[Scan]
initial_time=2016-01-28T20:42:24
final_time=2016-01-28T20:42:43
ip_count=19
run=1026
dataset=7
scan=505
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.82754E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.99985E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.41832E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.93963E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.62576E-8
mult1=-9.25877E-9
mult2=-2.60483E-9
rf_tmon=-5.07119E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.68199E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.72521E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53596E1
cs_ef1b_imon=3.18016E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04976E1
cs_ea1_imon=1.09878E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64666E1
os_ef1alow_imon=2.97674E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03732E1
cs_ea2_imon=1.40916E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.03255E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.19895E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11276E1
os_restr1_imon=4.30929E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.44523E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63748E1
os_ef1bup_imon=3.09314E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23227E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0184E1
cs_anode1_imon=1.97062E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.92254E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-7.34474E-9
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.5649E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.93736E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28574E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.18134E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74611E1
cs_ef2b_imon=3.1328E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44797E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7105E1
cs_ef2a_imon=3.18677E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07628E0
os_ef2alow_imon=-2.55694E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94772E-1
os_ef2bup_imon=-5.27787E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10958E1
os_restr2_imon=3.38322E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0184E1
cs_anode2_imon=2.09179E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.07751E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.08788E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.16889E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.42044E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10689E0
cs_ionaccel_imon=-9.11903E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47333E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56301E1
einzel_imon=7.73925E-6
window_vset=0.0E0
window_vmon=1.94823E-1
window_imon=-1.01105E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39213E-4
mask2_vset=0.0E0
mask2_vmon=-1.86723E1
mask2_imon=-6.76898E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.23501E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.51041E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.47293E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49781E0
defgridb_imon=6.08503E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3325E1
os_fil1_imon=9.39672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07947E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61258E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31794E1
cs_fil1_imon=7.33572E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.55726E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.66699E-2
os_fil2_imon=-2.44395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12153E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.78861E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31565E-1
cs_fil2_imon=-2.40111E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22168E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00197E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.95506E-1
res40_imon=-2.41007E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80004E1	-2.38419E-4	-8.80007E1	1.66893E-4	4.91142E-3	9.38892E-2	2.73322E1	-3.26602E1	-3.25965E1	2.6785E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80004E1	-5.48363E-4	-8.80003E1	1.90735E-4	4.93526E-3	9.37462E-2	2.72708E1	-3.26664E1	-3.26327E1	2.6819E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80006E1	-4.29153E-4	-8.80003E1	2.6226E-4	4.98295E-3	9.37939E-2	2.73149E1	-3.2659E1	-3.26677E1	2.6803E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00302E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80007E1	-5.00679E-4	-8.80007E1	2.86102E-4	4.98295E-3	9.37939E-2	2.73117E1	-3.26627E1	-3.26056E1	2.67992E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80008E1	-3.57628E-4	-8.80005E1	9.53674E-5	4.91142E-3	9.37939E-2	2.72782E1	-3.26621E1	-3.26015E1	2.68188E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80005E1	-7.39098E-4	-8.80007E1	-9.53674E-5	4.74453E-3	9.43661E-2	2.73177E1	-3.26711E1	-3.26729E1	2.67836E1	1.19872E-7	2.5147E-3	2.5147E-3	6.34661E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.8001E1	-6.91414E-4	-8.80005E1	1.43051E-4	4.81606E-3	9.41038E-2	2.72827E1	-3.26366E1	-3.25794E1	2.68418E1	1.198E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80008E1	-5.48363E-4	-8.80002E1	2.38419E-5	4.95911E-3	9.40084E-2	2.72624E1	-3.26332E1	-3.26446E1	2.68059E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.8001E1	-4.05312E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.36985E-2	2.72738E1	-3.26331E1	-3.26543E1	2.67914E1	1.20106E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.8001E1	-5.24521E-4	-8.80001E1	2.38419E-4	4.60148E-3	9.35555E-2	2.73417E1	-3.26693E1	-3.25599E1	2.68298E1	1.20004E-7	2.50989E-3	2.50989E-3	6.28592E-3	3.00453E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80009E1	-7.15256E-4	-8.80004E1	2.14577E-4	4.86374E-3	9.38416E-2	2.73399E1	-3.26705E1	-3.26356E1	2.68256E1	1.19925E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.99348E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80007E1	-3.09944E-4	-8.80007E1	3.57628E-4	4.57764E-3	9.37939E-2	2.73075E1	-3.26615E1	-3.26332E1	2.68298E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80008E1	-7.39098E-4	-8.80003E1	2.14577E-4	4.88758E-3	9.39846E-2	2.72769E1	-3.26693E1	-3.26092E1	2.68184E1	1.20226E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.01871E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80005E1	-5.24521E-4	-8.80001E1	6.19888E-4	4.72069E-3	9.36747E-2	2.73538E1	-3.2629E1	-3.26152E1	2.68034E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01347E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80006E1	-3.09944E-4	-8.80004E1	3.33786E-4	4.79221E-3	9.35078E-2	2.72632E1	-3.26425E1	-3.26832E1	2.68106E1	1.19978E-7	2.51915E-3	2.51915E-3	6.33538E-3	2.99083E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80006E1	-3.09944E-4	-8.80005E1	4.52995E-4	4.52995E-3	9.34839E-2	2.73271E1	-3.26695E1	-3.26119E1	2.67986E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.9841E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80006E1	-4.52995E-4	-8.80006E1	3.8147E-4	4.76837E-3	9.36031E-2	2.72697E1	-3.26496E1	-3.26378E1	2.68184E1	1.20226E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.99E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80006E1	-6.91414E-4	-8.80007E1	1.43051E-4	4.64916E-3	9.34839E-2	2.73508E1	-3.26573E1	-3.26182E1	2.68082E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80007E1	-3.57628E-4	-8.80003E1	3.57628E-4	4.43459E-3	9.3174E-2	2.73104E1	-3.26874E1	-3.26107E1	2.68046E1	1.19749E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80007E1	-3.09944E-4	-8.80004E1	2.6226E-4	4.8399E-3	9.34601E-2	2.72955E1	-3.26434E1	-3.26446E1	2.67836E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1