[Scan]
initial_time=2016-01-28T20:53:56
final_time=2016-01-28T20:54:16
ip_count=19
run=1026
dataset=7
scan=531
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.80317E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-5.93019E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.41152E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.61821E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.63899E-8
mult1=-1.01859E-8
mult2=-2.78847E-9
rf_tmon=-4.76477E-3
rf_agc=3.39164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=5.5536E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66728E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=2.03166E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.19547E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02286E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05055E1
cs_ea1_imon=1.07154E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04879E0
lens1_imon=1.51095E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64864E1
os_ef1alow_imon=2.9799E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03611E1
cs_ea2_imon=1.38007E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84294E1
cs_ef1a_imon=3.04053E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.11792E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.3145E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15196E1
os_ea1_imon=2.47425E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63511E1
os_ef1bup_imon=3.0802E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25577E0
cs_ionrep_imon=9.5768E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91831E2
cs_nozzle_imon=1.93468E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=1.96566E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.87727E-8
tplens_vset=1.4E-1
tplens_vmon=1.66347E0
tplens_imon=-2.77784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26591E1
iondef3_imon=1.50789E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58759E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.80051E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2925E0
ionrepsh_imon=8.4345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33927E1
lens5b_imon=2.19106E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.13372E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43697E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00726E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70915E1
cs_ef2a_imon=3.19398E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07951E0
os_ef2alow_imon=-2.4059E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05741E-1
os_ef2bup_imon=-5.23529E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11036E1
os_restr2_imon=3.35528E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29598E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01659E1
cs_anode2_imon=2.08842E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10901E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.09663E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.87734E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.0461E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11268E0
cs_ionaccel_imon=-1.09225E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56112E1
einzel_imon=7.56808E-6
window_vset=0.0E0
window_vmon=2.19468E-1
window_imon=-9.16352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.39196E-4
mask2_vset=0.0E0
mask2_vmon=-1.86793E1
mask2_imon=-3.39995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92607E3
multa_neg_imon=7.2261E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.45477E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.67787E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45564E0
defgridb_imon=6.25276E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.40212E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07703E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59719E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=7.18672E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.05177E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62935E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.4221E-2
os_fil2_imon=-2.55023E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14671E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.71079E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30593E-1
cs_fil2_imon=-2.90577E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.49176E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21671E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71236E-1
res40_imon=-2.38344E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80012E1	-7.62939E-4	-8.80004E1	-7.15256E-5	4.86374E-3	9.36747E-2	2.73346E1	-3.26856E1	-3.26231E1	2.68395E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9926E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80017E1	2.38419E-5	-8.80006E1	-9.53674E-5	4.86374E-3	9.36031E-2	2.72829E1	-3.26951E1	-3.26182E1	2.67637E1	1.20055E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80017E1	0.0E0	-8.80003E1	-4.76837E-5	4.8399E-3	9.36985E-2	2.72668E1	-3.2708E1	-3.25953E1	2.68238E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.01475E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80017E1	-2.86102E-4	-8.8E1	2.38419E-5	4.48227E-3	9.38416E-2	2.73275E1	-3.26649E1	-3.26431E1	2.68502E1	1.20092E-7	2.51603E-3	2.51603E-3	6.29157E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80011E1	-4.76837E-4	-8.80003E1	4.76837E-5	4.62532E-3	9.39131E-2	2.73399E1	-3.26476E1	-3.26591E1	2.68221E1	1.20278E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.99E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80013E1	-3.33786E-4	-8.80005E1	-4.76837E-5	4.93526E-3	9.39369E-2	2.72835E1	-3.26603E1	-3.2596E1	2.68184E1	1.20069E-7	2.51443E-3	2.51443E-3	6.30192E-3	2.97963E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80012E1	-9.53674E-5	-8.80006E1	-9.53674E-5	4.60148E-3	9.39846E-2	2.72714E1	-3.26334E1	-3.26517E1	2.67514E1	1.20278E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.97963E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80013E1	-3.57628E-4	-8.80004E1	4.76837E-5	4.43459E-3	9.37939E-2	2.73069E1	-3.26524E1	-3.26224E1	2.6804E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80013E1	-1.66893E-4	-8.80003E1	4.76837E-5	5.00679E-3	9.35555E-2	2.73249E1	-3.26729E1	-3.2617E1	2.67956E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80011E1	-7.15256E-5	-8.80003E1	9.53674E-5	4.98295E-3	9.3627E-2	2.73009E1	-3.26561E1	-3.26452E1	2.68478E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80013E1	-4.76837E-5	-8.80004E1	3.09944E-4	5.19753E-3	9.35078E-2	2.72775E1	-3.27155E1	-3.262E1	2.67187E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.47923E-2	-8.80015E1	-5.00679E-4	-8.80002E1	4.05312E-4	4.79221E-3	9.36985E-2	2.7337E1	-3.26891E1	-3.26172E1	2.68771E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.98222E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.42513E-2	-8.80012E1	-4.76837E-4	-8.80003E1	7.15256E-5	4.8399E-3	9.36031E-2	2.73574E1	-3.26711E1	-3.26074E1	2.68046E1	1.19913E-7	2.52647E-3	2.52647E-3	6.29645E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37103E-2	-8.80015E1	-6.67572E-4	-8.80003E1	-1.19209E-4	5.07832E-3	9.36031E-2	2.73538E1	-3.27221E1	-3.25485E1	2.68623E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01609E-1
1.8E1	0.0E0	1.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80014E1	-5.72205E-4	-8.80007E1	1.90735E-4	4.86374E-3	9.34124E-2	2.73195E1	-3.26645E1	-3.26188E1	2.65655E1	1.20017E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80012E1	-6.91414E-4	-8.80006E1	2.14577E-4	4.8399E-3	9.34124E-2	2.72504E1	-3.26705E1	-3.26536E1	2.66785E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01085E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80011E1	-6.4373E-4	-8.80002E1	4.29153E-4	4.45843E-3	9.34839E-2	2.72328E1	-3.2634E1	-3.27438E1	2.68655E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80012E1	-4.05312E-4	-8.8E1	1.43051E-4	5.07832E-3	9.34362E-2	2.73282E1	-3.26316E1	-3.26404E1	2.67963E1	1.19841E-7	2.51182E-3	2.51182E-3	6.30212E-3	3.006E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.80014E1	-4.05312E-4	-8.79996E1	1.66893E-4	4.72069E-3	9.35316E-2	2.73104E1	-3.26526E1	-3.26254E1	2.68256E1	1.20191E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00676E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80011E1	-2.14577E-4	-8.8E1	1.90735E-4	5.19753E-3	9.35316E-2	2.73063E1	-3.26518E1	-3.26591E1	2.68052E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01085E-1