[Scan]
initial_time=2016-01-28T20:49:57
final_time=2016-01-28T20:50:16
ip_count=19
run=1026
dataset=7
scan=522
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.78967E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.21068E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.45099E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.6983E-9
ql4_vset=
ql4_vmon=6.67572E-4
ql4_imon=1.62817E-8
mult1=-9.8065E-9
mult2=-2.7565E-9
rf_tmon=-5.54392E-3
rf_agc=3.24407E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=5.31495E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.34859E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19547E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05036E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.18272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=1.09352E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0743E0
lens1_imon=1.43896E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64801E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.41384E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.12065E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.31545E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.46752E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63605E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.54421E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=1.97287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.86097E-8
tplens_vset=1.4E-1
tplens_vmon=1.63494E0
tplens_imon=-1.99784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26156E1
iondef3_imon=1.49984E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26768E1
iondef2_imon=1.58337E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98381E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.54993E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2344E0
ionrepsh_imon=8.54963E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33593E1
lens5b_imon=2.18472E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40724E0
os_ea2_imon=-6.31592E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00534E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.23598E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.37229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28973E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73131E1
iondef1_imon=1.11228E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68382E1
iondef4_imon=1.10107E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.76034E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.05528E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15537E0
cs_ionaccel_imon=-7.31025E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.71667E-6
window_vset=0.0E0
window_vmon=2.58188E-1
window_imon=-9.00411E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82707E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86272E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.56568E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93694E3
defgrida_imon=6.49678E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.32854E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.11806E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.40852E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59745E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31862E1
cs_fil1_imon=7.13682E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01461E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62874E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.50379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52665E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21866E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.00852E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.84229E-1
res40_imon=-2.53661E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=188
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80009E1	-5.72205E-4	-8.8E1	-1.19209E-4	5.36442E-3	9.33886E-2	2.72811E1	-3.26987E1	-3.25972E1	2.67688E1	1.20069E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80011E1	-5.96046E-4	-8.80002E1	1.90735E-4	4.76837E-3	9.35793E-2	2.73075E1	-3.26633E1	-3.26729E1	2.68069E1	1.20209E-7	2.51632E-3	2.51632E-3	6.33977E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.8001E1	-1.43051E-4	-8.80002E1	-4.76837E-5	5.07832E-3	9.33886E-2	2.7308E1	-3.26283E1	-3.26689E1	2.68367E1	1.19713E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80008E1	-2.86102E-4	-8.80005E1	7.15256E-5	4.69685E-3	9.34124E-2	2.72831E1	-3.25832E1	-3.2656E1	2.67608E1	1.1988E-7	2.51679E-3	2.51679E-3	6.31779E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.8001E1	-3.8147E-4	-8.80003E1	1.90735E-4	4.8399E-3	9.34601E-2	2.72544E1	-3.26596E1	-3.26343E1	2.68377E1	1.20084E-7	2.51248E-3	2.51248E-3	6.31858E-3	3.01742E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.8001E1	-9.53674E-5	-8.80006E1	-9.53674E-5	4.93526E-3	9.33886E-2	2.72943E1	-3.26591E1	-3.2632E1	2.681E1	1.19953E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99175E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80012E1	-4.29153E-4	-8.80007E1	-1.90735E-4	4.98295E-3	9.35316E-2	2.73387E1	-3.26549E1	-3.25865E1	2.67878E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80012E1	-4.05312E-4	-8.80004E1	-9.53674E-5	4.98295E-3	9.3174E-2	2.73117E1	-3.26765E1	-3.25437E1	2.67956E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98156E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80013E1	-3.8147E-4	-8.80006E1	4.76837E-5	4.673E-3	9.36031E-2	2.72673E1	-3.26632E1	-3.26065E1	2.68482E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80014E1	-4.05312E-4	-8.80003E1	1.90735E-4	4.55379E-3	9.35078E-2	2.7308E1	-3.26537E1	-3.25859E1	2.67794E1	1.19749E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80011E1	-2.86102E-4	-8.80003E1	3.57628E-4	5.07832E-3	9.36508E-2	2.73171E1	-3.26561E1	-3.26434E1	2.68022E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.8001E1	-4.76837E-4	-8.80004E1	1.19209E-4	5.34058E-3	9.3627E-2	2.73448E1	-3.26422E1	-3.2644E1	2.68364E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80012E1	-4.29153E-4	-8.80003E1	1.43051E-4	5.43594E-3	9.33886E-2	2.73021E1	-3.26639E1	-3.26218E1	2.67337E1	1.20106E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80013E1	-4.76837E-4	-8.80002E1	4.05312E-4	5.07832E-3	9.33409E-2	2.73178E1	-3.26544E1	-3.2626E1	2.68267E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80013E1	-4.76837E-4	-8.79999E1	2.14577E-4	5.07832E-3	9.37939E-2	2.72922E1	-3.26346E1	-3.26297E1	2.68599E1	1.20158E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80013E1	-5.72205E-4	-8.80001E1	2.38419E-4	5.03063E-3	9.33886E-2	2.72642E1	-3.2638E1	-3.26789E1	2.6771E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.98222E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80013E1	-6.19888E-4	-8.80002E1	2.86102E-4	4.673E-3	9.33409E-2	2.73275E1	-3.26602E1	-3.26183E1	2.67505E1	1.19757E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80012E1	-6.19888E-4	-8.80002E1	4.05312E-4	5.05447E-3	9.3317E-2	2.72827E1	-3.26685E1	-3.26319E1	2.68076E1	1.20055E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80011E1	-4.29153E-4	-8.80002E1	1.90735E-4	4.673E-3	9.34124E-2	2.73034E1	-3.26886E1	-3.26092E1	2.68241E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80011E1	-5.96046E-4	-8.80004E1	6.67572E-4	5.10216E-3	9.32932E-2	2.73131E1	-3.26768E1	-3.26156E1	2.68382E1	1.20042E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.00852E-1