[Scan]
initial_time=2016-01-28T20:10:46
final_time=2016-01-28T20:11:06
ip_count=19
run=1026
dataset=6
scan=483
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08852E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.3708E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=1.96952E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=3.03471E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.0705E-10
mult1=-9.30352E-9
mult2=-2.73209E-9
rf_tmon=-3.43196E-3
rf_agc=3.35181E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.69252E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67683E0
bslens_imon=2.52354E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19705E1
lens5a_imon=1.97071E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05242E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53909E1
cs_ef1b_imon=3.12556E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04616E2
lens23_imon=1.02196E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04997E1
cs_ea1_imon=1.23542E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42354E0
lens1_imon=2.49295E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6472E1
os_ef1alow_imon=2.97849E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0382E1
cs_ea2_imon=1.40284E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84005E1
cs_ef1a_imon=2.97126E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.25263E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11174E1
os_restr1_imon=4.30437E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15429E1
os_ea1_imon=2.41817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64214E1
os_ef1bup_imon=3.09915E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24376E0
cs_ionrep_imon=9.71233E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93548E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.02015E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.23917E-8
tplens_vset=1.4E-1
tplens_vmon=1.63865E0
tplens_imon=-3.88131E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26156E1
iondef3_imon=1.49795E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26829E1
iondef2_imon=1.59111E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.98045E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28083E0
ionrepsh_imon=9.28962E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33698E1
lens5b_imon=2.18707E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74251E1
cs_ef2b_imon=3.11583E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.54781E0
os_ea2_imon=-7.07942E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00645E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71577E1
cs_ef2a_imon=3.20535E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.11294E0
os_ef2alow_imon=-2.63505E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8136E-1
os_ef2bup_imon=-5.64045E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.36577E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23017E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01588E1
cs_anode2_imon=2.05657E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73192E1
iondef1_imon=1.09526E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.10213E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.24712E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.67676E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13663E0
cs_ionaccel_imon=-1.04478E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02031E2
cs_ionfocb_imon=1.47015E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55933E1
einzel_imon=7.88245E-6
window_vset=0.0E0
window_vmon=1.20842E-1
window_imon=-1.03366E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82581E2
mask1_imon=2.38959E-4
mask2_vset=0.0E0
mask2_vmon=-1.86214E1
mask2_imon=-6.30526E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.60714E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.54481E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.21502E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=6.18329E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.42624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06819E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63158E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30561E1
cs_fil1_imon=9.24937E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29957E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63655E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.98637E-2
os_fil2_imon=-2.73753E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03515E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.74457E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34146E-1
cs_fil2_imon=-2.12589E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.16493E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21856E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35601E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-6.06644E-1
res40_imon=-2.85191E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16226E-1	-7.98321E-1	-9.13143E0	-9.14166E0	5.24521E-3	9.36747E-2	2.73208E1	-3.26639E1	-3.26228E1	2.66066E1	1.1977E-7	2.51624E-3	2.51624E-3	6.3074E-3	3.01811E-1
2.0E0	3.2E1	1.0E0	3.16E2	1.6E2	-2.09627E0	-8.16321E-1	-7.98464E-1	-9.13143E0	-9.14192E0	4.93526E-3	9.377E-2	2.72952E1	-3.26619E1	-3.26014E1	2.67947E1	1.20003E-7	2.51423E-3	2.51423E-3	6.33253E-3	3.02209E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.16488E-1	-7.98392E-1	-9.13153E0	-9.14187E0	4.88758E-3	9.36985E-2	2.72418E1	-3.26492E1	-3.26538E1	2.68981E1	1.19962E-7	2.52051E-3	2.52051E-3	6.31357E-3	3.00432E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16488E-1	-7.98345E-1	-9.13131E0	-9.14173E0	4.98295E-3	9.33409E-2	2.72768E1	-3.26602E1	-3.26396E1	2.67968E1	1.19423E-7	2.51709E-3	2.51709E-3	6.34982E-3	2.97926E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16345E-1	-7.98535E-1	-9.13172E0	-9.14154E0	5.10216E-3	9.36985E-2	2.73099E1	-3.26567E1	-3.26248E1	2.68154E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09696E0	-8.16345E-1	-7.98464E-1	-9.1316E0	-9.14159E0	5.14984E-3	9.36985E-2	2.72953E1	-3.26689E1	-3.26278E1	2.68028E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09657E0	-8.16083E-1	-7.98416E-1	-9.13162E0	-9.14192E0	5.07832E-3	9.34601E-2	2.7278E1	-3.26685E1	-3.26484E1	2.68022E1	1.19872E-7	2.51025E-3	2.51025E-3	6.32978E-3	3.01742E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09673E0	-8.16202E-1	-7.98249E-1	-9.13146E0	-9.14228E0	4.88758E-3	9.33409E-2	2.72715E1	-3.26789E1	-3.25954E1	2.68004E1	1.19851E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16202E-1	-7.98631E-1	-9.13157E0	-9.14202E0	4.79221E-3	9.32932E-2	2.72883E1	-3.26633E1	-3.26266E1	2.67806E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16131E-1	-7.98416E-1	-9.1315E0	-9.1423E0	4.79221E-3	9.35793E-2	2.7242E1	-3.26356E1	-3.26753E1	2.67511E1	1.19872E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00676E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.16011E-1	-7.98535E-1	-9.13153E0	-9.1423E0	4.8399E-3	9.35078E-2	2.73446E1	-3.27045E1	-3.26325E1	2.67752E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.15964E-1	-7.98154E-1	-9.13186E0	-9.14209E0	4.72069E-3	9.40323E-2	2.73412E1	-3.26995E1	-3.2585E1	2.68587E1	1.19851E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.0071E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09418E0	-8.16226E-1	-7.98535E-1	-9.13155E0	-9.14218E0	4.91142E-3	9.36031E-2	2.72939E1	-3.26531E1	-3.26089E1	2.67704E1	1.19978E-7	2.51804E-3	2.51804E-3	6.33538E-3	3.0041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0948E0	-8.15797E-1	-7.98631E-1	-9.132E0	-9.14209E0	4.8399E-3	9.377E-2	2.72985E1	-3.26957E1	-3.2653E1	2.68028E1	1.19851E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.99175E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16083E-1	-7.98655E-1	-9.13165E0	-9.14204E0	4.86374E-3	9.35555E-2	2.72901E1	-3.26434E1	-3.26338E1	2.68665E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.16202E-1	-7.98655E-1	-9.13169E0	-9.14202E0	4.72069E-3	9.33409E-2	2.73145E1	-3.26927E1	-3.25753E1	2.68454E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16035E-1	-7.98345E-1	-9.13181E0	-9.14218E0	4.86374E-3	9.32932E-2	2.73233E1	-3.26789E1	-3.26311E1	2.67746E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16274E-1	-7.98607E-1	-9.13153E0	-9.14214E0	4.95911E-3	9.31501E-2	2.72873E1	-3.26693E1	-3.26521E1	2.68393E1	1.19831E-7	2.51679E-3	2.51679E-3	6.31779E-3	3.00989E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16321E-1	-7.9844E-1	-9.13143E0	-9.14164E0	4.91142E-3	9.32455E-2	2.71869E1	-3.26225E1	-3.27755E1	2.6737E1	1.20005E-7	2.52338E-3	2.52338E-3	6.31321E-3	3.02581E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.16417E-1	-7.98368E-1	-9.13103E0	-9.14176E0	5.07832E-3	9.34124E-2	2.73192E1	-3.26829E1	-3.26156E1	2.68142E1	1.19902E-7	2.51203E-3	2.51203E-3	6.35601E-3	2.9892E-1