[Scan]
initial_time=2016-01-28T20:49:04
final_time=2016-01-28T20:49:23
ip_count=19
run=1026
dataset=7
scan=520
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.81184E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.24907E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.40227E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.77345E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.62874E-8
mult1=-1.00904E-8
mult2=-2.81145E-9
rf_tmon=-4.86342E-3
rf_agc=3.26543E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.04148E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6527E0
bslens_imon=2.67664E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19985E1
lens5a_imon=1.98245E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05162E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53847E1
cs_ef1b_imon=3.17088E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04569E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04948E1
cs_ea1_imon=1.08732E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08322E0
lens1_imon=1.48814E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64319E1
os_ef1alow_imon=2.97904E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03628E1
cs_ea2_imon=1.40493E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12649E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15641E1
os_ea1_imon=2.46058E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2447E0
cs_ionrep_imon=9.28509E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93444E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.97748E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87023E-8
tplens_vset=1.4E-1
tplens_vmon=1.59931E0
tplens_imon=-3.59492E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26484E1
iondef3_imon=1.5009E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26408E1
iondef2_imon=1.5692E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98397E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.33213E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2817E0
ionrepsh_imon=8.44153E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33287E1
lens5b_imon=2.19795E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.11527E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44733E0
os_ea2_imon=-5.54159E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00346E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.1966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06672E0
os_ef2alow_imon=-2.52245E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88543E-1
os_ef2bup_imon=-5.2401E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.31329E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72898E1
iondef1_imon=1.06887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08086E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.7838E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.06687E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12667E0
cs_ionaccel_imon=-8.96035E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47191E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56336E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=2.13631E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39303E-4
mask2_vset=0.0E0
mask2_vmon=-1.86437E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.58772E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.44704E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.16082E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29345E0
defgridb_imon=5.86304E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.39987E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59602E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=5.77568E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64479E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62721E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10211E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6525E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30526E-1
cs_fil2_imon=-2.62285E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.50869E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.217E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=2.97963E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.60944E-1
res40_imon=-2.46685E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80012E1	-4.29153E-4	-8.79998E1	4.29153E-4	5.03063E-3	9.32693E-2	2.72957E1	-3.26379E1	-3.26503E1	2.68388E1	1.20092E-7	2.51814E-3	2.51814E-3	6.2863E-3	3.01356E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80008E1	-1.43051E-4	-8.79999E1	3.8147E-4	4.8399E-3	9.377E-2	2.73297E1	-3.26464E1	-3.265E1	2.67926E1	1.20297E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00942E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80012E1	-2.6226E-4	-8.79999E1	4.05312E-4	4.64916E-3	9.36031E-2	2.72796E1	-3.2695E1	-3.26086E1	2.67868E1	1.19713E-7	2.52473E-3	2.52473E-3	6.31858E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80013E1	-4.05312E-4	-8.80003E1	1.19209E-4	4.8399E-3	9.377E-2	2.7332E1	-3.26762E1	-3.26236E1	2.68184E1	1.19841E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80011E1	-1.00136E-3	-8.80001E1	3.09944E-4	4.64916E-3	9.3627E-2	2.73285E1	-3.26891E1	-3.26176E1	2.68142E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80009E1	-8.34465E-4	-8.80003E1	4.76837E-5	4.8399E-3	9.36031E-2	2.73134E1	-3.26986E1	-3.26626E1	2.68358E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80008E1	-1.21593E-3	-8.79997E1	-1.19209E-4	4.81606E-3	9.34601E-2	2.72957E1	-3.26667E1	-3.26219E1	2.68106E1	1.20209E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80008E1	-6.19888E-4	-8.80001E1	-2.38419E-4	4.95911E-3	9.36508E-2	2.73259E1	-3.26707E1	-3.26291E1	2.68226E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80007E1	-7.39098E-4	-8.80001E1	1.90735E-4	4.673E-3	9.32455E-2	2.73021E1	-3.26669E1	-3.2611E1	2.66815E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80007E1	-7.86781E-4	-8.80001E1	1.19209E-4	4.74453E-3	9.36985E-2	2.72811E1	-3.26825E1	-3.26122E1	2.69067E1	1.20031E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80008E1	-9.29832E-4	-8.80004E1	4.29153E-4	4.74453E-3	9.35555E-2	2.73428E1	-3.26642E1	-3.26417E1	2.67972E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80013E1	-5.24521E-4	-8.80002E1	2.14577E-4	4.8399E-3	9.34362E-2	2.72721E1	-3.26585E1	-3.26178E1	2.68028E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80012E1	-8.34465E-4	-8.80001E1	2.86102E-4	4.76837E-3	9.34124E-2	2.73075E1	-3.26358E1	-3.25813E1	2.67692E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80011E1	-5.00679E-4	-8.79999E1	-2.38419E-5	4.673E-3	9.3627E-2	2.72929E1	-3.26676E1	-3.26615E1	2.68022E1	1.20122E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80011E1	-4.52995E-4	-8.80001E1	4.76837E-4	5.03063E-3	9.377E-2	2.72691E1	-3.26325E1	-3.2652E1	2.68064E1	1.20084E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99613E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80011E1	-5.96046E-4	-8.80002E1	1.66893E-4	4.55379E-3	9.36747E-2	2.73165E1	-3.26368E1	-3.2626E1	2.67692E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.0148E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80013E1	-6.4373E-4	-8.80002E1	4.76837E-4	4.48227E-3	9.377E-2	2.72898E1	-3.26614E1	-3.26349E1	2.68484E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80012E1	-5.00679E-4	-8.80002E1	3.57628E-4	4.60148E-3	9.39131E-2	2.73517E1	-3.26579E1	-3.2629E1	2.68505E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80009E1	-5.96046E-4	-8.80001E1	2.14577E-4	4.98295E-3	9.36985E-2	2.72835E1	-3.26573E1	-3.26374E1	2.67595E1	1.19891E-7	2.51919E-3	2.51919E-3	6.31798E-3	2.99594E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80008E1	-6.19888E-4	-8.80003E1	3.57628E-4	4.86374E-3	9.35078E-2	2.72898E1	-3.26408E1	-3.26484E1	2.68256E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.97963E-1