[Scan]
initial_time=2016-01-28T20:42:50
final_time=2016-01-28T20:43:10
ip_count=19
run=1026
dataset=7
scan=506
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.78192E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.33578E-10
ql2_vset=
ql2_vmon=-2.6226E-4
ql2_imon=1.42206E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.97666E-9
ql4_vset=
ql4_vmon=-2.38419E-4
ql4_imon=1.6213E-8
mult1=-9.23928E-9
mult2=-2.6625E-9
rf_tmon=-6.04322E-3
rf_agc=3.27074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.47099E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68391E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12438E2
lens4a_imon=2.04948E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.16074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02227E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05289E1
cs_ea1_imon=1.09458E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06546E0
lens1_imon=1.38233E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65149E1
os_ef1alow_imon=2.99243E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03702E1
cs_ea2_imon=1.39791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.02775E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.19065E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11586E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15164E1
os_ea1_imon=2.44239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.51943E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02031E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=3.92166E-8
tplens_vset=1.4E-1
tplens_vmon=1.63258E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26018E1
iondef3_imon=1.50197E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26207E1
iondef2_imon=1.57134E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98434E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.54325E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23912E0
ionrepsh_imon=8.52132E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.19852E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74495E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45325E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06095E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02229E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02182E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73234E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.10215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.02599E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.39158E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08569E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02128E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55762E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-6.2651E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82604E2
mask1_imon=2.38926E-4
mask2_vset=0.0E0
mask2_vmon=-1.87065E1
mask2_imon=-2.15658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.54444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.67375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.38163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26382E0
defgridb_imon=5.94817E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.42943E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07852E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61736E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31815E1
cs_fil1_imon=7.59933E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.05293E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6441E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.92705E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.50489E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21964E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43385E-1
res40_imon=-2.29875E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80006E1	-3.33786E-4	-8.80004E1	3.8147E-4	4.86374E-3	9.36031E-2	2.73039E1	-3.26621E1	-3.26284E1	2.67872E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97704E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80007E1	-3.09944E-4	-8.80004E1	2.38419E-4	4.8399E-3	9.34124E-2	2.73004E1	-3.26992E1	-3.26284E1	2.67818E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00563E-1
3.0E0	0.0E0	1.0E0	4.85E2	2.79E2	-7.19325E-2	-8.80008E1	-3.33786E-4	-8.80004E1	5.00679E-4	4.98295E-3	9.35793E-2	2.73063E1	-3.26886E1	-3.25814E1	2.67873E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.0148E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80009E1	-9.53674E-5	-8.80004E1	2.86102E-4	4.86374E-3	9.38416E-2	2.72775E1	-3.26266E1	-3.2686E1	2.6792E1	1.20092E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8001E1	-6.67572E-4	-8.80002E1	6.4373E-4	4.76837E-3	9.39608E-2	2.73592E1	-3.26717E1	-3.2611E1	2.68076E1	1.19913E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80006E1	-4.05312E-4	-8.80003E1	3.57628E-4	4.91142E-3	9.40084E-2	2.72691E1	-3.26549E1	-3.2652E1	2.67949E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80008E1	-4.52995E-4	-8.80001E1	2.86102E-4	4.98295E-3	9.37223E-2	2.73442E1	-3.26392E1	-3.25996E1	2.67758E1	1.19697E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80007E1	-5.00679E-4	-8.80002E1	1.19209E-4	4.8399E-3	9.40084E-2	2.72324E1	-3.26885E1	-3.26158E1	2.68526E1	1.19766E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.01742E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.12368E-2	-8.80008E1	-9.29832E-4	-8.80004E1	-1.43051E-4	4.673E-3	9.38654E-2	2.73131E1	-3.26634E1	-3.26107E1	2.67974E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80008E1	-4.05312E-4	-8.80005E1	-2.6226E-4	4.76837E-3	9.39608E-2	2.72573E1	-3.25959E1	-3.26189E1	2.68244E1	1.19965E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00041E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.8001E1	-5.00679E-4	-8.80006E1	-7.15256E-5	5.03063E-3	9.39369E-2	2.73309E1	-3.26633E1	-3.26068E1	2.67775E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.8001E1	-3.33786E-4	-8.80005E1	-9.53674E-5	4.95911E-3	9.38177E-2	2.72732E1	-3.2667E1	-3.26351E1	2.68123E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80005E1	-5.72205E-4	-8.80001E1	1.19209E-4	4.95911E-3	9.40323E-2	2.73151E1	-3.26566E1	-3.26235E1	2.67808E1	1.1993E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.03227E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80007E1	-1.90735E-4	-8.80004E1	-1.19209E-4	4.673E-3	9.37223E-2	2.73016E1	-3.26815E1	-3.26343E1	2.6774E1	1.2006E-7	2.5199E-3	2.5199E-3	6.28423E-3	3.00916E-1
1.8E1	0.0E0	3.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80005E1	1.19209E-4	-8.80003E1	-9.53674E-5	5.126E-3	9.36985E-2	2.73159E1	-3.26723E1	-3.26278E1	2.6828E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80003E1	4.76837E-5	-8.80002E1	1.19209E-4	4.98295E-3	9.37939E-2	2.7239E1	-3.26494E1	-3.26026E1	2.68018E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80006E1	2.38419E-5	-8.80004E1	2.86102E-4	4.98295E-3	9.39369E-2	2.73315E1	-3.26561E1	-3.2647E1	2.68132E1	1.19851E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80006E1	-2.38419E-5	-8.80003E1	2.6226E-4	4.8399E-3	9.38177E-2	2.73225E1	-3.26851E1	-3.26405E1	2.67802E1	1.20191E-7	2.52027E-3	2.52027E-3	6.31858E-3	2.99083E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80009E1	-3.8147E-4	-8.80001E1	9.53674E-5	5.126E-3	9.408E-2	2.73111E1	-3.26837E1	-3.26795E1	2.68034E1	1.20042E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.97843E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80008E1	-2.6226E-4	-8.80001E1	-2.38419E-4	4.95911E-3	9.377E-2	2.73234E1	-3.26207E1	-3.26018E1	2.68142E1	1.20055E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99175E-1