[Scan]
initial_time=2016-01-28T20:09:53
final_time=2016-01-28T20:10:12
ip_count=19
run=1026
dataset=6
scan=481
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.3659E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.9942E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.21913E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-7.62463E-11
mult1=-9.58386E-9
mult2=-2.76053E-9
rf_tmon=-4.94502E-3
rf_agc=3.38263E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.69899E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.61346E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20109E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53406E1
cs_ef1b_imon=3.12109E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0515E1
cs_ea1_imon=1.23757E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37917E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65167E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84142E1
cs_ef1a_imon=2.96901E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.25952E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10691E1
os_restr1_imon=4.27833E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.3962E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64026E1
os_ef1bup_imon=3.11677E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26772E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.23538E-8
tplens_vset=1.4E-1
tplens_vmon=1.65826E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.59554E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.94509E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=9.44845E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74105E1
cs_ef2b_imon=3.0919E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49303E0
os_ea2_imon=-7.03101E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.0054E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71011E1
cs_ef2a_imon=3.22921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.13685E0
os_ef2alow_imon=-2.69519E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49371E-1
os_ef2bup_imon=-5.53872E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.103E1
os_restr2_imon=3.36436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01293E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67613E1
iondef4_imon=1.11729E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.26678E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.66434E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19862E0
cs_ionaccel_imon=-7.49045E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02038E2
cs_ionfocb_imon=1.46877E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5566E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.35653E-1
window_imon=-7.02193E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.38879E-4
mask2_vset=0.0E0
mask2_vmon=-1.85851E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.4513E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.62216E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=7.36839E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44668E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.41657E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06566E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63051E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30582E1
cs_fil1_imon=9.26088E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35028E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6419E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.5999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.21741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.68911E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.88221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.95291E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22033E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-7.08877E-1
res40_imon=-2.71681E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	1.0E0	1.47E2	4.1E1	-2.09627E0	-8.16488E-1	-7.98297E-1	-9.13148E0	-9.14192E0	4.93526E-3	9.34601E-2	2.73564E1	-3.26567E1	-3.26296E1	2.66808E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.16369E-1	-7.98082E-1	-9.13126E0	-9.1419E0	4.95911E-3	9.34601E-2	2.73112E1	-3.26768E1	-3.25868E1	2.69735E1	1.19891E-7	2.51709E-3	2.51709E-3	6.33388E-3	3.02875E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.16274E-1	-7.98345E-1	-9.13119E0	-9.1419E0	4.79221E-3	9.35316E-2	2.73671E1	-3.26689E1	-3.26457E1	2.67862E1	1.19991E-7	2.51952E-3	2.51952E-3	6.31879E-3	2.99981E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.16369E-1	-7.98273E-1	-9.13124E0	-9.14185E0	4.81606E-3	9.35555E-2	2.72672E1	-3.26903E1	-3.26326E1	2.67659E1	1.19991E-7	2.52236E-3	2.52236E-3	6.31269E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16536E-1	-7.98297E-1	-9.13131E0	-9.14171E0	5.05447E-3	9.33409E-2	2.7301E1	-3.2672E1	-3.26331E1	2.67698E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16631E-1	-7.98345E-1	-9.13148E0	-9.14183E0	5.126E-3	9.33886E-2	2.7251E1	-3.265E1	-3.2632E1	2.68827E1	1.19595E-7	2.50989E-3	2.50989E-3	6.33436E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16584E-1	-7.98249E-1	-9.13117E0	-9.14185E0	5.22137E-3	9.35793E-2	2.73057E1	-3.26561E1	-3.26092E1	2.6768E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16512E-1	-7.98249E-1	-9.13174E0	-9.14176E0	5.05447E-3	9.34839E-2	2.73E1	-3.26756E1	-3.26165E1	2.68338E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16321E-1	-7.98655E-1	-9.13153E0	-9.14159E0	4.72069E-3	9.33409E-2	2.73092E1	-3.26443E1	-3.26559E1	2.67595E1	1.19944E-7	2.52055E-3	2.52055E-3	6.32716E-3	3.01138E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16107E-1	-7.98416E-1	-9.13179E0	-9.1414E0	4.88758E-3	9.33886E-2	2.7388E1	-3.2635E1	-3.25737E1	2.69752E1	1.19958E-7	2.52084E-3	2.52084E-3	6.32151E-3	3.00376E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16464E-1	-7.98559E-1	-9.13169E0	-9.14183E0	4.81606E-3	9.34362E-2	2.72727E1	-3.2606E1	-3.26543E1	2.68274E1	1.19585E-7	2.51575E-3	2.51575E-3	6.27633E-3	2.99014E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.1625E-1	-7.98488E-1	-9.13148E0	-9.14159E0	5.14984E-3	9.36508E-2	2.72997E1	-3.26873E1	-3.259E1	2.6783E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.03027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16298E-1	-7.98607E-1	-9.13177E0	-9.14168E0	4.95911E-3	9.35078E-2	2.73081E1	-3.26302E1	-3.26561E1	2.68196E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.02277E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16226E-1	-7.98559E-1	-9.13191E0	-9.14192E0	4.74453E-3	9.36985E-2	2.72456E1	-3.26669E1	-3.26729E1	2.66364E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01347E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16369E-1	-7.98225E-1	-9.13146E0	-9.1418E0	4.81606E-3	9.36985E-2	2.73204E1	-3.26756E1	-3.25806E1	2.68448E1	1.19697E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16226E-1	-7.98392E-1	-9.13141E0	-9.14173E0	4.33922E-3	9.36031E-2	2.73063E1	-3.26927E1	-3.26189E1	2.68881E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01609E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.1625E-1	-7.98368E-1	-9.13124E0	-9.14168E0	4.76837E-3	9.31263E-2	2.73186E1	-3.26909E1	-3.26174E1	2.67633E1	1.19941E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99845E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16107E-1	-7.98011E-1	-9.13148E0	-9.14183E0	4.86374E-3	9.34601E-2	2.73216E1	-3.26567E1	-3.26644E1	2.67943E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.98554E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16298E-1	-7.98631E-1	-9.13136E0	-9.14197E0	4.88758E-3	9.35793E-2	2.73853E1	-3.27369E1	-3.26148E1	2.68226E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.16107E-1	-7.98583E-1	-9.13148E0	-9.14178E0	4.86374E-3	9.35078E-2	2.73081E1	-3.26717E1	-3.26284E1	2.67613E1	1.19809E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00302E-1