[Scan]
initial_time=2016-01-28T20:36:11
final_time=2016-01-28T20:36:30
ip_count=19
run=1026
dataset=7
scan=491
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.76053E-6
ql1_vset=
ql1_vmon=-8.79995E1
ql1_imon=-9.42123E-10
ql2_vset=
ql2_vmon=-3.33786E-4
ql2_imon=1.4235E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.84508E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.61634E-8
mult1=-9.52366E-9
mult2=-2.8763E-9
rf_tmon=-4.48839E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.57327E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61447E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20187E1
lens5a_imon=1.99317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53563E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02402E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04958E1
cs_ea1_imon=1.08616E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09483E0
lens1_imon=1.38056E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64348E1
os_ef1alow_imon=2.98078E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03648E1
cs_ea2_imon=1.40051E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84139E1
cs_ef1a_imon=3.03187E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.24133E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11517E1
os_restr1_imon=4.31111E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1545E1
os_ea1_imon=2.41999E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63583E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2563E0
cs_ionrep_imon=9.39798E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91941E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=1.96705E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.95979E-8
tplens_vset=1.4E-1
tplens_vmon=1.62882E0
tplens_imon=-1.15493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25749E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27306E1
iondef2_imon=1.58256E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.59523E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=8.6878E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74594E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46599E0
os_ea2_imon=-6.31002E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00489E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.20042E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07946E0
os_ef2alow_imon=-2.46337E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09394E-1
os_ef2bup_imon=-5.25053E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10938E1
os_restr2_imon=3.40859E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23025E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.10015E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72829E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67794E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.16173E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.6081E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10929E0
cs_ionaccel_imon=-9.51639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4739E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.74344E-6
window_vset=0.0E0
window_vmon=2.24057E-1
window_imon=-1.1254E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39209E-4
mask2_vset=0.0E0
mask2_vmon=-1.86877E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.372E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93659E3
defgrida_imon=6.88172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=7.3035E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.65119E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33276E1
os_fil1_imon=9.34305E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07833E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63112E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31803E1
cs_fil1_imon=7.81449E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.13509E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65161E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58961E-2
os_fil2_imon=-2.49542E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04557E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.75743E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22201E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.03226E-1
res40_imon=-2.42862E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79994E1	-1.90735E-4	-8.80008E1	-4.76837E-5	4.69685E-3	9.35316E-2	2.73045E1	-3.26755E1	-3.25896E1	2.67989E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.79993E1	9.53674E-5	-8.80007E1	1.19209E-4	4.76837E-3	9.33886E-2	2.73515E1	-3.26635E1	-3.26699E1	2.68114E1	1.1974E-7	2.51393E-3	2.51393E-3	6.29684E-3	2.99594E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79996E1	-3.09944E-4	-8.8001E1	2.38419E-5	4.69685E-3	9.35793E-2	2.72906E1	-3.26689E1	-3.26017E1	2.68059E1	1.1995E-7	2.51874E-3	2.51874E-3	6.32483E-3	3.02303E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.79995E1	9.53674E-5	-8.8001E1	5.72205E-4	4.57764E-3	9.36985E-2	2.73358E1	-3.26632E1	-3.26372E1	2.68458E1	1.20142E-7	2.51814E-3	2.51814E-3	6.30212E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79996E1	-4.29153E-4	-8.80007E1	1.90735E-4	4.88758E-3	9.36747E-2	2.72733E1	-3.26536E1	-3.26524E1	2.67878E1	1.19841E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99594E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.79998E1	0.0E0	-8.80008E1	1.19209E-4	4.98295E-3	9.35316E-2	2.72979E1	-3.2638E1	-3.26008E1	2.67848E1	1.19913E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.79998E1	-2.86102E-4	-8.80006E1	4.05312E-4	4.74453E-3	9.36747E-2	2.72654E1	-3.2629E1	-3.26476E1	2.67866E1	1.20084E-7	2.5225E-3	2.5225E-3	6.34661E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.79998E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.673E-3	9.3627E-2	2.72756E1	-3.2682E1	-3.26313E1	2.68424E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01738E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.79998E1	-6.67572E-4	-8.80007E1	2.38419E-4	4.76837E-3	9.36747E-2	2.7362E1	-3.26015E1	-3.26181E1	2.6795E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.79994E1	-7.15256E-4	-8.80007E1	1.66893E-4	4.62532E-3	9.38177E-2	2.72721E1	-3.26602E1	-3.26284E1	2.67758E1	1.20069E-7	2.51007E-3	2.51007E-3	6.33486E-3	3.03976E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.79996E1	-6.67572E-4	-8.80004E1	4.05312E-4	4.74453E-3	9.33647E-2	2.72839E1	-3.26225E1	-3.26756E1	2.68487E1	1.19757E-7	2.51116E-3	2.51116E-3	6.33486E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.10825E-2	-8.79998E1	-2.86102E-4	-8.80006E1	2.38419E-4	4.69685E-3	9.35555E-2	2.7321E1	-3.26661E1	-3.25877E1	2.6792E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01995E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.08504E-2	-8.79999E1	-2.38419E-4	-8.80007E1	3.8147E-4	4.673E-3	9.35793E-2	2.72757E1	-3.26579E1	-3.26597E1	2.6798E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.15461E-2	-8.8E1	-9.53674E-5	-8.80007E1	6.19888E-4	4.50611E-3	9.34124E-2	2.73169E1	-3.26419E1	-3.26172E1	2.67914E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.8E1	-3.33786E-4	-8.80007E1	1.66893E-4	5.10216E-3	9.3627E-2	2.73504E1	-3.26609E1	-3.26193E1	2.68232E1	1.20209E-7	2.52599E-3	2.52599E-3	6.3074E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80002E1	-3.57628E-4	-8.80006E1	5.24521E-4	5.03063E-3	9.37462E-2	2.7298E1	-3.26549E1	-3.25853E1	2.68028E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9926E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80001E1	-3.09944E-4	-8.80006E1	3.57628E-4	4.673E-3	9.37939E-2	2.73116E1	-3.26697E1	-3.26856E1	2.6807E1	1.20017E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.17007E-2	-8.79999E1	-2.86102E-4	-8.80003E1	3.57628E-4	4.3869E-3	9.33647E-2	2.73021E1	-3.2672E1	-3.26207E1	2.6818E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.0148E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80002E1	-4.29153E-4	-8.80003E1	4.05312E-4	4.52995E-3	9.3317E-2	2.72787E1	-3.26759E1	-3.25996E1	2.67974E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.79995E1	-3.33786E-4	-8.80008E1	2.6226E-4	4.60148E-3	9.34839E-2	2.72829E1	-3.27306E1	-3.25749E1	2.67794E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32896E-3	2.99941E-1