[Scan]
initial_time=2016-01-28T20:44:37
final_time=2016-01-28T20:44:57
ip_count=19
run=1026
dataset=7
scan=510
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.76238E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.39582E-10
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.42484E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.84497E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.61572E-8
mult1=-1.00053E-8
mult2=-2.80644E-9
rf_tmon=-3.86954E-3
rf_agc=3.30993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.3314E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.6459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20073E1
lens5a_imon=2.00398E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.0497E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53454E1
cs_ef1b_imon=3.18128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02431E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05084E1
cs_ea1_imon=1.08147E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05518E0
lens1_imon=1.49232E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.96108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0351E1
cs_ea2_imon=1.38285E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.17431E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11352E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15528E1
os_ea1_imon=2.43982E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.09695E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.71882E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93297E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.948E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20465E0
olens4_imon=3.90684E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=8.6384E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25894E1
iondef3_imon=1.4791E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.55805E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.6087E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29776E0
ionrepsh_imon=8.65896E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33556E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.14128E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42694E0
os_ea2_imon=-8.29274E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06116E2
lens4b_imon=2.00727E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06597E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99226E-1
os_ef2bup_imon=-5.17471E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.37409E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23043E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72678E1
iondef1_imon=1.06453E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6834E1
iondef4_imon=1.10251E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.97314E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.30442E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14155E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02067E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56345E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=2.16141E-1
window_imon=-9.07619E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-4.82351E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.54286E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.32874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=5.90478E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33242E1
os_fil1_imon=9.40672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0844E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=8.39821E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.74369E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64808E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.71858E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79892E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-1.99923E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2205E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.20383E-7
chamber_cvt_pmon=2.52757E-3
foreline_cvt_pmon=2.52757E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=241
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.10825E-2	-8.80013E1	-7.39098E-4	-8.80006E1	1.19209E-4	4.98295E-3	9.39131E-2	2.72645E1	-3.26585E1	-3.26486E1	2.67787E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80014E1	-5.96046E-4	-8.80003E1	-9.53674E-5	4.86374E-3	9.40323E-2	2.73013E1	-3.26534E1	-3.25758E1	2.68328E1	1.19991E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.02368E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.80013E1	-8.10623E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.38416E-2	2.72964E1	-3.26527E1	-3.26469E1	2.67439E1	1.2006E-7	2.5118E-3	2.5118E-3	6.3074E-3	2.99811E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80012E1	-8.82149E-4	-8.80005E1	-7.15256E-5	4.60148E-3	9.377E-2	2.73345E1	-3.26777E1	-3.26146E1	2.68383E1	1.19953E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80013E1	-5.00679E-4	-8.80002E1	2.38419E-4	5.03063E-3	9.41515E-2	2.7278E1	-3.26354E1	-3.26667E1	2.68382E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80012E1	-6.4373E-4	-8.80002E1	1.43051E-4	4.88758E-3	9.38892E-2	2.73063E1	-3.26464E1	-3.26086E1	2.67824E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80012E1	-4.52995E-4	-8.80003E1	2.14577E-4	4.76837E-3	9.38416E-2	2.72774E1	-3.26791E1	-3.26461E1	2.68262E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80016E1	-3.57628E-4	-8.80006E1	2.6226E-4	4.76837E-3	9.39131E-2	2.72889E1	-3.26813E1	-3.25954E1	2.67996E1	1.20209E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80014E1	-1.90735E-4	-8.80003E1	2.86102E-4	4.98295E-3	9.39369E-2	2.73309E1	-3.26729E1	-3.2641E1	2.68284E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80012E1	-2.14577E-4	-8.80004E1	3.8147E-4	5.17368E-3	9.40323E-2	2.72672E1	-3.26741E1	-3.26116E1	2.677E1	1.20017E-7	2.52209E-3	2.52209E-3	6.28006E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80012E1	-5.00679E-4	-8.80002E1	2.38419E-4	5.26905E-3	9.38177E-2	2.73153E1	-3.26422E1	-3.26603E1	2.68466E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80014E1	-6.19888E-4	-8.80004E1	2.14577E-4	5.00679E-3	9.35555E-2	2.72883E1	-3.26494E1	-3.26092E1	2.683E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80011E1	-7.86781E-4	-8.80003E1	1.19209E-4	5.126E-3	9.3627E-2	2.72955E1	-3.26891E1	-3.2644E1	2.68007E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80011E1	-8.34465E-4	-8.80005E1	3.8147E-4	4.673E-3	9.36508E-2	2.72811E1	-3.2611E1	-3.26236E1	2.68238E1	1.19809E-7	2.51662E-3	2.51662E-3	6.27461E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.8001E1	-3.8147E-4	-8.80003E1	4.29153E-4	4.8399E-3	9.37462E-2	2.73419E1	-3.26546E1	-3.26816E1	2.68194E1	1.19861E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.17779E-2	-8.8001E1	-4.76837E-4	-8.80004E1	3.33786E-4	4.91142E-3	9.377E-2	2.73123E1	-3.26705E1	-3.26278E1	2.68094E1	1.1979E-7	2.51972E-3	2.51972E-3	6.33388E-3	3.01104E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80008E1	1.43051E-4	-8.80004E1	2.14577E-4	5.17368E-3	9.37223E-2	2.72961E1	-3.26446E1	-3.26675E1	2.68142E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80009E1	-2.6226E-4	-8.80006E1	3.09944E-4	4.74453E-3	9.38416E-2	2.73611E1	-3.26915E1	-3.26136E1	2.68117E1	1.2026E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.8001E1	-2.14577E-4	-8.80006E1	2.14577E-4	4.93526E-3	9.36747E-2	2.72871E1	-3.26669E1	-3.26837E1	2.67764E1	1.19851E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80014E1	-3.09944E-4	-8.80005E1	5.00679E-4	5.126E-3	9.35793E-2	2.72678E1	-3.26681E1	-3.25894E1	2.6834E1	1.20383E-7	2.52757E-3	2.52757E-3	6.30192E-3	3.00302E-1