[Scan]
initial_time=2016-01-28T20:35:17
final_time=2016-01-28T20:35:37
ip_count=19
run=1026
dataset=7
scan=489
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.8643E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-1.06395E-9
ql2_vset=
ql2_vmon=2.38419E-4
ql2_imon=1.43175E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.1619E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.62472E-8
mult1=-9.56114E-9
mult2=-2.81751E-9
rf_tmon=-3.68907E-3
rf_agc=3.36161E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.80847E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64026E0
bslens_imon=2.55034E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19807E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53864E1
cs_ef1b_imon=3.17679E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02195E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05041E1
cs_ea1_imon=1.0829E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07253E0
lens1_imon=1.64779E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97731E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.40676E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03743E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.22548E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11106E1
os_restr1_imon=4.30034E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.42929E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63693E1
os_ef1bup_imon=3.08713E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.53005E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02029E1
cs_anode1_imon=1.95906E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.94988E-8
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26358E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.57488E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.79014E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29752E0
ionrepsh_imon=8.40098E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33858E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74634E1
cs_ef2b_imon=3.13196E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50281E0
os_ea2_imon=-9.21823E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71142E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08815E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03023E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10666E1
os_restr2_imon=3.39781E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.08903E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72978E1
iondef1_imon=1.07759E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67714E1
iondef4_imon=1.09476E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.10973E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.5777E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11334E0
cs_ionaccel_imon=-9.13411E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47254E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56278E1
einzel_imon=7.69827E-6
window_vset=0.0E0
window_vmon=1.99151E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-5.79787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.10744E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.44888E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.58863E0
defgridb_imon=6.38706E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.45803E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62418E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31806E1
cs_fil1_imon=7.28741E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.17563E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65908E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67379E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.16699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29777E-1
cs_fil2_imon=-2.44909E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46637E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22278E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2987E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=190
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40967E-2	-8.79994E1	-4.76837E-5	-8.80005E1	2.38419E-4	4.8399E-3	9.34839E-2	2.72769E1	-3.26849E1	-3.2653E1	2.67944E1	1.19902E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.79997E1	2.38419E-5	-8.80007E1	2.38419E-4	4.74453E-3	9.36031E-2	2.72895E1	-3.26464E1	-3.26476E1	2.67876E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.49466E-2	-8.79995E1	2.38419E-5	-8.80007E1	3.57628E-4	4.45843E-3	9.31978E-2	2.7324E1	-3.26602E1	-3.26508E1	2.67984E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9952E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.79994E1	9.53674E-5	-8.80006E1	2.38419E-4	4.72069E-3	9.33886E-2	2.73069E1	-3.26416E1	-3.26807E1	2.68328E1	1.19851E-7	2.51525E-3	2.51525E-3	6.30202E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.79994E1	-3.8147E-4	-8.80005E1	4.29153E-4	4.74453E-3	9.32217E-2	2.73074E1	-3.26828E1	-3.25895E1	2.68343E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.79994E1	-7.15256E-5	-8.80007E1	1.19209E-4	4.76837E-3	9.32932E-2	2.72808E1	-3.2641E1	-3.25954E1	2.6787E1	1.20127E-7	2.52717E-3	2.52717E-3	6.34385E-3	2.99506E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.79996E1	4.76837E-5	-8.80006E1	-9.53674E-5	4.48227E-3	9.32455E-2	2.72805E1	-3.26476E1	-3.26248E1	2.68058E1	1.19883E-7	2.51611E-3	2.51611E-3	6.3131E-3	3.02972E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79997E1	2.14577E-4	-8.80008E1	9.53674E-5	4.55379E-3	9.36747E-2	2.73129E1	-3.26446E1	-3.26476E1	2.68196E1	1.20031E-7	2.51248E-3	2.51248E-3	6.3074E-3	3.01475E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.47923E-2	-8.79996E1	-9.53674E-5	-8.80008E1	1.43051E-4	4.72069E-3	9.34362E-2	2.73123E1	-3.26482E1	-3.26494E1	2.68202E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01995E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.79993E1	-1.66893E-4	-8.80006E1	1.66893E-4	4.76837E-3	9.37223E-2	2.72992E1	-3.26756E1	-3.25959E1	2.68294E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02659E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.79995E1	-4.76837E-5	-8.8001E1	-2.38419E-5	4.50611E-3	9.36508E-2	2.72962E1	-3.2685E1	-3.26425E1	2.67811E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.03185E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.79993E1	-9.53674E-5	-8.80007E1	2.38419E-4	4.673E-3	9.377E-2	2.72815E1	-3.26655E1	-3.26408E1	2.67902E1	1.2026E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01223E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.79997E1	0.0E0	-8.80008E1	-1.90735E-4	4.3869E-3	9.35316E-2	2.72727E1	-3.26999E1	-3.26086E1	2.68124E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01995E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.79994E1	4.05312E-4	-8.80007E1	2.14577E-4	4.52995E-3	9.36031E-2	2.73153E1	-3.26554E1	-3.26176E1	2.67974E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79994E1	-2.14577E-4	-8.8001E1	3.57628E-4	4.41074E-3	9.34124E-2	2.73124E1	-3.26658E1	-3.2615E1	2.67613E1	1.20278E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.79993E1	-2.6226E-4	-8.80009E1	2.14577E-4	4.55379E-3	9.38177E-2	2.73303E1	-3.26543E1	-3.26464E1	2.68316E1	1.19861E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.02922E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.79993E1	-2.38419E-5	-8.80007E1	4.52995E-4	4.76837E-3	9.40323E-2	2.72892E1	-3.26797E1	-3.26248E1	2.67856E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.79993E1	-2.14577E-4	-8.80005E1	3.8147E-4	4.72069E-3	9.36508E-2	2.73399E1	-3.26679E1	-3.26396E1	2.68046E1	1.20158E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.97901E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79996E1	9.53674E-5	-8.80011E1	3.8147E-4	4.41074E-3	9.35555E-2	2.73207E1	-3.26237E1	-3.25999E1	2.6807E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.79995E1	2.38419E-4	-8.80013E1	4.29153E-4	4.74453E-3	9.38177E-2	2.72978E1	-3.26499E1	-3.26358E1	2.67714E1	1.19749E-7	2.51417E-3	2.51417E-3	6.35059E-3	3.00197E-1