[Scan]
initial_time=2016-01-28T20:35:44
final_time=2016-01-28T20:36:03
ip_count=19
run=1026
dataset=7
scan=490
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.77621E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-9.61375E-10
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.45258E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.95641E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.61609E-8
mult1=-9.78196E-9
mult2=-2.7626E-9
rf_tmon=-4.2094E-3
rf_agc=3.3763E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.33922E-3
ql5_imon=5.47099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61647E0
bslens_imon=2.4145E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19988E1
lens5a_imon=1.98574E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05122E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=3.16903E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02139E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04706E1
cs_ea1_imon=1.07448E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08675E0
lens1_imon=1.53299E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64386E1
os_ef1alow_imon=2.99351E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.39697E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85067E1
cs_ef1a_imon=3.02847E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.22821E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.31509E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15538E1
os_ea1_imon=2.42393E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6387E1
os_ef1bup_imon=3.08001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22333E0
cs_ionrep_imon=9.43355E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93582E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=1.97323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.93811E-8
tplens_vset=1.4E-1
tplens_vmon=1.61756E0
tplens_imon=-1.52903E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.49136E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26376E1
iondef2_imon=1.57731E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98401E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.1439E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27965E0
ionrepsh_imon=8.47123E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33499E1
lens5b_imon=2.18923E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46574E0
os_ea2_imon=-7.14868E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00516E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70981E1
cs_ef2a_imon=3.20795E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0936E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89615E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.40148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.08807E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6816E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.14969E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.5781E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-7.23817E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47086E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.89327E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3943E-4
mask2_vset=0.0E0
mask2_vmon=-1.8665E1
mask2_imon=-7.92292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.59707E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.43641E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.02408E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48629E0
defgridb_imon=6.03973E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33248E1
os_fil1_imon=9.45063E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07888E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62873E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31832E1
cs_fil1_imon=8.03181E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.05893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65665E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.41026E-2
os_fil2_imon=-2.46775E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.87874E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29393E-1
cs_fil2_imon=-2.67798E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59272E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.50882E-3
foreline_cvt_pmon=2.50882E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2116E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	1.0E0	1.47E2	4.1E1	-7.24736E-2	-8.79992E1	-1.43051E-4	-8.80011E1	-4.76837E-5	4.86374E-3	9.37223E-2	2.73611E1	-3.26514E1	-3.26402E1	2.67848E1	1.20122E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.12368E-2	-8.79996E1	-5.72205E-4	-8.80008E1	-9.53674E-5	5.22137E-3	9.36985E-2	2.72837E1	-3.26579E1	-3.26718E1	2.68128E1	1.19749E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.79995E1	-3.33786E-4	-8.80008E1	3.57628E-4	5.17368E-3	9.34839E-2	2.73279E1	-3.26633E1	-3.26573E1	2.6819E1	1.19841E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01609E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.79993E1	-3.33786E-4	-8.80009E1	2.14577E-4	4.52995E-3	9.34362E-2	2.7288E1	-3.26646E1	-3.26156E1	2.67866E1	1.20084E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.0041E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.79996E1	-3.09944E-4	-8.80008E1	2.14577E-4	4.74453E-3	9.36747E-2	2.73075E1	-3.2649E1	-3.26266E1	2.67866E1	1.20226E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.79997E1	-1.90735E-4	-8.80008E1	1.19209E-4	4.95911E-3	9.377E-2	2.72986E1	-3.26467E1	-3.26596E1	2.6798E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.8E1	-9.53674E-5	-8.80005E1	1.90735E-4	4.79221E-3	9.37462E-2	2.73027E1	-3.26362E1	-3.26134E1	2.6768E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.79996E1	-2.86102E-4	-8.80007E1	3.33786E-4	4.8399E-3	9.37462E-2	2.72883E1	-3.26633E1	-3.26128E1	2.68346E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02396E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.79997E1	-4.76837E-4	-8.80008E1	7.15256E-5	4.76837E-3	9.36031E-2	2.72739E1	-3.26314E1	-3.26182E1	2.67908E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.79996E1	-2.14577E-4	-8.80009E1	2.14577E-4	5.05447E-3	9.38892E-2	2.73183E1	-3.26747E1	-3.2635E1	2.68112E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79994E1	-2.38419E-5	-8.80009E1	3.09944E-4	4.93526E-3	9.37939E-2	2.73646E1	-3.26795E1	-3.26056E1	2.6803E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.79993E1	2.14577E-4	-8.80011E1	4.05312E-4	4.3869E-3	9.35793E-2	2.73141E1	-3.26867E1	-3.2626E1	2.67945E1	1.2026E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.79996E1	-4.76837E-5	-8.80011E1	3.57628E-4	4.22001E-3	9.34839E-2	2.72974E1	-3.26897E1	-3.26101E1	2.68262E1	1.19925E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.00676E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79994E1	-2.6226E-4	-8.80007E1	1.19209E-4	4.62532E-3	9.36508E-2	2.73063E1	-3.26529E1	-3.26193E1	2.68069E1	1.20158E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.79995E1	-1.43051E-4	-8.80009E1	4.76837E-5	4.26769E-3	9.377E-2	2.72095E1	-3.25717E1	-3.26844E1	2.67769E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00676E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.79996E1	-1.66893E-4	-8.80008E1	1.19209E-4	4.33922E-3	9.38416E-2	2.72985E1	-3.26332E1	-3.262E1	2.6816E1	1.19697E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.99175E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.79994E1	1.43051E-4	-8.80013E1	-2.38419E-5	4.74453E-3	9.36747E-2	2.73291E1	-3.26825E1	-3.26206E1	2.67938E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.79993E1	4.76837E-5	-8.8001E1	0.0E0	4.50611E-3	9.38416E-2	2.73129E1	-3.26657E1	-3.26458E1	2.68244E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00954E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.79994E1	1.19209E-4	-8.8001E1	1.19209E-4	4.45843E-3	9.38177E-2	2.72638E1	-3.26431E1	-3.26136E1	2.67686E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.79995E1	-1.43051E-4	-8.80008E1	1.43051E-4	4.33922E-3	9.377E-2	2.73033E1	-3.26376E1	-3.26615E1	2.6816E1	1.19902E-7	2.50882E-3	2.50882E-3	6.31278E-3	3.0148E-1