[Scan]
initial_time=2016-01-28T20:09:26
final_time=2016-01-28T20:09:45
ip_count=19
run=1026
dataset=6
scan=480
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08755E-4
ql1_vset=
ql1_vmon=-8.1625E-1
ql1_imon=1.3668E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=2.01707E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=3.32224E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-9.74774E-11
mult1=-9.40325E-9
mult2=-2.75254E-9
rf_tmon=-3.88156E-3
rf_agc=3.27568E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.68455E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64808E0
bslens_imon=2.47414E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20267E1
lens5a_imon=1.98072E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53685E1
cs_ef1b_imon=3.07324E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02144E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.23564E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41327E0
lens1_imon=2.40925E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64383E1
os_ef1alow_imon=2.95877E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03646E1
cs_ea2_imon=1.42305E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84518E1
cs_ef1a_imon=3.04539E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.25276E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11728E1
os_restr1_imon=4.30313E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15363E1
os_ea1_imon=2.40517E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63015E1
os_ef1bup_imon=3.04081E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23683E0
cs_ionrep_imon=9.83333E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0158E1
cs_anode1_imon=2.06049E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.23209E-8
tplens_vset=1.4E-1
tplens_vmon=1.62426E0
tplens_imon=-2.58843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2617E1
iondef3_imon=1.50206E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.57001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98445E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.95373E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27118E0
ionrepsh_imon=9.24169E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3341E1
lens5b_imon=2.17806E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75353E1
cs_ef2b_imon=3.16368E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50275E0
os_ea2_imon=-7.13067E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00672E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71048E1
cs_ef2a_imon=3.15758E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02435E0
os_ef2alow_imon=-2.6E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.48303E-1
os_ef2bup_imon=-5.24446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11327E1
os_restr2_imon=3.43271E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23006E2
cs_ionfoca_imon=6.2844E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02203E1
cs_anode2_imon=2.1246E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72793E1
iondef1_imon=1.09174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68629E1
iondef4_imon=1.05345E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.28499E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.66713E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03665E0
cs_ionaccel_imon=-1.06217E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02161E2
cs_ionfocb_imon=1.47669E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5678E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=2.27907E-1
window_imon=-1.61548E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.39428E-4
mask2_vset=0.0E0
mask2_vmon=-1.8712E1
mask2_imon=-3.98188E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=8.16148E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.38657E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.20341E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45552E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33246E1
os_fil1_imon=9.42089E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07857E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63368E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30518E1
cs_fil1_imon=9.24173E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32728E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63342E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97584E-2
os_fil2_imon=-2.63523E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84853E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.77123E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3164E-1
cs_fil2_imon=-2.29179E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.16653E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22017E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.93862E-2
res40_imon=-2.35196E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16369E-1	-7.98655E-1	-9.13122E0	-9.14164E0	4.81606E-3	9.34601E-2	2.72786E1	-3.2682E1	-3.26154E1	2.68613E1	1.19829E-7	2.52066E-3	2.52066E-3	6.3074E-3	3.01065E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.16417E-1	-7.98368E-1	-9.13115E0	-9.14204E0	4.72069E-3	9.35078E-2	2.73259E1	-3.26866E1	-3.25923E1	2.68456E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16298E-1	-7.98345E-1	-9.13122E0	-9.14173E0	4.95911E-3	9.38892E-2	2.72831E1	-3.26509E1	-3.2655E1	2.68047E1	1.19991E-7	2.51725E-3	2.51725E-3	6.3131E-3	2.99981E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.16107E-1	-7.98607E-1	-9.13148E0	-9.14173E0	5.05447E-3	9.377E-2	2.72955E1	-3.26771E1	-3.26188E1	2.68058E1	1.19841E-7	2.52025E-3	2.52025E-3	6.3445E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.16083E-1	-7.98345E-1	-9.13162E0	-9.14185E0	5.126E-3	9.33647E-2	2.72985E1	-3.26717E1	-3.26128E1	2.68128E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00824E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.09572E0	-8.15916E-1	-7.98774E-1	-9.13162E0	-9.14195E0	5.05447E-3	9.35793E-2	2.73045E1	-3.26458E1	-3.2632E1	2.6757E1	1.19902E-7	2.51417E-3	2.51417E-3	6.33977E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16011E-1	-7.9875E-1	-9.13136E0	-9.14159E0	5.14984E-3	9.37939E-2	2.73027E1	-3.26639E1	-3.26476E1	2.67728E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.15988E-1	-7.98321E-1	-9.13131E0	-9.14185E0	5.48363E-3	9.34601E-2	2.72959E1	-3.26915E1	-3.26376E1	2.68064E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16035E-1	-7.98559E-1	-9.13143E0	-9.14195E0	5.36442E-3	9.3627E-2	2.72534E1	-3.26488E1	-3.26392E1	2.6795E1	1.19913E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16202E-1	-7.9844E-1	-9.13143E0	-9.14209E0	5.22137E-3	9.36747E-2	2.73281E1	-3.26638E1	-3.26201E1	2.68256E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16274E-1	-7.98249E-1	-9.13148E0	-9.14195E0	4.673E-3	9.38177E-2	2.72943E1	-3.2611E1	-3.26765E1	2.67968E1	1.2026E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.16107E-1	-7.98297E-1	-9.13134E0	-9.14223E0	4.60148E-3	9.36985E-2	2.73153E1	-3.2675E1	-3.26049E1	2.67555E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02133E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.16131E-1	-7.9844E-1	-9.13141E0	-9.14202E0	4.50611E-3	9.35078E-2	2.73325E1	-3.26756E1	-3.27113E1	2.68951E1	1.20177E-7	2.51472E-3	2.51472E-3	6.3282E-3	2.98768E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16321E-1	-7.98512E-1	-9.1315E0	-9.14176E0	4.43459E-3	9.33647E-2	2.73279E1	-3.26729E1	-3.26675E1	2.67974E1	1.19907E-7	2.51793E-3	2.51793E-3	6.31925E-3	3.02459E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16321E-1	-7.98464E-1	-9.13138E0	-9.1418E0	4.52995E-3	9.35555E-2	2.73141E1	-3.26807E1	-3.2629E1	2.67986E1	1.19601E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09379E0	-8.16298E-1	-7.98202E-1	-9.13136E0	-9.14192E0	4.88758E-3	9.34601E-2	2.72862E1	-3.26602E1	-3.26266E1	2.68343E1	1.19851E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00966E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16178E-1	-7.98178E-1	-9.13131E0	-9.14211E0	4.74453E-3	9.35078E-2	2.73123E1	-3.26591E1	-3.2641E1	2.6852E1	1.19913E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.16417E-1	-7.98178E-1	-9.13119E0	-9.14221E0	4.52995E-3	9.377E-2	2.72703E1	-3.26555E1	-3.26437E1	2.67415E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16417E-1	-7.98202E-1	-9.13141E0	-9.14202E0	4.62532E-3	9.377E-2	2.73664E1	-3.27812E1	-3.25529E1	2.68007E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29645E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.1625E-1	-7.98297E-1	-9.1315E0	-9.14187E0	4.69685E-3	9.38177E-2	2.72793E1	-3.26663E1	-3.2617E1	2.68629E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1