[Scan]
initial_time=2016-01-28T20:47:44
final_time=2016-01-28T20:48:03
ip_count=19
run=1026
dataset=7
scan=517
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.20871E-2
qbias_imon=-3.83303E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.44445E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.44353E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.73224E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63404E-8
mult1=-9.55847E-9
mult2=-2.62527E-9
rf_tmon=-5.12297E-3
rf_agc=3.29729E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.83291E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98474E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05245E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5352E1
cs_ef1b_imon=3.18056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02022E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.08361E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10793E0
lens1_imon=1.56284E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64524E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0395E1
cs_ea2_imon=1.40676E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84568E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.13247E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11412E1
os_restr1_imon=4.30968E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15146E1
os_ea1_imon=2.46433E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=9.55483E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91932E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.94368E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87239E-8
tplens_vset=1.4E-1
tplens_vmon=1.6143E0
tplens_imon=-4.40464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26378E1
iondef3_imon=1.51011E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.57913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.75306E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24443E0
ionrepsh_imon=8.5107E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33781E1
lens5b_imon=2.19463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74754E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41727E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.19137E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.10984E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.35895E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.31875E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.10622E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73016E1
iondef1_imon=1.10131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.11332E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.93988E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.10567E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=2.23349E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82667E2
mask1_imon=2.393E-4
mask2_vset=0.0E0
mask2_vmon=-1.86488E1
mask2_imon=-5.79658E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.62585E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.66313E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.41675E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08008E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59976E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31793E1
cs_fil1_imon=6.86052E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14303E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62775E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10433E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09127E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.47936E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30947E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70084E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21693E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.4E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04942E-1
res40_imon=-2.3456E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80011E1	-5.48363E-4	-8.80005E1	-4.76837E-5	5.22137E-3	9.34124E-2	2.72945E1	-3.26384E1	-3.26413E1	2.67613E1	1.20069E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.97187E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80013E1	-6.67572E-4	-8.80009E1	-1.90735E-4	5.126E-3	9.32693E-2	2.72488E1	-3.26701E1	-3.26432E1	2.68013E1	1.19891E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.97593E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80009E1	-8.82149E-4	-8.80007E1	3.33786E-4	5.48363E-3	9.35555E-2	2.7319E1	-3.26712E1	-3.26538E1	2.68383E1	1.19978E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.98819E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80014E1	-7.86781E-4	-8.80006E1	3.09944E-4	5.05447E-3	9.34601E-2	2.73454E1	-3.26506E1	-3.2629E1	2.68148E1	1.19953E-7	2.51525E-3	2.51525E-3	6.35601E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80012E1	-7.62939E-4	-8.8E1	1.19209E-4	4.98295E-3	9.34124E-2	2.72823E1	-3.26266E1	-3.26254E1	2.67794E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.8001E1	-4.52995E-4	-8.80008E1	1.90735E-4	4.79221E-3	9.31025E-2	2.72962E1	-3.26632E1	-3.26626E1	2.6792E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.80012E1	-3.57628E-4	-8.80005E1	-2.14577E-4	5.00679E-3	9.36031E-2	2.73153E1	-3.26603E1	-3.25954E1	2.68192E1	1.20466E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80012E1	-6.19888E-4	-8.80001E1	7.15256E-5	5.17368E-3	9.34839E-2	2.73129E1	-3.26506E1	-3.26194E1	2.67953E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.8001E1	-7.62939E-4	-8.80003E1	1.19209E-4	5.126E-3	9.36508E-2	2.72672E1	-3.26549E1	-3.26242E1	2.68265E1	1.19809E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-8.82149E-4	-8.80002E1	3.33786E-4	4.79221E-3	9.36747E-2	2.72781E1	-3.26356E1	-3.26609E1	2.68525E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80012E1	-7.86781E-4	-8.80003E1	5.96046E-4	4.95911E-3	9.34124E-2	2.7294E1	-3.26696E1	-3.26149E1	2.68063E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.01209E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80013E1	-8.10623E-4	-8.8E1	1.66893E-4	4.55379E-3	9.35316E-2	2.73159E1	-3.26717E1	-3.26092E1	2.68857E1	1.19826E-7	2.51758E-3	2.51758E-3	6.32047E-3	3.02025E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80012E1	-7.62939E-4	-8.8E1	1.90735E-4	4.57764E-3	9.36747E-2	2.72901E1	-3.26494E1	-3.26362E1	2.68322E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80013E1	-5.24521E-4	-8.8E1	9.53674E-5	4.88758E-3	9.37939E-2	2.72874E1	-3.26602E1	-3.26354E1	2.66953E1	1.19925E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.03618E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80011E1	-8.58307E-4	-8.80003E1	2.38419E-4	5.05447E-3	9.37223E-2	2.72582E1	-3.26488E1	-3.26464E1	2.68771E1	1.19749E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.01738E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80013E1	-7.86781E-4	-8.80005E1	1.66893E-4	5.03063E-3	9.377E-2	2.73105E1	-3.26669E1	-3.26122E1	2.68955E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01609E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40967E-2	-8.80014E1	-6.67572E-4	-8.80004E1	1.43051E-4	5.10216E-3	9.3627E-2	2.73279E1	-3.26567E1	-3.26428E1	2.67003E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80013E1	-7.15256E-4	-8.80001E1	-1.19209E-4	5.14984E-3	9.36031E-2	2.72992E1	-3.26632E1	-3.26278E1	2.69114E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.8001E1	-3.8147E-4	-8.80004E1	1.90735E-4	5.126E-3	9.35793E-2	2.73051E1	-3.26807E1	-3.26158E1	2.66869E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.20871E-2	-8.8001E1	-3.8147E-4	-8.80005E1	2.14577E-4	4.36306E-3	9.35793E-2	2.73016E1	-3.26838E1	-3.26378E1	2.68154E1	1.19965E-7	2.51116E-3	2.51116E-3	6.31837E-3	3.00824E-1