[Scan]
initial_time=2016-01-28T20:53:30
final_time=2016-01-28T20:53:49
ip_count=19
run=1026
dataset=7
scan=530
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.75725E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.9067E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.4285E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.61769E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63489E-8
mult1=-1.02341E-8
mult2=-3.10985E-9
rf_tmon=-4.88494E-3
rf_agc=3.30512E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.3457E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64734E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.125E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.18741E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=1.07901E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05838E0
lens1_imon=1.59824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.98594E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.39543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.05406E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.11782E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.46964E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63677E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=9.47342E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=1.95665E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.86472E-8
tplens_vset=1.4E-1
tplens_vmon=1.63612E0
tplens_imon=-3.69675E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25906E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26687E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.78203E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26213E0
ionrepsh_imon=8.67705E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37952E0
os_ea2_imon=-6.35131E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00658E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.19678E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79404E-1
os_ef2bup_imon=-5.21436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10865E1
os_restr2_imon=3.36184E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69007E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.78581E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82976E-1
olens1_imon=7.06662E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.86804E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.28961E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50091E3
multb_neg_imon=7.70372E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3524E0
defgridb_imon=6.16053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.41201E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08086E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59958E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31762E1
cs_fil1_imon=7.58732E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79775E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62831E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13932E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58693E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28592E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.32573E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80011E1	-5.00679E-4	-8.80004E1	-9.53674E-5	4.98295E-3	9.34839E-2	2.73123E1	-3.26801E1	-3.26128E1	2.66718E1	1.20278E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.04241E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80017E1	-5.00679E-4	-8.80003E1	1.19209E-4	4.95911E-3	9.33647E-2	2.72437E1	-3.2695E1	-3.26306E1	2.68974E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.03804E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.8001E1	-6.4373E-4	-8.80003E1	-2.38419E-5	5.19753E-3	9.33647E-2	2.73351E1	-3.26285E1	-3.26725E1	2.67571E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.9943E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80013E1	-5.00679E-4	-8.80005E1	-4.76837E-5	4.62532E-3	9.35078E-2	2.73352E1	-3.26573E1	-3.26006E1	2.6801E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99083E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80013E1	-6.67572E-4	-8.80005E1	3.33786E-4	4.91142E-3	9.35555E-2	2.73021E1	-3.26999E1	-3.26482E1	2.68166E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.97901E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80012E1	-5.24521E-4	-8.80005E1	-1.19209E-4	5.14984E-3	9.34601E-2	2.72839E1	-3.26402E1	-3.26331E1	2.67804E1	1.20174E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80014E1	-4.05312E-4	-8.80007E1	-1.19209E-4	5.10216E-3	9.3627E-2	2.73303E1	-3.26819E1	-3.26224E1	2.67565E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80017E1	-1.90735E-4	-8.80007E1	-9.53674E-5	4.72069E-3	9.37223E-2	2.72745E1	-3.2653E1	-3.26266E1	2.68346E1	1.19697E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.201E-2	-8.80011E1	-1.43051E-4	-8.80002E1	4.76837E-5	4.88758E-3	9.377E-2	2.72939E1	-3.2659E1	-3.2603E1	2.67938E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80012E1	-4.05312E-4	-8.80004E1	-1.66893E-4	4.55379E-3	9.34601E-2	2.73556E1	-3.26386E1	-3.26326E1	2.6792E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80014E1	-2.86102E-4	-8.80002E1	-1.19209E-4	4.74453E-3	9.36747E-2	2.73193E1	-3.26443E1	-3.26119E1	2.67399E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80017E1	-9.53674E-5	-8.80004E1	-1.19209E-4	4.88758E-3	9.3317E-2	2.72889E1	-3.26308E1	-3.26128E1	2.69139E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.02511E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80014E1	-2.14577E-4	-8.8E1	2.38419E-5	5.14984E-3	9.34601E-2	2.73216E1	-3.26658E1	-3.26303E1	2.67377E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02922E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80014E1	-4.29153E-4	-8.80002E1	4.76837E-5	4.673E-3	9.36985E-2	2.73568E1	-3.26494E1	-3.26338E1	2.67181E1	1.19925E-7	2.51693E-3	2.51693E-3	6.32978E-3	3.00144E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80011E1	-3.57628E-4	-8.80002E1	5.24521E-4	4.79221E-3	9.34839E-2	2.72895E1	-3.26861E1	-3.2596E1	2.69337E1	1.20069E-7	2.52318E-3	2.52318E-3	6.35692E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80016E1	-5.72205E-4	-8.79999E1	2.14577E-4	4.673E-3	9.35555E-2	2.72192E1	-3.26362E1	-3.25924E1	2.66989E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80013E1	-5.72205E-4	-8.8E1	1.19209E-4	4.79221E-3	9.35316E-2	2.73568E1	-3.27372E1	-3.24938E1	2.67409E1	1.20069E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80012E1	-6.19888E-4	-8.79999E1	1.43051E-4	4.57764E-3	9.38177E-2	2.73098E1	-3.26691E1	-3.25953E1	2.67468E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80012E1	-5.24521E-4	-8.80002E1	-2.38419E-5	4.52995E-3	9.38416E-2	2.7255E1	-3.26644E1	-3.26195E1	2.66412E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80014E1	-4.05312E-4	-8.80002E1	0.0E0	4.88758E-3	9.377E-2	2.72943E1	-3.26687E1	-3.25906E1	2.69007E1	1.20004E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.0148E-1