[Scan]
initial_time=2016-01-28T20:34:24
final_time=2016-01-28T20:34:44
ip_count=19
run=1026
dataset=7
scan=487
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.8103E-6
ql1_vset=
ql1_vmon=-8.79989E1
ql1_imon=-1.17555E-9
ql2_vset=
ql2_vmon=7.15256E-5
ql2_imon=1.35952E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-3.72026E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.63235E-8
mult1=-9.70427E-9
mult2=-2.74855E-9
rf_tmon=-5.85227E-3
rf_agc=3.26787E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=6.0302E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19604E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.1683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05216E1
cs_ea1_imon=1.08364E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05097E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04195E1
cs_ea2_imon=1.40484E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.03063E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.23068E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15089E1
os_ea1_imon=2.43838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26051E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.95233E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.95274E-8
tplens_vset=1.4E-1
tplens_vmon=1.63963E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98375E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.94189E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26411E0
ionrepsh_imon=8.5436E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33784E1
lens5b_imon=2.17449E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47561E0
os_ea2_imon=-4.79594E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06072E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.13041E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.39031E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23032E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.17708E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.58781E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13495E0
cs_ionaccel_imon=-9.90511E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-8.64372E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39282E-4
mask2_vset=0.0E0
mask2_vmon=-1.86446E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92698E3
multa_neg_imon=7.93076E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.4513E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.25085E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.44054E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07624E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6265E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=6.95662E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66175E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.44973E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27147E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.01265E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.23232E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22199E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28056E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.61404E-1
res40_imon=-2.37804E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.79986E1	-1.66893E-4	-8.80009E1	2.38419E-5	4.62532E-3	9.35078E-2	2.73104E1	-3.26974E1	-3.26691E1	2.68058E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.27053E-2	-8.79987E1	-4.76837E-5	-8.80013E1	1.19209E-4	4.43459E-3	9.36031E-2	2.73063E1	-3.26651E1	-3.25665E1	2.68118E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.79988E1	2.86102E-4	-8.8001E1	-2.6226E-4	4.79221E-3	9.35793E-2	2.72837E1	-3.26851E1	-3.26052E1	2.68151E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.79987E1	-7.15256E-5	-8.80009E1	7.15256E-5	4.76837E-3	9.34601E-2	2.73075E1	-3.26627E1	-3.26027E1	2.68166E1	1.20158E-7	2.52492E-3	2.52492E-3	6.28592E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79988E1	-1.43051E-4	-8.80006E1	2.6226E-4	4.52995E-3	9.36508E-2	2.73128E1	-3.2636E1	-3.26349E1	2.67984E1	1.19705E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.79988E1	-1.19209E-4	-8.80007E1	3.8147E-4	4.26769E-3	9.35555E-2	2.73057E1	-3.26579E1	-3.26089E1	2.68274E1	1.19902E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.7999E1	-2.14577E-4	-8.80005E1	4.76837E-4	4.33922E-3	9.37223E-2	2.73009E1	-3.26428E1	-3.26032E1	2.67842E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.7999E1	-4.05312E-4	-8.80005E1	3.57628E-4	4.673E-3	9.3627E-2	2.72791E1	-3.26531E1	-3.25947E1	2.68136E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.79989E1	-5.24521E-4	-8.80007E1	1.90735E-4	4.3869E-3	9.35078E-2	2.73196E1	-3.26411E1	-3.26389E1	2.67953E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.79989E1	-2.38419E-4	-8.80011E1	3.33786E-4	4.36306E-3	9.38177E-2	2.73401E1	-3.26779E1	-3.2613E1	2.68063E1	1.19967E-7	2.51549E-3	2.51549E-3	6.29211E-3	3.01365E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.79988E1	-2.14577E-4	-8.8001E1	1.19209E-4	4.57764E-3	9.34601E-2	2.73216E1	-3.26756E1	-3.26315E1	2.67902E1	1.19794E-7	2.51439E-3	2.51439E-3	6.26611E-3	3.00479E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.79987E1	1.66893E-4	-8.8001E1	4.29153E-4	4.31538E-3	9.36747E-2	2.73257E1	-3.26832E1	-3.25812E1	2.68034E1	1.20084E-7	2.51693E-3	2.51693E-3	6.33538E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.79987E1	-4.76837E-5	-8.80009E1	2.14577E-4	4.48227E-3	9.35078E-2	2.72781E1	-3.26729E1	-3.26356E1	2.68148E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.79988E1	3.33786E-4	-8.80011E1	7.15256E-5	4.52995E-3	9.34601E-2	2.72957E1	-3.26537E1	-3.26207E1	2.67787E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.79989E1	-1.43051E-4	-8.80007E1	1.43051E-4	4.60148E-3	9.33886E-2	2.73393E1	-3.26527E1	-3.26411E1	2.67873E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.79988E1	-2.14577E-4	-8.80005E1	2.14577E-4	4.48227E-3	9.31978E-2	2.7302E1	-3.26204E1	-3.26716E1	2.68182E1	1.19991E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.00852E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.79991E1	-5.00679E-4	-8.80006E1	3.57628E-4	4.3869E-3	9.35793E-2	2.72642E1	-3.26717E1	-3.27011E1	2.6777E1	1.19883E-7	2.51611E-3	2.51611E-3	6.29035E-3	3.00522E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.79989E1	-4.76837E-5	-8.80008E1	1.43051E-4	4.55379E-3	9.34124E-2	2.73204E1	-3.26909E1	-3.25546E1	2.68538E1	1.2033E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.79988E1	9.53674E-5	-8.80006E1	-1.43051E-4	4.62532E-3	9.34601E-2	2.72853E1	-3.26627E1	-3.26308E1	2.67806E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29098E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79989E1	7.15256E-5	-8.80007E1	-9.53674E-5	4.36306E-3	9.35555E-2	2.72967E1	-3.26927E1	-3.26693E1	2.67986E1	1.19953E-7	2.52384E-3	2.52384E-3	6.28056E-3	2.99175E-1