[Scan]
initial_time=2016-01-28T20:39:44
final_time=2016-01-28T20:40:03
ip_count=19
run=1026
dataset=7
scan=499
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.82922E-6
ql1_vset=
ql1_vmon=-8.8E1
ql1_imon=-7.92158E-10
ql2_vset=
ql2_vmon=-4.52995E-4
ql2_imon=1.38973E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.13671E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.61361E-8
mult1=-1.35236E-8
mult2=-3.07377E-9
rf_tmon=4.09151E-3
rf_agc=4.35331E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.11479E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6361E0
bslens_imon=2.55217E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19755E1
lens5a_imon=1.98956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.08904E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08041E0
lens1_imon=1.46348E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0381E1
cs_ea2_imon=1.40195E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.21992E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.42179E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.42321E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91903E2
cs_nozzle_imon=1.93254E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.93556E-8
tplens_vset=1.4E-1
tplens_vmon=1.63422E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27564E1
iondef3_imon=1.50037E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26952E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.40688E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=8.56163E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33832E1
lens5b_imon=2.16692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74976E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48642E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.1184E-1
os_ef2bup_imon=-5.32248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.38887E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.32235E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.08892E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72384E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.04746E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.53777E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-8.5356E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.12537E-1
window_imon=-9.04015E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=6.99347E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.16651E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48878E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33269E1
os_fil1_imon=9.42829E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07611E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62587E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31875E1
cs_fil1_imon=7.61134E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70164E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65691E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19955E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.51483E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80007E1	-7.86781E-4	-8.80005E1	3.33786E-4	4.64916E-3	9.37462E-2	2.72823E1	-3.26639E1	-3.2641E1	2.68262E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99941E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80008E1	-8.10623E-4	-8.80003E1	3.57628E-4	5.00679E-3	9.32932E-2	2.73051E1	-3.26554E1	-3.26248E1	2.68176E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80008E1	-4.76837E-4	-8.80006E1	4.76837E-4	4.72069E-3	9.34601E-2	2.73311E1	-3.26366E1	-3.26119E1	2.67891E1	1.20031E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.01475E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80007E1	-5.96046E-4	-8.80007E1	3.33786E-4	4.57764E-3	9.37223E-2	2.73057E1	-3.26756E1	-3.26254E1	2.67799E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80007E1	-6.67572E-4	-8.80008E1	3.57628E-4	5.03063E-3	9.37939E-2	2.73027E1	-3.26644E1	-3.26024E1	2.67946E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80008E1	-5.96046E-4	-8.80006E1	2.6226E-4	4.57764E-3	9.40084E-2	2.73153E1	-3.26506E1	-3.26206E1	2.681E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80005E1	-4.52995E-4	-8.80008E1	5.72205E-4	4.88758E-3	9.36985E-2	2.73045E1	-3.26627E1	-3.2637E1	2.68106E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80002E1	-4.05312E-4	-8.80008E1	2.14577E-4	4.76837E-3	9.4223E-2	2.73303E1	-3.26573E1	-3.26314E1	2.68016E1	1.19766E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.01742E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80003E1	-6.91414E-4	-8.80005E1	3.09944E-4	4.76837E-3	9.41277E-2	2.73488E1	-3.26514E1	-3.26042E1	2.67547E1	1.19861E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80005E1	-4.05312E-4	-8.80007E1	1.43051E-4	4.8399E-3	9.37462E-2	2.73088E1	-3.26572E1	-3.26303E1	2.6783E1	1.20055E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01995E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80003E1	-8.10623E-4	-8.80006E1	3.33786E-4	4.43459E-3	9.36031E-2	2.73315E1	-3.26452E1	-3.2617E1	2.681E1	1.20137E-7	2.51915E-3	2.51915E-3	6.33538E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80007E1	-5.24521E-4	-8.80007E1	5.24521E-4	4.57764E-3	9.35555E-2	2.73086E1	-3.26661E1	-3.26531E1	2.67764E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80002E1	-7.62939E-4	-8.80009E1	5.72205E-4	4.64916E-3	9.34362E-2	2.72733E1	-3.26543E1	-3.26464E1	2.68172E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.98156E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80003E1	-8.34465E-4	-8.80008E1	1.43051E-4	5.36442E-3	9.38416E-2	2.72931E1	-3.26693E1	-3.26554E1	2.68256E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80002E1	-8.82149E-4	-8.8001E1	2.14577E-4	4.88758E-3	9.36985E-2	2.72721E1	-3.27041E1	-3.25767E1	2.68016E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.79999E1	-5.24521E-4	-8.8001E1	2.38419E-5	4.673E-3	9.36031E-2	2.72927E1	-3.26838E1	-3.26437E1	2.6849E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.02396E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80001E1	-4.52995E-4	-8.80009E1	2.86102E-4	4.86374E-3	9.38177E-2	2.72847E1	-3.26657E1	-3.2623E1	2.67876E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80003E1	-3.33786E-4	-8.80008E1	3.33786E-4	4.74453E-3	9.38416E-2	2.73123E1	-3.26681E1	-3.26254E1	2.67947E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80001E1	-6.67572E-4	-8.80007E1	7.39098E-4	4.3869E-3	9.38416E-2	2.73069E1	-3.26809E1	-3.26083E1	2.68215E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.8E1	-4.52995E-4	-8.80008E1	3.33786E-4	4.57764E-3	9.37939E-2	2.72384E1	-3.26952E1	-3.27564E1	2.68286E1	1.19851E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.0071E-1