[Scan]
initial_time=2016-01-28T20:34:51
final_time=2016-01-28T20:35:10
ip_count=19
run=1026
dataset=7
scan=488
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.86795E-6
ql1_vset=
ql1_vmon=-8.79991E1
ql1_imon=-1.12113E-9
ql2_vset=
ql2_vmon=-7.15256E-5
ql2_imon=1.45938E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-3.44168E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.62975E-8
mult1=-1.00534E-8
mult2=-2.69266E-9
rf_tmon=-4.09786E-3
rf_agc=3.37361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.67436E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.59989E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19618E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53737E1
cs_ef1b_imon=3.16845E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04929E1
cs_ea1_imon=1.10024E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08787E0
lens1_imon=1.40711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64655E1
os_ef1alow_imon=2.98287E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.38411E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84939E1
cs_ef1a_imon=3.03917E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.23114E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11031E1
os_restr1_imon=4.29651E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=2.43389E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63884E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.45218E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=1.97087E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.95199E-8
tplens_vset=1.4E-1
tplens_vmon=1.66975E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25978E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26873E1
iondef2_imon=1.5724E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02888E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=9.10652E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28218E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33504E1
lens5b_imon=2.18401E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74797E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50929E0
os_ea2_imon=-4.36924E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00602E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71014E1
cs_ef2a_imon=3.19486E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08352E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87963E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=3.39677E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01943E1
cs_anode2_imon=2.09598E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73201E1
iondef1_imon=1.07901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68232E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19105E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.54854E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=2.31587E-1
window_imon=-8.78659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.86321E1
mask2_imon=-5.97163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92606E3
multa_neg_imon=7.14095E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.35685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33764E0
defgridb_imon=6.05435E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33256E1
os_fil1_imon=9.45861E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07995E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63032E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31775E1
cs_fil1_imon=7.20053E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0114E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08612E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.60256E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-1.9278E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22092E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.20092E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32766E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.33239E-2	-8.7999E1	-7.15256E-5	-8.80008E1	3.09944E-4	4.72069E-3	9.36985E-2	2.72786E1	-3.26903E1	-3.26661E1	2.68028E1	1.20192E-7	2.52236E-3	2.52236E-3	6.3445E-3	2.99594E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.79989E1	-7.15256E-5	-8.80006E1	5.72205E-4	4.76837E-3	9.38177E-2	2.73504E1	-3.2664E1	-3.26076E1	2.68388E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.79991E1	-2.14577E-4	-8.80008E1	3.09944E-4	4.33922E-3	9.3627E-2	2.73051E1	-3.26644E1	-3.26172E1	2.6785E1	1.20137E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.7999E1	-1.43051E-4	-8.8001E1	4.29153E-4	4.673E-3	9.36747E-2	2.72696E1	-3.26579E1	-3.26182E1	2.68004E1	1.20517E-7	2.52599E-3	2.52599E-3	6.33436E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79991E1	-1.66893E-4	-8.8001E1	6.19888E-4	4.36306E-3	9.39369E-2	2.73057E1	-3.26615E1	-3.26494E1	2.67674E1	1.20278E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.7999E1	-4.76837E-5	-8.80009E1	4.05312E-4	4.45843E-3	9.36031E-2	2.73063E1	-3.2636E1	-3.26242E1	2.68292E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.79987E1	-4.52995E-4	-8.80009E1	5.72205E-4	4.41074E-3	9.36031E-2	2.73087E1	-3.26434E1	-3.25906E1	2.6795E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79988E1	-1.90735E-4	-8.80008E1	5.72205E-4	4.55379E-3	9.38654E-2	2.72618E1	-3.26681E1	-3.26338E1	2.68064E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.79988E1	-3.57628E-4	-8.80007E1	4.29153E-4	4.57764E-3	9.39369E-2	2.72805E1	-3.26554E1	-3.25942E1	2.67848E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.79994E1	-4.52995E-4	-8.80008E1	2.86102E-4	4.3869E-3	9.3627E-2	2.73305E1	-3.26561E1	-3.2629E1	2.6796E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.79995E1	-4.05312E-4	-8.80008E1	2.86102E-4	4.52995E-3	9.37462E-2	2.73123E1	-3.26843E1	-3.26212E1	2.68154E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.79991E1	-7.15256E-5	-8.80011E1	5.00679E-4	4.50611E-3	9.36747E-2	2.73086E1	-3.26585E1	-3.26254E1	2.68123E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98222E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.7999E1	-3.57628E-4	-8.80009E1	3.57628E-4	4.43459E-3	9.35793E-2	2.72856E1	-3.2675E1	-3.26231E1	2.67834E1	1.20311E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.79989E1	-1.90735E-4	-8.80009E1	3.8147E-4	4.64916E-3	9.39846E-2	2.72883E1	-3.26573E1	-3.26891E1	2.67836E1	1.20004E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.79989E1	-2.86102E-4	-8.80011E1	2.14577E-4	4.24385E-3	9.36985E-2	2.7266E1	-3.26236E1	-3.25785E1	2.68184E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.40192E-2	-8.7999E1	-5.24521E-4	-8.80008E1	1.19209E-4	4.76837E-3	9.37223E-2	2.73027E1	-3.26248E1	-3.26284E1	2.6804E1	1.20174E-7	2.52428E-3	2.52428E-3	6.28552E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.79993E1	-3.57628E-4	-8.80007E1	2.38419E-4	4.52995E-3	9.39131E-2	2.72901E1	-3.26801E1	-3.26308E1	2.68352E1	1.19861E-7	2.52318E-3	2.52318E-3	6.34037E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.7999E1	-2.86102E-4	-8.80006E1	1.90735E-4	4.3869E-3	9.40323E-2	2.72957E1	-3.26626E1	-3.26077E1	2.6834E1	1.19809E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.79991E1	-2.14577E-4	-8.80008E1	1.90735E-4	4.74453E-3	9.38416E-2	2.73109E1	-3.26556E1	-3.26845E1	2.67966E1	1.20106E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.79991E1	-7.15256E-5	-8.8001E1	9.53674E-5	4.72069E-3	9.38177E-2	2.73201E1	-3.26873E1	-3.25978E1	2.68232E1	1.20092E-7	2.52025E-3	2.52025E-3	6.31269E-3	2.99845E-1