[Scan]
initial_time=2016-01-28T20:41:04
final_time=2016-01-28T20:41:23
ip_count=19
run=1026
dataset=7
scan=502
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.79271E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.44343E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.45044E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.15504E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.62066E-8
mult1=-1.04567E-8
mult2=-2.73616E-9
rf_tmon=-3.59724E-3
rf_agc=3.46751E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.26178E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66267E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53702E1
cs_ef1b_imon=3.18374E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02301E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.08538E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04304E0
lens1_imon=1.308E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64689E1
os_ef1alow_imon=2.96549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0408E1
cs_ea2_imon=1.40888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=3.04368E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.20659E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29651E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15235E1
os_ea1_imon=2.43956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.10381E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=9.30707E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=1.94933E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.93414E-8
tplens_vset=1.4E-1
tplens_vmon=1.65323E0
tplens_imon=-4.22766E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.50268E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2648E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98594E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.72576E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28277E0
ionrepsh_imon=8.35143E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33675E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.13578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48452E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71235E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07715E0
os_ef2alow_imon=-2.59891E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91439E-1
os_ef2bup_imon=-5.27485E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10776E1
os_restr2_imon=3.39052E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01792E1
cs_anode2_imon=2.09598E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72782E1
iondef1_imon=1.10343E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.07704E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.01506E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.50473E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14346E0
cs_ionaccel_imon=-7.5355E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47306E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56202E1
einzel_imon=7.77472E-6
window_vset=0.0E0
window_vmon=1.99151E-1
window_imon=-1.07327E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.71976E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.28441E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33252E1
os_fil1_imon=9.41152E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07746E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61804E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3179E1
cs_fil1_imon=7.53068E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80697E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65445E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71178E-2
os_fil2_imon=-2.5881E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.63651E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29402E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33894E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22139E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24078E-1
res40_imon=-2.42167E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80002E1	-1.43051E-4	-8.80003E1	1.43051E-4	4.48227E-3	9.35793E-2	2.72933E1	-3.26649E1	-3.26472E1	2.6807E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.01223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80003E1	-2.6226E-4	-8.80002E1	1.66893E-4	4.45843E-3	9.36747E-2	2.734E1	-3.26787E1	-3.26058E1	2.68358E1	1.198E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80003E1	0.0E0	-8.80007E1	4.76837E-5	4.95911E-3	9.36747E-2	2.73136E1	-3.26744E1	-3.26505E1	2.67879E1	1.19819E-7	2.52139E-3	2.52139E-3	6.3074E-3	2.99083E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80003E1	-2.6226E-4	-8.80004E1	3.33786E-4	5.10216E-3	9.36031E-2	2.72769E1	-3.27136E1	-3.26046E1	2.684E1	1.20028E-7	2.52301E-3	2.52301E-3	6.323E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80006E1	-4.05312E-4	-8.80007E1	1.43051E-4	4.3869E-3	9.37939E-2	2.72981E1	-3.2666E1	-3.26237E1	2.67986E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80005E1	-7.39098E-4	-8.80005E1	2.14577E-4	4.52995E-3	9.39846E-2	2.73159E1	-3.26494E1	-3.26092E1	2.68218E1	1.20004E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80007E1	-2.6226E-4	-8.80007E1	3.33786E-4	4.48227E-3	9.34362E-2	2.7275E1	-3.26712E1	-3.25687E1	2.6807E1	1.19965E-7	2.52867E-3	2.52867E-3	6.29645E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80005E1	-5.96046E-4	-8.80003E1	3.57628E-4	5.00679E-3	9.377E-2	2.7288E1	-3.26744E1	-3.26113E1	2.681E1	1.19856E-7	2.51593E-3	2.51593E-3	6.32099E-3	3.00637E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80007E1	-3.33786E-4	-8.80001E1	2.86102E-4	5.126E-3	9.37223E-2	2.72907E1	-3.26831E1	-3.26675E1	2.68016E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80005E1	-4.29153E-4	-8.80003E1	1.19209E-4	4.55379E-3	9.36747E-2	2.73568E1	-3.26765E1	-3.2602E1	2.6783E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80007E1	-6.19888E-4	-8.80002E1	1.66893E-4	4.673E-3	9.3627E-2	2.72799E1	-3.26579E1	-3.26446E1	2.68208E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80007E1	-3.8147E-4	-8.80003E1	4.76837E-5	4.673E-3	9.38416E-2	2.73448E1	-3.26344E1	-3.265E1	2.67649E1	1.20122E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27053E-2	-8.80004E1	-6.19888E-4	-8.80004E1	2.14577E-4	4.55379E-3	9.34601E-2	2.73153E1	-3.26699E1	-3.26158E1	2.68046E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80005E1	-5.24521E-4	-8.80007E1	-4.76837E-5	4.69685E-3	9.33647E-2	2.726E1	-3.26771E1	-3.26086E1	2.68406E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80006E1	-6.4373E-4	-8.80007E1	1.19209E-4	4.69685E-3	9.35078E-2	2.73213E1	-3.26488E1	-3.26338E1	2.67926E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80005E1	-7.39098E-4	-8.80006E1	2.38419E-5	4.43459E-3	9.37939E-2	2.7388E1	-3.26831E1	-3.25209E1	2.68412E1	1.20383E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80006E1	-4.76837E-4	-8.80006E1	-9.53674E-5	4.29153E-3	9.38177E-2	2.73159E1	-3.26645E1	-3.26482E1	2.67854E1	1.20106E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80003E1	-8.10623E-4	-8.80007E1	-2.38419E-5	4.74453E-3	9.34601E-2	2.72845E1	-3.2695E1	-3.25806E1	2.67878E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80005E1	-7.62939E-4	-8.80001E1	1.66893E-4	4.79221E-3	9.36508E-2	2.72544E1	-3.26779E1	-3.26862E1	2.67908E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80008E1	-3.8147E-4	-8.80005E1	1.90735E-4	4.72069E-3	9.35078E-2	2.72782E1	-3.2648E1	-3.26419E1	2.68202E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1