.26797E1	-3.26092E1	2.66654E1	1.20003E-7	2.51423E-3	2.51423E-3	6.31744E-3	3.00532E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.15916E-1	-7.98416E-1	-9.13138E0	-9.14218E0	4.98295E-3	9.35078E-2	2.72751E1	-3.26719E1	-3.26591E1	2.6837E1	1.19829E-7	2.52066E-3	2.52066E-3	6.33021E-3	3.00251E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.16202E-1	-7.98535E-1	-9.13141E0	-9.14197E0	5.07832E-3	9.37223E-2	2.72991E1	-3.26482E1	-3.25972E1	2.69169E1	1.19819E-7	2.5147E-3	2.5147E-3	6.30182E-3	3.0041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16441E-1	-7.98297E-1	-9.13148E0	-9.14183E0	5.19753E-3	9.36031E-2	2.73135E1	-3.26488E1	-3.25942E1	2.67367E1	1.19953E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16083E-1	-7.98154E-1	-9.13138E0	-9.14192E0	5.24521E-3	9.37223E-2	2.72865E1	-3.27131E1	-3.26272E1	2.67758E1	1.20191E-7	2.51248E-3	2.51248E-3	6.31858E-3	2.9829E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09402E0	-8.1594E-1	-7.98082E-1	-9.13134E0	-9.14187E0	5.07832E-3	9.36985E-2	2.72859E1	-3.26152E1	-3.26314E1	2.6649E1	1.20174E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.15845E-1	-7.98273E-1	-9.13126E0	-9.14166E0	5.22137E-3	9.36508E-2	2.72985E1	-3.26669E1	-3.2644E1	2.68773E1	1.19809E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.1594E-1	-7.98297E-1	-9.13138E0	-9.14178E0	4.91142E-3	9.3627E-2	2.73635E1	-3.2711E1	-3.25688E1	2.68046E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02253E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.15773E-1	-7.98416E-1	-9.13155E0	-9.1418E0	4.86374E-3	9.35316E-2	2.73033E1	-3.26879E1	-3.26651E1	2.68142E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.15821E-1	-7.98583E-1	-9.13165E0	-9.14204E0	4.86374E-3	9.37223E-2	2.73321E1	-3.26831E1	-3.26536E1	2.66724E1	1.19861E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16107E-1	-7.98416E-1	-9.13157E0	-9.14211E0	4.76837E-3	9.36985E-2	2.73003E1	-3.26591E1	-3.26633E1	2.69409E1	1.19965E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.98222E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.15964E-1	-7.98345E-1	-9.13181E0	-9.14197E0	5.03063E-3	9.35078E-2	2.73281E1	-3.26319E1	-3.26006E1	2.68713E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09611E0	-8.16107E-1	-7.98178E-1	-9.13155E0	-9.14187E0	4.69685E-3	9.37223E-2	2.73345E1	-3.26597E1	-3.26352E1	2.68155E1	1.19953E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16202E-1	-7.98202E-1	-9.13181E0	-9.14226E0	4.69685E-3	9.35316E-2	2.73069E1	-3.26626E1	-3.26213E1	2.67911E1	1.20084E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.15892E-1	-7.98225E-1	-9.13129E0	-9.14211E0	4.55379E-3	9.33647E-2	2.73387E1	-3.27065E1	-3.2632E1	2.68947E1	1.198E-7	2.51739E-3	2.51739E-3	6.29128E-3	2.99686E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.16107E-1	-7.98535E-1	-9.1315E0	-9.14207E0	4.62532E-3	9.33409E-2	2.72184E1	-3.26006E1	-3.26602E1	2.69163E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.97445E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09611E0	-8.16059E-1	-7.98273E-1	-9.13169E0	-9.14187E0	4.673E-3	9.38177E-2	2.72924E1	-3.26446E1	-3.26306E1	2.67039E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.9943E-1