[Scan]
initial_time=2016-01-28T20:33:31
final_time=2016-01-28T20:33:50
ip_count=19
run=1026
dataset=7
scan=485
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.79146E-6
ql1_vset=
ql1_vmon=-8.79979E1
ql1_imon=-1.69158E-9
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.46818E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-5.37616E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.64675E-8
mult1=-9.98405E-9
mult2=-2.58411E-9
rf_tmon=-3.94317E-3
rf_agc=3.39049E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=6.45959E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62256E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19854E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12504E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53372E1
cs_ef1b_imon=3.17991E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02167E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05637E1
cs_ea1_imon=1.08432E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03301E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65008E1
os_ef1alow_imon=2.98183E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.38729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83189E1
cs_ef1a_imon=3.03465E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.23421E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11407E1
os_restr1_imon=4.30034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15064E1
os_ea1_imon=2.4346E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63485E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.9348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=1.96253E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.96555E-8
tplens_vset=1.4E-1
tplens_vmon=1.65087E0
tplens_imon=-3.73215E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26201E1
iondef3_imon=1.49595E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.55223E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02881E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=9.31525E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25859E0
ionrepsh_imon=8.46823E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33516E1
lens5b_imon=2.16667E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74484E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51991E0
os_ea2_imon=-8.54574E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.0074E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71449E1
cs_ef2a_imon=3.19555E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05224E0
os_ef2alow_imon=-2.5155E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.21577E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.38912E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.09737E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.07972E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.09998E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.22206E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.61422E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12377E0
cs_ionaccel_imon=-9.27312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47299E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.66351E-6
window_vset=0.0E0
window_vmon=2.28112E-1
window_imon=-9.30788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39126E-4
mask2_vset=0.0E0
mask2_vmon=-1.86535E1
mask2_imon=-5.10282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.63293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.42953E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=7.4418E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32288E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.41887E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07329E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62446E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=7.46697E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0502E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66127E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.54716E-2
os_fil2_imon=-2.36221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15562E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28469E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22196E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33706E-3
inlet_lpb_pmon=3.00325E-1
chamber_ion_pmon=1.2003E-7
chamber_cvt_pmon=2.519E-3
foreline_cvt_pmon=2.519E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.01692E-1
res40_imon=-2.23748E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79976E1	2.14577E-4	-8.80013E1	4.52995E-4	4.79221E-3	9.35555E-2	2.72546E1	-3.26567E1	-3.26332E1	2.6795E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.79977E1	1.66893E-4	-8.80012E1	6.67572E-4	4.36306E-3	9.37223E-2	2.72889E1	-3.26783E1	-3.26086E1	2.67734E1	1.19925E-7	2.52139E-3	2.52139E-3	6.32418E-3	3.0201E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.79977E1	-4.76837E-5	-8.80009E1	5.48363E-4	4.673E-3	9.35793E-2	2.73069E1	-3.26638E1	-3.26472E1	2.67848E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.03545E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.79978E1	-3.33786E-4	-8.80012E1	5.24521E-4	4.673E-3	9.34601E-2	2.72877E1	-3.26741E1	-3.26374E1	2.68148E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.79982E1	-1.90735E-4	-8.80012E1	4.05312E-4	4.88758E-3	9.38654E-2	2.72957E1	-3.26649E1	-3.2606E1	2.67891E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79979E1	-1.90735E-4	-8.8001E1	1.90735E-4	4.64916E-3	9.36747E-2	2.72745E1	-3.26561E1	-3.26386E1	2.68274E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.79979E1	-3.33786E-4	-8.80013E1	4.05312E-4	4.41074E-3	9.34124E-2	2.72967E1	-3.26428E1	-3.26416E1	2.68412E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.79978E1	-2.86102E-4	-8.80009E1	5.00679E-4	4.41074E-3	9.38892E-2	2.72799E1	-3.26861E1	-3.26236E1	2.67926E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.7998E1	-6.67572E-4	-8.80011E1	3.57628E-4	4.50611E-3	9.36985E-2	2.73213E1	-3.26567E1	-3.26026E1	2.68112E1	1.20226E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79979E1	-2.6226E-4	-8.80014E1	7.62939E-4	4.48227E-3	9.36985E-2	2.73316E1	-3.2695E1	-3.25959E1	2.68058E1	1.20383E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.79981E1	-1.66893E-4	-8.80012E1	6.91414E-4	4.57764E-3	9.39369E-2	2.72953E1	-3.26591E1	-3.26505E1	2.68184E1	1.2026E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.99175E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.79979E1	0.0E0	-8.80012E1	5.48363E-4	4.79221E-3	9.39608E-2	2.72817E1	-3.26597E1	-3.25683E1	2.67932E1	1.20084E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.79983E1	-1.19209E-4	-8.80013E1	5.00679E-4	4.60148E-3	9.38416E-2	2.73023E1	-3.26495E1	-3.26266E1	2.6797E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.79981E1	-1.90735E-4	-8.80013E1	3.57628E-4	4.33922E-3	9.40561E-2	2.72478E1	-3.26655E1	-3.26184E1	2.68179E1	1.20113E-7	2.52568E-3	2.52568E-3	6.32273E-3	3.00149E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.79983E1	-4.05312E-4	-8.80013E1	7.62939E-4	4.95911E-3	9.36747E-2	2.73261E1	-3.26837E1	-3.2602E1	2.67884E1	1.20038E-7	2.51652E-3	2.51652E-3	6.32434E-3	2.99661E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79985E1	-3.57628E-4	-8.80011E1	3.57628E-4	4.64916E-3	9.38177E-2	2.73012E1	-3.26316E1	-3.26103E1	2.68009E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.79982E1	-7.15256E-5	-8.80008E1	3.57628E-4	4.74453E-3	9.38177E-2	2.73076E1	-3.26184E1	-3.26476E1	2.67733E1	1.1987E-7	2.5165E-3	2.5165E-3	6.33809E-3	3.00635E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.7998E1	-2.38419E-4	-8.80011E1	5.48363E-4	4.79221E-3	9.34839E-2	2.72945E1	-3.26632E1	-3.26514E1	2.68208E1	1.20337E-7	2.52106E-3	2.52106E-3	6.31902E-3	3.03976E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.7998E1	-5.72205E-4	-8.80012E1	4.29153E-4	4.74453E-3	9.33409E-2	2.73045E1	-3.26526E1	-3.26461E1	2.67966E1	1.19749E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.79979E1	-5.72205E-4	-8.8001E1	2.6226E-4	4.88758E-3	9.34601E-2	2.72845E1	-3.26697E1	-3.26201E1	2.68111E1	1.2003E-7	2.519E-3	2.519E-3	6.33706E-3	3.00325E-1