[Scan]
initial_time=2016-01-28T20:54:23
final_time=2016-01-28T20:54:42
ip_count=19
run=1026
dataset=7
scan=532
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.84451E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.03783E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.43955E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.5748E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.63467E-8
mult1=-1.00896E-8
mult2=-2.78448E-9
rf_tmon=-4.62057E-3
rf_agc=3.31954E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.23651E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66734E0
bslens_imon=2.48007E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19983E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12455E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53808E1
cs_ef1b_imon=3.18957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04784E1
cs_ea1_imon=1.09409E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10264E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.39907E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.03135E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.12514E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15216E1
os_ea1_imon=2.4719E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63587E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.37274E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91845E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.85738E-8
tplens_vset=1.4E-1
tplens_vmon=1.63542E0
tplens_imon=-3.78655E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50758E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02931E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.1979E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=8.56884E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37827E0
os_ea2_imon=-4.54359E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.19273E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.35931E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.09288E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.08255E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.10323E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.84676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.07151E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47403E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.89687E-6
window_vset=0.0E0
window_vmon=2.0593E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=6.5789E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.67984E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.39002E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41961E0
defgridb_imon=6.35179E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.4036E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59958E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=7.62335E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.54547E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62893E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.24738E-2
os_fil2_imon=-2.47376E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.26546E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57102E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28357E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21831E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.01338E-1
res40_imon=-2.2555E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80011E1	-2.86102E-4	-8.80003E1	4.76837E-5	4.673E-3	9.35316E-2	2.73105E1	-3.26717E1	-3.26164E1	2.67932E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.8001E1	-4.52995E-4	-8.80002E1	-2.38419E-5	4.57764E-3	9.34839E-2	2.72967E1	-3.26759E1	-3.26308E1	2.67878E1	1.20568E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80012E1	-4.76837E-5	-8.80002E1	2.14577E-4	4.72069E-3	9.34601E-2	2.73234E1	-3.26467E1	-3.26278E1	2.69091E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32418E-3	2.98819E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80014E1	-5.48363E-4	-8.80003E1	1.66893E-4	4.48227E-3	9.34839E-2	2.72662E1	-3.26461E1	-3.26254E1	2.67966E1	1.20192E-7	2.52553E-3	2.52553E-3	6.3074E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80015E1	-1.00136E-3	-8.80006E1	2.38419E-5	4.95911E-3	9.36508E-2	2.73273E1	-3.26591E1	-3.26392E1	2.68695E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80014E1	-7.86781E-4	-8.80003E1	-4.76837E-5	4.91142E-3	9.34839E-2	2.73291E1	-3.2653E1	-3.26434E1	2.68064E1	1.20122E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9926E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80012E1	-9.53674E-4	-8.79998E1	-1.43051E-4	4.673E-3	9.36508E-2	2.73175E1	-3.26313E1	-3.25983E1	2.68028E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.97762E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80013E1	-6.4373E-4	-8.80003E1	-2.14577E-4	4.72069E-3	9.37223E-2	2.72775E1	-3.26711E1	-3.26254E1	2.68178E1	1.20243E-7	2.51498E-3	2.51498E-3	6.32858E-3	2.99845E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80014E1	-8.34465E-4	-8.80005E1	-3.09944E-4	4.64916E-3	9.36985E-2	2.73117E1	-3.26813E1	-3.25719E1	2.67854E1	1.20383E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80013E1	-8.10623E-4	-8.80003E1	1.19209E-4	4.62532E-3	9.36747E-2	2.72797E1	-3.26543E1	-3.2652E1	2.68099E1	1.20278E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.4E1	0.0E0	3.0E0	5.66E2	3.82E2	-7.26282E-2	-8.80013E1	-8.82149E-4	-8.80003E1	3.09944E-4	4.72069E-3	9.36985E-2	2.73321E1	-3.26855E1	-3.2635E1	2.68052E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.80013E1	-5.96046E-4	-8.80001E1	1.19209E-4	4.69685E-3	9.37462E-2	2.73015E1	-3.26386E1	-3.26272E1	2.6783E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80014E1	-5.72205E-4	-8.79997E1	-9.53674E-5	4.88758E-3	9.39369E-2	2.72769E1	-3.26416E1	-3.2635E1	2.68148E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80016E1	-4.29153E-4	-8.79999E1	-1.43051E-4	4.50611E-3	9.3627E-2	2.7252E1	-3.26673E1	-3.27522E1	2.68472E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01871E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80011E1	-5.24521E-4	-8.79998E1	0.0E0	4.74453E-3	9.36031E-2	2.72973E1	-3.26651E1	-3.2629E1	2.6831E1	1.20158E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80014E1	-5.72205E-4	-8.8E1	1.90735E-4	4.74453E-3	9.33886E-2	2.73033E1	-3.2629E1	-3.26717E1	2.6777E1	1.20031E-7	2.52027E-3	2.52027E-3	6.27954E-3	2.99613E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80012E1	-8.10623E-4	-8.8E1	1.66893E-4	4.88758E-3	9.34124E-2	2.71837E1	-3.2584E1	-3.28075E1	2.6783E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80014E1	-5.48363E-4	-8.79999E1	1.43051E-4	4.74453E-3	9.33886E-2	2.72986E1	-3.26791E1	-3.26201E1	2.68128E1	1.19953E-7	2.52384E-3	2.52384E-3	6.2752E-3	2.97901E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80011E1	-4.52995E-4	-8.80001E1	2.14577E-4	4.72069E-3	9.35793E-2	2.73141E1	-3.26272E1	-3.26038E1	2.68178E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80012E1	-5.00679E-4	-8.80004E1	3.09944E-4	4.72069E-3	9.35078E-2	2.72931E1	-3.26693E1	-3.26248E1	2.67872E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1