[Scan]
initial_time=2016-01-28T20:37:04
final_time=2016-01-28T20:37:23
ip_count=19
run=1026
dataset=7
scan=493
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.80222E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-8.55672E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.47756E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.5123E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.6082E-8
mult1=-8.87347E-9
mult2=-2.69466E-9
rf_tmon=-5.4377E-3
rf_agc=3.28349E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.13434E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65678E0
bslens_imon=2.53972E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.98793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.18957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04668E2
lens23_imon=1.02206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.10095E-5
lens1_vset=-2.7E0
lens1_vmon=-3.12563E0
lens1_imon=1.57346E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65239E1
os_ef1alow_imon=3.00829E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.40605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84346E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.25035E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10739E1
os_restr1_imon=4.29851E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15553E1
os_ea1_imon=2.40522E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64074E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26979E0
cs_ionrep_imon=9.50527E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.95986E-8
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-3.37821E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.48993E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26573E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.54623E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29575E0
ionrepsh_imon=8.42576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33492E1
lens5b_imon=2.18366E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74327E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52404E0
os_ea2_imon=-5.46646E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00637E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.22092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.15127E0
os_ef2alow_imon=-2.46093E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.51774E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10451E1
os_restr2_imon=3.38094E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68208E1
iondef4_imon=1.1144E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.20327E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.66754E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47082E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55822E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-5.29203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.38929E-4
mask2_vset=0.0E0
mask2_vmon=-1.862E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.36747E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.43661E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.25067E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.24532E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08134E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63127E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=7.40111E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03203E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65969E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28124E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.3976E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.62534E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31464E-1
cs_fil2_imon=-2.2395E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70684E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22262E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-7.0287E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23189E-2	-8.79997E1	-3.57628E-4	-8.8001E1	2.14577E-4	4.673E-3	9.38177E-2	2.73387E1	-3.2652E1	-3.26708E1	2.68166E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.79998E1	-2.86102E-4	-8.8001E1	2.38419E-4	4.72069E-3	9.36985E-2	2.72678E1	-3.26664E1	-3.26168E1	2.68292E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.97963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79998E1	-3.57628E-4	-8.80009E1	3.33786E-4	4.64916E-3	9.36031E-2	2.73074E1	-3.27094E1	-3.26347E1	2.67845E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.79996E1	-3.57628E-4	-8.8001E1	1.66893E-4	4.74453E-3	9.35078E-2	2.73204E1	-3.26431E1	-3.26472E1	2.67884E1	1.20092E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.79996E1	-5.24521E-4	-8.80006E1	3.33786E-4	4.50611E-3	9.38416E-2	2.73207E1	-3.26615E1	-3.26549E1	2.68151E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.79997E1	-4.05312E-4	-8.80009E1	3.09944E-4	4.60148E-3	9.38177E-2	2.72939E1	-3.26344E1	-3.26484E1	2.67775E1	1.20278E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.9952E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.79997E1	-4.29153E-4	-8.80006E1	1.90735E-4	4.62532E-3	9.36031E-2	2.72752E1	-3.26222E1	-3.26343E1	2.68138E1	1.19907E-7	2.51755E-3	2.51755E-3	6.31555E-3	2.98574E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.79998E1	-5.48363E-4	-8.80007E1	-1.19209E-4	4.64916E-3	9.35793E-2	2.73299E1	-3.26496E1	-3.26301E1	2.68178E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.8E1	-5.72205E-4	-8.80007E1	2.38419E-4	4.8399E-3	9.3627E-2	2.72935E1	-3.26909E1	-3.26364E1	2.68124E1	1.19991E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80001E1	-3.8147E-4	-8.80009E1	5.24521E-4	4.55379E-3	9.31978E-2	2.72865E1	-3.26554E1	-3.25978E1	2.68118E1					
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.8E1	-6.19888E-4	-8.80012E1	4.52995E-4	4.33922E-3	9.34839E-2	2.73132E1	-3.26967E1	-3.26347E1	2.6803E1	1.20122E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.03976E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.79999E1	-5.00679E-4	-8.80009E1	3.8147E-4	4.36306E-3	9.34839E-2	2.73051E1	-3.26957E1	-3.26296E1	2.68046E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.02769E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80001E1	-5.96046E-4	-8.80007E1	3.09944E-4	4.72069E-3	9.34601E-2	2.73075E1	-3.26795E1	-3.25996E1	2.67956E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.80002E1	-4.05312E-4	-8.80005E1	3.33786E-4	4.76837E-3	9.38892E-2	2.73123E1	-3.26609E1	-3.26627E1	2.67517E1	1.20069E-7	2.52867E-3	2.52867E-3	6.3074E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.8E1	-1.90735E-4	-8.80009E1	2.6226E-4	4.74453E-3	9.3627E-2	2.72961E1	-3.26927E1	-3.26134E1	2.68082E1	1.20069E-7	2.51007E-3	2.51007E-3	6.34037E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.8E1	-2.86102E-4	-8.80006E1	5.00679E-4	4.8399E-3	9.36747E-2	2.73015E1	-3.26446E1	-3.26458E1	2.6789E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.80003E1	-4.29153E-4	-8.80008E1	4.05312E-4	4.72069E-3	9.377E-2	2.72606E1	-3.26458E1	-3.25858E1	2.68202E1	1.20043E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.8E1	-2.86102E-4	-8.80009E1	3.8147E-4	4.8399E-3	9.39608E-2	2.72833E1	-3.26638E1	-3.26838E1	2.6807E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80001E1	1.66893E-4	-8.8001E1	2.6226E-4	4.76837E-3	9.34839E-2	2.73916E1	-3.27702E1	-3.25755E1	2.68105E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.02659E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.79998E1	-2.38419E-4	-8.80006E1	5.48363E-4	4.88758E-3	9.37939E-2	2.72901E1	-3.26573E1	-3.26362E1	2.68208E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1