[Scan]
initial_time=2016-01-28T20:46:24
final_time=2016-01-28T20:46:43
ip_count=19
run=1026
dataset=7
scan=514
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.85736E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.58357E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.42429E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.78685E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63202E-8
mult1=-9.35065E-9
mult2=-2.73962E-9
rf_tmon=-4.76003E-3
rf_agc=3.29383E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.56219E-10
bslens_vset=-6.2E0
bslens_vmon=-6.73095E0
bslens_imon=3.25561E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20178E1
lens5a_imon=1.96738E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12358E2
lens4a_imon=2.0474E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.16542E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02771E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05625E1
cs_ea1_imon=1.08219E-5
lens1_vset=-2.7E0
lens1_vmon=-2.95697E0
lens1_imon=8.90221E-7
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6438E1
os_ef1alow_imon=2.99063E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03751E1
cs_ea2_imon=1.44361E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.02631E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.14726E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11093E1
os_restr1_imon=4.30932E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.16236E1
os_ea1_imon=2.4816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63966E1
os_ef1bup_imon=3.09875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22822E0
cs_ionrep_imon=9.09564E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91845E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01353E1
cs_anode1_imon=1.95989E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.88915E-8
tplens_vset=1.4E-1
tplens_vmon=1.68061E0
tplens_imon=2.40105E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26123E1
iondef3_imon=1.47263E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2663E1
iondef2_imon=1.55344E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98956E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.37505E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33596E0
ionrepsh_imon=8.4896E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33064E1
lens5b_imon=2.11944E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7503E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44983E0
os_ea2_imon=-2.96149E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06178E2
lens4b_imon=2.00876E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0924E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.36328E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.26769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01929E1
cs_anode2_imon=2.10982E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73341E1
iondef1_imon=1.11268E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6741E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.88332E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.18834E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14336E0
cs_ionaccel_imon=-1.15629E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47504E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-9.43659E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82672E2
mask1_imon=2.3925E-4
mask2_vset=0.0E0
mask2_vmon=-1.86146E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=8.36472E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.3556E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50176E3
multb_neg_imon=7.42076E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27791E0
defgridb_imon=5.88546E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.40342E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07509E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59941E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31836E1
cs_fil1_imon=5.92348E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91187E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6397E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.08044E-2
os_fil2_imon=-2.47976E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.43368E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.43364E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2226E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.83629E-1
res40_imon=-2.42849E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80013E1	-2.6226E-4	-8.80007E1	4.05312E-4	4.76837E-3	9.35793E-2	2.73305E1	-3.27163E1	-3.25729E1	2.67949E1	1.19872E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.99348E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80012E1	-2.14577E-4	-8.80009E1	3.57628E-4	4.673E-3	9.34124E-2	2.7346E1	-3.26458E1	-3.26206E1	2.682E1	1.20055E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80013E1	-2.6226E-4	-8.80005E1	5.48363E-4	4.72069E-3	9.33647E-2	2.72696E1	-3.26554E1	-3.2635E1	2.6796E1	1.20017E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.01085E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80007E1	-1.66893E-4	-8.80002E1	5.72205E-4	4.55379E-3	9.32932E-2	2.73281E1	-3.26585E1	-3.26862E1	2.6819E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
5.0E0	0.0E0	1.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80011E1	-2.6226E-4	-8.80004E1	1.90735E-4	4.62532E-3	9.36985E-2	2.72973E1	-3.26609E1	-3.26038E1	2.68202E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80007E1	-4.29153E-4	-8.80009E1	3.09944E-4	4.98295E-3	9.377E-2	2.72931E1	-3.2644E1	-3.2596E1	2.68142E1	1.19861E-7	2.51225E-3	2.51225E-3	6.33486E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80012E1	-2.6226E-4	-8.80005E1	9.53674E-5	5.03063E-3	9.36031E-2	2.7252E1	-3.26649E1	-3.26119E1	2.67798E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.8001E1	-3.8147E-4	-8.80006E1	1.66893E-4	4.60148E-3	9.36031E-2	2.72886E1	-3.26585E1	-3.26042E1	2.68094E1	1.19991E-7	2.51287E-3	2.51287E-3	6.31269E-3	3.006E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.8001E1	-7.39098E-4	-8.80004E1	-3.33786E-4	4.81606E-3	9.37223E-2	2.72574E1	-3.26572E1	-3.26187E1	2.68118E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80007E1	-8.58307E-4	-8.80007E1	-1.43051E-4	4.91142E-3	9.35078E-2	2.73111E1	-3.26561E1	-3.26981E1	2.681E1	1.2035E-7	2.50914E-3	2.50914E-3	6.32978E-3	3.00144E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.8001E1	-8.34465E-4	-8.80007E1	-4.76837E-5	4.55379E-3	9.36508E-2	2.72823E1	-3.26729E1	-3.26338E1	2.67896E1	1.19965E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80008E1	-6.4373E-4	-8.80006E1	-2.6226E-4	4.88758E-3	9.35555E-2	2.7265E1	-3.26478E1	-3.26549E1	2.6801E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.03027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80009E1	-7.39098E-4	-8.80009E1	-2.38419E-5	4.79221E-3	9.33886E-2	2.73075E1	-3.265E1	-3.26128E1	2.6834E1	1.20174E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80009E1	-9.05991E-4	-8.80005E1	7.15256E-5	4.86374E-3	9.37223E-2	2.73328E1	-3.26714E1	-3.26378E1	2.68372E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.97901E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80011E1	-1.09673E-3	-8.80006E1	1.43051E-4	4.52995E-3	9.39846E-2	2.7286E1	-3.26492E1	-3.2615E1	2.6822E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98665E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80008E1	-5.72205E-4	-8.80005E1	2.14577E-4	4.79221E-3	9.35555E-2	2.72763E1	-3.26897E1	-3.26101E1	2.67884E1	1.20192E-7	2.51918E-3	2.51918E-3	6.33734E-3	2.99603E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80009E1	-3.8147E-4	-8.80003E1	1.66893E-4	4.88758E-3	9.3627E-2	2.73129E1	-3.26741E1	-3.2614E1	2.68094E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80011E1	-4.29153E-4	-8.80003E1	2.14577E-4	4.74453E-3	9.33647E-2	2.73165E1	-3.26414E1	-3.26505E1	2.68641E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80009E1	-6.19888E-4	-8.80007E1	0.0E0	4.76837E-3	9.3627E-2	2.72678E1	-3.26645E1	-3.26212E1	2.67872E1	1.1979E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.01104E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.8001E1	-6.19888E-4	-8.80007E1	0.0E0	4.76837E-3	9.36031E-2	2.73341E1	-3.2663E1	-3.26123E1	2.6741E1	1.20069E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9926E-1