[Scan]
initial_time=2016-01-28T20:37:31
final_time=2016-01-28T20:37:50
ip_count=19
run=1026
dataset=7
scan=494
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.80855E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-8.16798E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.43787E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.50722E-9
ql4_vset=
ql4_vmon=5.48363E-4
ql4_imon=1.61046E-8
mult1=-9.68019E-9
mult2=-2.64076E-9
rf_tmon=-4.53045E-3
rf_agc=3.33216E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.36692E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.47286E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04985E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.17713E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.09481E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.45987E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64637E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.40376E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84417E1
cs_ef1a_imon=3.04125E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.22671E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.30381E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.42324E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.08643E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.60707E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.94404E-8
tplens_vset=1.4E-1
tplens_vmon=1.62581E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.52128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.57139E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.76606E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23768E0
ionrepsh_imon=8.57605E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.13856E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48522E0
os_ea2_imon=-5.55298E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00673E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71072E1
cs_ef2a_imon=3.19243E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.54331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.09973E-1
os_ef2bup_imon=-5.15322E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.39399E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31226E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01804E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7376E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.06581E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.54679E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10639E0
cs_ionaccel_imon=-9.62065E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56266E1
einzel_imon=7.73302E-6
window_vset=0.0E0
window_vmon=2.15369E-1
window_imon=-1.11498E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=7.01871E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.33234E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=5.9949E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.41685E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07555E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62599E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31809E1
cs_fil1_imon=7.4438E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14667E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65839E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.36221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0282E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.11834E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.42592E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22242E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.59409E-1
res40_imon=-2.36259E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80002E1	-5.24521E-4	-8.80009E1	3.57628E-4	5.22137E-3	9.37223E-2	2.73193E1	-3.26638E1	-3.26065E1	2.67662E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.8E1	-5.72205E-4	-8.80009E1	3.57628E-4	4.86374E-3	9.36985E-2	2.73314E1	-3.26548E1	-3.26248E1	2.67807E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.99E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.26282E-2	-8.80001E1	-8.82149E-4	-8.80004E1	1.43051E-4	4.98295E-3	9.36031E-2	2.73116E1	-3.2639E1	-3.26296E1	2.67828E1	1.20383E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.99E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27828E-2	-8.8E1	-6.91414E-4	-8.80006E1	2.38419E-4	4.98295E-3	9.38892E-2	2.73269E1	-3.26549E1	-3.26054E1	2.68184E1	1.19953E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.8E1	-5.24521E-4	-8.80005E1	5.48363E-4	4.93526E-3	9.34362E-2	2.73219E1	-3.26518E1	-3.2644E1	2.68302E1	1.20158E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.99941E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.8E1	-2.14577E-4	-8.80007E1	3.33786E-4	4.69685E-3	9.34839E-2	2.72502E1	-3.26626E1	-3.26461E1	2.68136E1	1.20017E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.16233E-2	-8.79999E1	-5.96046E-4	-8.80005E1	3.57628E-4	4.48227E-3	9.35316E-2	2.73039E1	-3.26978E1	-3.26057E1	2.68018E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80001E1	-5.48363E-4	-8.80005E1	3.09944E-4	4.673E-3	9.35793E-2	2.72866E1	-3.26922E1	-3.26483E1	2.68322E1	1.19945E-7	2.51843E-3	2.51843E-3	6.29359E-3	3.00751E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.8E1	-5.72205E-4	-8.80007E1	-4.76837E-5	4.8399E-3	9.35078E-2	2.72614E1	-3.26349E1	-3.26248E1	2.68082E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.20871E-2	-8.80002E1	-5.00679E-4	-8.80008E1	-1.43051E-4	4.43459E-3	9.34839E-2	2.73351E1	-3.2632E1	-3.26254E1	2.67758E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.8E1	-2.38419E-4	-8.80004E1	2.86102E-4	4.43459E-3	9.3627E-2	2.72907E1	-3.2638E1	-3.26392E1	2.68502E1	1.19757E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.79999E1	-2.14577E-4	-8.80006E1	2.86102E-4	4.673E-3	9.3627E-2	2.73505E1	-3.26767E1	-3.26195E1	2.6783E1	1.19749E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.79999E1	-1.66893E-4	-8.80006E1	9.53674E-5	4.43459E-3	9.35555E-2	2.72955E1	-3.26957E1	-3.26164E1	2.67613E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80001E1	-5.72205E-4	-8.80004E1	2.86102E-4	4.88758E-3	9.33409E-2	2.72811E1	-3.26506E1	-3.26056E1	2.67842E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.8E1	-4.29153E-4	-8.80005E1	5.48363E-4	4.57764E-3	9.32693E-2	2.72979E1	-3.26981E1	-3.26789E1	2.6786E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02133E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80002E1	-6.19888E-4	-8.80007E1	5.72205E-4	4.41074E-3	9.35793E-2	2.72811E1	-3.26981E1	-3.25701E1	2.68041E1	1.198E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.03286E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.8E1	-5.00679E-4	-8.80006E1	3.8147E-4	4.50611E-3	9.3627E-2	2.72845E1	-3.26384E1	-3.26461E1	2.68034E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.8E1	-2.14577E-4	-8.80006E1	4.29153E-4	4.43459E-3	9.38892E-2	2.72738E1	-3.2672E1	-3.26472E1	2.67956E1	1.19601E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80004E1	-3.09944E-4	-8.80009E1	1.90735E-4	4.81606E-3	9.37223E-2	2.73328E1	-3.2659E1	-3.26325E1	2.68082E1	1.20158E-7	2.51847E-3	2.51847E-3	6.28592E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80003E1	-4.29153E-4	-8.80006E1	5.48363E-4	4.76837E-3	9.377E-2	2.7376E1	-3.26518E1	-3.26062E1	2.68034E1	1.198E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.98665E-1