[Scan]
initial_time=2016-01-28T20:56:10
final_time=2016-01-28T20:56:29
ip_count=19
run=1026
dataset=7
scan=536
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.78744E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.02424E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.47101E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.59113E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63229E-8
mult1=-9.86583E-9
mult2=-2.82517E-9
rf_tmon=-4.30301E-3
rf_agc=3.34979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.4363E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20231E1
lens5a_imon=1.98934E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05001E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53394E1
cs_ef1b_imon=3.1802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02146E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=1.08998E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08374E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98414E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03914E1
cs_ea2_imon=1.40605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.02559E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=1.12424E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.31581E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.46752E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07604E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2344E0
cs_ionrep_imon=9.49466E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93296E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01407E1
cs_anode1_imon=1.97431E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.86865E-8
tplens_vset=1.4E-1
tplens_vmon=1.66031E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2652E1
iondef2_imon=1.59116E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.38137E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29693E0
ionrepsh_imon=8.64874E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33599E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7497E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44913E0
os_ea2_imon=-5.57264E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00545E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.18705E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98625E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.36292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.31132E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01635E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.83562E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82714E-1
olens1_imon=7.10488E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47349E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.5098E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86993E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.80282E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.65251E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.54444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50005E0
defgridb_imon=6.25256E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33195E1
os_fil1_imon=9.41567E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0829E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60049E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31804E1
cs_fil1_imon=6.94461E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83979E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62772E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.34161E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21901E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.22672E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80012E1	-9.29832E-4	-8.8E1	5.00679E-4	4.81606E-3	9.35078E-2	2.73287E1	-3.26608E1	-3.25995E1	2.68453E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.0148E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80013E1	-9.53674E-4	-8.79999E1	5.24521E-4	4.98295E-3	9.34839E-2	2.72867E1	-3.2675E1	-3.26125E1	2.68544E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80015E1	-1.0252E-3	-8.80001E1	1.66893E-4	4.72069E-3	9.32455E-2	2.73173E1	-3.26689E1	-3.26446E1	2.66026E1	1.20031E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80017E1	-5.00679E-4	-8.80001E1	1.43051E-4	4.81606E-3	9.33647E-2	2.72793E1	-3.26518E1	-3.26128E1	2.67884E1	1.20042E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80013E1	-5.24521E-4	-8.80004E1	-9.53674E-5	4.64916E-3	9.35793E-2	2.72745E1	-3.27035E1	-3.26134E1	2.68022E1	1.20069E-7	2.52045E-3	2.52045E-3	6.31288E-3	2.9887E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80013E1	-5.48363E-4	-8.80003E1	-9.53674E-5	4.673E-3	9.32455E-2	2.72636E1	-3.26663E1	-3.26056E1	2.6822E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80012E1	-4.29153E-4	-8.80004E1	7.15256E-5	4.52995E-3	9.35078E-2	2.73021E1	-3.26585E1	-3.26074E1	2.68034E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9926E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80013E1	-8.82149E-4	-8.80002E1	-2.38419E-4	5.10216E-3	9.36985E-2	2.73231E1	-3.26645E1	-3.26344E1	2.67842E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80012E1	-8.58307E-4	-8.80002E1	4.29153E-4	4.91142E-3	9.3627E-2	2.72843E1	-3.2667E1	-3.25838E1	2.68815E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02922E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80013E1	-8.34465E-4	-8.80003E1	2.86102E-4	4.64916E-3	9.377E-2	2.72827E1	-3.26691E1	-3.26337E1	2.68641E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.01475E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80015E1	-8.10623E-4	-8.80003E1	2.38419E-4	5.03063E-3	9.35555E-2	2.72733E1	-3.26338E1	-3.26236E1	2.67133E1	1.20004E-7	2.50775E-3	2.50775E-3	6.29665E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.43285E-2	-8.80015E1	-7.39098E-4	-8.80002E1	1.90735E-4	4.62532E-3	9.33647E-2	2.73646E1	-3.26464E1	-3.26278E1	2.68971E1	1.20122E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.97963E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80013E1	-8.10623E-4	-8.80004E1	6.4373E-4	4.55379E-3	9.38177E-2	2.73063E1	-3.262E1	-3.25858E1	2.68412E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80011E1	-6.91414E-4	-8.80002E1	2.6226E-4	4.74453E-3	9.39131E-2	2.73604E1	-3.27041E1	-3.26536E1	2.67686E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80014E1	-6.91414E-4	-8.80003E1	4.29153E-4	4.64916E-3	9.3627E-2	2.73257E1	-3.2662E1	-3.26054E1	2.68841E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80015E1	-9.53674E-4	-8.80003E1	3.57628E-4	5.03063E-3	9.36031E-2	2.72727E1	-3.26585E1	-3.26331E1	2.67283E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.40192E-2	-8.80013E1	-8.10623E-4	-8.80003E1	2.86102E-4	5.00679E-3	9.36985E-2	2.72974E1	-3.26903E1	-3.26154E1	2.67607E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80012E1	-6.67572E-4	-8.80003E1	6.4373E-4	4.60148E-3	9.39846E-2	2.72757E1	-3.26681E1	-3.26488E1	2.69127E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80015E1	-7.86781E-4	-8.80003E1	6.19888E-4	4.91142E-3	9.36031E-2	2.73766E1	-3.26651E1	-3.2611E1	2.67115E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80015E1	-1.0252E-3	-8.80005E1	2.14577E-4	5.00679E-3	9.3627E-2	2.72915E1	-3.2652E1	-3.2639E1	2.67986E1	1.20017E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00041E-1