[Scan]
initial_time=2016-01-28T20:51:43
final_time=2016-01-28T20:52:03
ip_count=19
run=1026
dataset=7
scan=526
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79418E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.3417E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.38202E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.73813E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.6408E-8
mult1=-1.07406E-8
mult2=-2.88004E-9
rf_tmon=-4.50358E-3
rf_agc=3.3374E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.74005E-10
bslens_vset=-6.2E0
bslens_vmon=-6.61784E0
bslens_imon=2.36275E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19494E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.05121E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.17984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04557E1
cs_ea1_imon=1.07618E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08846E0
lens1_imon=1.4602E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64771E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04085E1
cs_ea2_imon=1.39862E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=3.03424E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.12256E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.31761E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15158E1
os_ea1_imon=2.47106E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23263E0
cs_ionrep_imon=9.48758E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.87343E-8
tplens_vset=1.4E-1
tplens_vmon=1.64792E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26402E1
iondef3_imon=1.50657E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26791E1
iondef2_imon=1.60461E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.9853E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.53539E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=8.43283E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33522E1
lens5b_imon=2.18153E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37362E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08339E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.29539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.08531E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73299E1
iondef1_imon=1.11334E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69199E1
iondef4_imon=1.10648E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.80106E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82881E-1
olens1_imon=7.05938E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-8.46352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47334E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=2.02927E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39308E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.49843E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.44723E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.04539E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.04373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.41285E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08038E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59682E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31773E1
cs_fil1_imon=7.3891E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.73768E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62841E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.117E-2
os_fil2_imon=-2.43171E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62237E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28228E-1
cs_fil2_imon=-1.96319E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.94441E-1
res40_imon=-2.33839E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=221
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.8001E1	-7.15256E-4	-8.80001E1	2.6226E-4	5.00679E-3	9.3317E-2	2.73488E1	-3.26667E1	-3.26136E1	2.67852E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80009E1	-8.82149E-4	-8.80001E1	1.43051E-4	5.26905E-3	9.36508E-2	2.72739E1	-3.26585E1	-3.26304E1	2.67592E1	1.20363E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80012E1	-6.91414E-4	-8.80003E1	7.15256E-5	4.93526E-3	9.36031E-2	2.73207E1	-3.26561E1	-3.2637E1	2.69211E1	1.19883E-7	2.52407E-3	2.52407E-3	6.3131E-3	3.01609E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80011E1	-9.05991E-4	-8.79999E1	9.53674E-5	4.95911E-3	9.36747E-2	2.72961E1	-3.26897E1	-3.26164E1	2.68352E1	1.20293E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80014E1	-9.53674E-4	-8.80006E1	3.57628E-4	4.93526E-3	9.35555E-2	2.73128E1	-3.26573E1	-3.25971E1	2.69752E1	1.20069E-7	2.52757E-3	2.52757E-3	6.31288E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80013E1	-5.96046E-4	-8.80003E1	2.86102E-4	4.98295E-3	9.35555E-2	2.73472E1	-3.26446E1	-3.26278E1	2.68508E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80014E1	-6.91414E-4	-8.80004E1	2.38419E-5	4.81606E-3	9.34601E-2	2.72156E1	-3.2653E1	-3.26164E1	2.68214E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80015E1	-9.29832E-4	-8.80003E1	2.14577E-4	4.91142E-3	9.35793E-2	2.73326E1	-3.2667E1	-3.25966E1	2.68388E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80013E1	-6.67572E-4	-8.80001E1	9.53674E-5	5.10216E-3	9.36031E-2	2.7262E1	-3.26343E1	-3.26425E1	2.6825E1	1.20244E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.00144E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80012E1	-7.86781E-4	-8.80002E1	-2.38419E-5	5.29289E-3	9.37223E-2	2.72561E1	-3.26523E1	-3.26205E1	2.67692E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.9943E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80008E1	-7.39098E-4	-8.80002E1	3.57628E-4	5.22137E-3	9.35793E-2	2.72797E1	-3.26685E1	-3.26567E1	2.68623E1	1.20084E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.00144E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80011E1	-5.72205E-4	-8.80006E1	9.53674E-5	5.45979E-3	9.36985E-2	2.7329E1	-3.26756E1	-3.25666E1	2.68196E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.8001E1	-3.8147E-4	-8.80001E1	0.0E0	5.14984E-3	9.36031E-2	2.73009E1	-3.26416E1	-3.26524E1	2.67884E1	1.20297E-7	2.52585E-3	2.52585E-3	6.31858E-3	2.99613E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.8001E1	-4.76837E-4	-8.80001E1	3.09944E-4	4.93526E-3	9.36031E-2	2.72903E1	-3.26664E1	-3.25788E1	2.68209E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.03712E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80009E1	-5.96046E-4	-8.80004E1	4.05312E-4	5.03063E-3	9.38416E-2	2.7293E1	-3.26451E1	-3.26292E1	2.67265E1	1.20177E-7	2.51575E-3	2.51575E-3	6.3282E-3	3.01237E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.8001E1	-5.48363E-4	-8.8E1	7.15256E-5	4.64916E-3	9.37223E-2	2.73086E1	-3.26467E1	-3.26119E1	2.68382E1	1.19895E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.00087E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.20871E-2	-8.80009E1	-8.34465E-4	-8.8E1	-9.53674E-5	4.76837E-3	9.37223E-2	2.72769E1	-3.26735E1	-3.26458E1	2.66851E1	1.19697E-7	2.52384E-3	2.52384E-3	6.32896E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.22418E-2	-8.80009E1	-2.86102E-4	-8.80003E1	2.14577E-4	4.93526E-3	9.33647E-2	2.72845E1	-3.26596E1	-3.26272E1	2.69107E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80012E1	-3.8147E-4	-8.80003E1	3.33786E-4	4.72069E-3	9.36985E-2	2.73135E1	-3.26789E1	-3.2599E1	2.67379E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80012E1	-3.8147E-4	-8.80003E1	4.05312E-4	4.8399E-3	9.37939E-2	2.73299E1	-3.26791E1	-3.26402E1	2.69199E1	1.19749E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.02769E-1