[Scan]
initial_time=2016-01-28T20:52:36
final_time=2016-01-28T20:52:56
ip_count=19
run=1026
dataset=7
scan=528
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.755E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-5.80478E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.46228E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.70445E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.6314E-8
mult1=-1.00786E-8
mult2=-2.74481E-9
rf_tmon=-3.30018E-3
rf_agc=3.47013E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.35381E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=1.99425E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05223E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53448E1
cs_ef1b_imon=3.15605E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04802E1
cs_ea1_imon=1.10022E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07801E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.99027E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03582E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.02667E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.11857E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.33311E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15017E1
os_ea1_imon=2.47407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.44845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93571E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=1.97287E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.86904E-8
tplens_vset=1.4E-1
tplens_vmon=1.65405E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26461E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.59085E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.53622E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=8.74188E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74868E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70747E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10742E0
os_ef2alow_imon=-2.39606E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10685E1
os_restr2_imon=3.35463E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.09829E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7285E1
iondef1_imon=1.08508E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67711E1
iondef4_imon=1.11404E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.76788E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.05126E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.06259E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47511E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.54368E-6
window_vset=0.0E0
window_vmon=2.32359E-1
window_imon=-7.56253E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82662E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.8668E1
mask2_imon=-5.11183E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92599E3
multa_neg_imon=7.8875E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.34098E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.46933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.33737E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.40979E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59695E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31727E1
cs_fil1_imon=7.1188E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.36527E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6258E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.35056E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.23543E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72312E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.97714E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21646E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.58401E-1
res40_imon=-2.21586E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80012E1	-6.91414E-4	-8.80004E1	2.38419E-5	4.86374E-3	9.33647E-2	2.73972E1	-3.26614E1	-3.26162E1	2.68262E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80012E1	-4.52995E-4	-8.80004E1	1.90735E-4	4.81606E-3	9.33886E-2	2.73238E1	-3.26335E1	-3.26304E1	2.68369E1	1.20142E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80011E1	-4.52995E-4	-8.80002E1	3.33786E-4	4.62532E-3	9.30786E-2	2.7206E1	-3.26666E1	-3.26028E1	2.67485E1	1.20208E-7	2.51384E-3	2.51384E-3	6.3074E-3	3.01609E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80009E1	-4.76837E-4	-8.80005E1	2.38419E-5	4.55379E-3	9.31025E-2	2.72931E1	-3.26482E1	-3.26206E1	2.68226E1	1.19891E-7	2.51709E-3	2.51709E-3	6.30212E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.8001E1	-5.24521E-4	-8.80004E1	-1.66893E-4	4.72069E-3	9.36747E-2	2.73193E1	-3.26708E1	-3.26278E1	2.68388E1	1.20174E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.8001E1	-2.38419E-4	-8.80003E1	2.14577E-4	4.69685E-3	9.35555E-2	2.72903E1	-3.26203E1	-3.26585E1	2.68155E1	1.198E-7	2.51096E-3	2.51096E-3	6.2752E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80013E1	-1.66893E-4	-8.80004E1	3.33786E-4	4.76837E-3	9.32932E-2	2.73592E1	-3.26483E1	-3.26712E1	2.68257E1	1.20028E-7	2.51679E-3	2.51679E-3	6.29703E-3	3.00494E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80015E1	-7.15256E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.32932E-2	2.72282E1	-3.26194E1	-3.26242E1	2.67571E1	1.20226E-7	2.51411E-3	2.51411E-3	6.33065E-3	3.01193E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80011E1	-6.67572E-4	-8.80005E1	1.90735E-4	5.07832E-3	9.34601E-2	2.74008E1	-3.26892E1	-3.26131E1	2.68792E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02511E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80012E1	-1.16825E-3	-8.80003E1	2.38419E-5	5.36442E-3	9.33647E-2	2.71785E1	-3.26674E1	-3.26406E1	2.67485E1	1.19979E-7	2.51575E-3	2.51575E-3	6.30221E-3	3.02977E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80013E1	-6.4373E-4	-8.80005E1	1.19209E-4	5.22137E-3	9.33886E-2	2.74084E1	-3.26687E1	-3.26476E1	2.68304E1	1.20116E-7	2.51758E-3	2.51758E-3	6.32483E-3	3.01748E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80013E1	-9.53674E-4	-8.80004E1	-3.33786E-4	5.07832E-3	9.37223E-2	2.72835E1	-3.26693E1	-3.26146E1	2.681E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80011E1	-6.91414E-4	-8.80001E1	-3.33786E-4	4.93526E-3	9.33409E-2	2.72889E1	-3.26398E1	-3.265E1	2.67217E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80011E1	-8.10623E-4	-8.80001E1	-7.15256E-5	5.14984E-3	9.36031E-2	2.73411E1	-3.26807E1	-3.2611E1	2.67818E1	1.19705E-7	2.51552E-3	2.51552E-3	6.3514E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80011E1	-7.86781E-4	-8.80002E1	-1.66893E-4	4.95911E-3	9.3627E-2	2.72444E1	-3.26735E1	-3.26218E1	2.67193E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80008E1	-6.91414E-4	-8.80003E1	-1.66893E-4	4.95911E-3	9.377E-2	2.72648E1	-3.26585E1	-3.26044E1	2.68238E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01347E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80011E1	-9.05991E-4	-8.80002E1	2.14577E-4	4.55379E-3	9.35316E-2	2.72889E1	-3.26717E1	-3.26266E1	2.67782E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80011E1	-3.09944E-4	-8.79998E1	0.0E0	5.43594E-3	9.34601E-2	2.73173E1	-3.26544E1	-3.26162E1	2.68505E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80008E1	-3.8147E-4	-8.80002E1	1.43051E-4	4.91142E-3	9.37223E-2	2.73267E1	-3.26807E1	-3.26062E1	2.67698E1	1.19902E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80011E1	-6.19888E-4	-8.80003E1	7.15256E-5	4.8399E-3	9.33886E-2	2.7285E1	-3.26655E1	-3.26461E1	2.67711E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1